Tyndall’s Open Access Characterisation Facility is equipped with state-of-the-art wafer probing systems that facilitate on-wafer RF and DC probing, temperature environmental measurements, wafer level reliability tests and wafer mapping of results.
Typical project measurement conducted in this facility include:
The facility supports extensive wafer level characterisation of CMOS/MEMS test structures, as well as the precision measurement of impedance, capacitance, frequency spectrum, voltage, current, etc.
Also available is a 110GHz PNA with microwave attachments to the Cascade prober. The facility is extensively used by several Tyndall groups with internationally renowned expertise in the area of device and test structure electrical characterisation as part of advanced process developments and materials research. Other capabilities in the laboratory include: Polytec vibrometer, Zygo interferometer, vacuum based measurements; particularly relevant to the static and dynamic analysis of MEMS. This facility is particularly relevant to external users under the ASCENT program.