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Leader in Integrated ICT Hardware & Systems

Paul Hurley - Head of Group - Nanoelectronic Materials & Devices

researcher

Contact

+353 (0)21 2346080
paul.hurley (at) tyndall (dot) ie

  • MNS (Materials and Devices)

Professor Hurley received his Ph.D. (1990) and B.Eng. (1985, 1st class honors) in Electronic Engineering at the University of Liverpool. Paul is the Head of the Nanoelectronic Materials and Devices Group at the Tyndall National Institute and a Research Professor in Depertment of Chemistry at University College Cork.  

Paul’s  research group are exploring alternative semiconductor materials and device structures aimed at improving energy efficiency in the next generation of logic switches which will be used in applications, covering: nanoelectronics, flexible electronics, mobile communications and low power sensor technologies. Paul leads a research team of around ten PhD students, post-doctoral researchers, visiting students and Tyndall Research staff who perform research into alternative semiconductor materials and device structures aimed at improving the energy efficiency in the next generation of logic devices. In particular the group are working on III-V and 2D (e.g., MoS2, WSe2) semiconductors and their interfaces with metals and oxides which will form the heart of logic devices incorporating these materials.  The group are also exploring the use of metal-oxide-semiconductor (MOS) systems for the creation of solar fuels through water splitting reactions

Paul leads a research team of ten PhD students, post-doctoral researchers, visiting students and Tyndall Research staff who perform basic research on high dielectric constant (high-k) thin films for applications in nanoelectronics. The current research work covers use of high-k oxides in conjunction with III-V and 2D semiconductor materials for future energy efficient logic devices and the use of high-k films in integrated capacitors. The groups are also exploring the use of MOS systems in energy applications as well as investigating the electrical properties of emerging phase change materials. Paul received an Intel Outstanding Researcher award for his work in high-k/III-V interface defect studies in 2012. Paul is a member of the Technical Committee of the Insulating Films on Semiconductors (INFOS) conference and the International Workshop on Dielectrics in Microelectronics (WoDiM). In addition to research activities, he is a part time lecturer in the Department of Electrical Engineering at University College Cork. He has published over one hundred papers in the field of micro and nanoelectronics, and has given over 25 invited presentations and seminars in the high-k area from 2006 to 2014.

Research Grants

Funder Start Date End Date Title Role
Science Foundation of Ireland 05-JUN-07 28-AUG-07 SFI-Summer Student David Kohen Principal Investigator
Science Foundation of Ireland 05-JUN-06 28-AUG-06 Summer Student - David Hondagneu Principal Investigator
Science Foundation of Ireland 01-MAY-08 31-OCT-08 SFI"Future Oxides & Channel Materials for Ultimate Scaling" FOCUS Principal Investigator
European Union 01-JAN-08 31-DEC-15 EU 'Silicon-based Nanostructures & Nanodevices for Long Term Nanoelectronics Applications' Principal Investigator
Science Foundation of Ireland 01-JAN-12 31-DEC-12 Fabrication and characterisation of Schottky contacts and capacitor structures on Chalcogenide passivated germanium. Principal Investigator
Science Foundation of Ireland 01-OCT-09 31-DEC-15 Future Oxides and Channel Materials for Ultimate Scaling (FOCUS) Principal Investigator
Science Foundation of Ireland 01-JAN-12 01-FEB-14 The junctionless InGaAs MOSFET - The platform and the process. Principal Investigator
Science Foundation of Ireland 01-AUG-05 30-JUN-12 SFI "High Dielectric Constant Materials for Future ICT" Principal Investigator
Irish Research Council for Science, Engineering & Technology (IRCSET) 01-OCT-06 28-FEB-10 IRCSET Scholarship - Rathnait Long Principal Investigator
Science Foundation of Ireland 01-DEC-07 30-MAY-08 Total External Reflection X-ray Fluorescence Spectrometer for Compositional Analysis of Thin Films Principal Investigator
Irish Research Council for Science, Engineering & Technology (IRCSET) 01-OCT-09 30-SEP-12 IRCSET-Marie Curie International Mobility Fellowships in Science Engineering and Technology Principal Investigator
European Union 01-DEC-12 30-NOV-15 SYnthesis and functionality of chalcogenide NAnostructure for PhasSE change memories. Principal Investigator
Industry 01-DEC-13 31-DEC-21 Hopkins Communicaqtions WoDIM Conference 2014 Principal Investigator
European Union 01-NOV-13 30-APR-17 Compound Semiconductors for 3D integration. Principal Investigator
Science Foundation of Ireland 01-DEC-14 31-JUL-18 Understanding the nature of Interfaces in two dimensional Electronic Devices. Principal Investigator
Science Foundation of Ireland 01-SEP-14 31-MAY-18 Copper diffusion barrier layers for advanced interconnect integration. Principal Investigator
Science Foundation Ireland 01-APR-10 31-AUG-15 "Investigating Emerging Non-Silicon Transistors (INVENT)"
Science Foundation Ireland 01-DEC-07 31-MAY-13 FORME
Other: Not Listed 01-AUG-10 31-JUL-12 Fieldeffect controllable antifuse structures based on dielectric breakdown
Intel Corporation 02-APR-12 29-MAR-13 Dit extractions and interpretation on III-V device related structures
Intel Corporation 01-APR-11 30-MAR-12 Development of measurement capability for high-k/InGaAs systems and CV and GV analysis of samples from INTEL CR
Science Foundation Ireland 01-DEC-13 30-NOV-16 “Research into Emerging Nano-structured Electrodes for the splitting of Water (RENEW)
Intel Corporation 01-MAR-14 28-FEB-15 Characteristaion of 2D Materials
Intel Corporation 01-APR-13 28-MAR-14 Investigating the capacitance and conductance of narrow band gap MOS systems and its possible application to Cox extraction
European Commission 01-JUN-06 30-SEP-09 Pulling the Limits of NanoCMOS electronics (PULLNANO) EU Integrated Project
European Commission 01-JAN-08 30-DEC-10 Silicon-based nanostructures and nanodevices for nanoelectronics (NANOSIL) EU Network of Excellence
Enterprise Ireland 03-FEB-09 31-AUG-12 Epitaxial Nanostructured GaAs on silicon for next generation Electronics (ENGAGE)
Irish Research Council 01-OCT-09 28-SEP-12 An investigation of carrier transport in compound semiconductor MOSFETs
European Commission 03-SEP-01 25-AUG-04 Ferroelectrics for Europe (FLEUR)
Irish Research Council 02-OCT-06 25-SEP-09 ‘Deposition of High-k Dielectrics on III-V Substrates’
European Commission 01-JUN-00 30-JUN-03 Tantalum pentoxide photodeposition on silicon (TOPS)

Research Collaborators

Company Country Name
Stanford University U.S.A. Prof Paul C McIntyre
University of Texas at Dallas U.S.A. Prof Robert Wallace
INTEL Corporation U.S.A. Dr Kelin Kuhn Intel Fellow
IBM Yorktown U.S.A. Dr. Richard Haight
Glasgow University SCOTLAND Prof Iain Thayne
IBM Zurich SWITZERLAND Dr Jean Fompeyrine
Universitat Autonoma de Barcelona SPAIN Prof Enrique Miranda
University of Siegen GERMANY Prof Max Lemme
Liverpool Univeristy UNITED KINGDOM Prof Steve Hall
Trinity College Dublin IRELAND Prof Georg Duesberg
Trinity College Dublin IRELAND Prof John Boland
IMEP Grenoble FRANCE Prof Gerard Ghibaudo
Catholic University of Leuven BELGIUM Prof Valery Afanasev
Tyndall IRELAND Prof Martyn Pemble
Tyndall IRELAND Dr Ian Povey
Tyndall IRELAND Prof Jim Greer
Dublin City University IRELAND Prog Greg Hughes
Queens University Belfast UNITED KINGDOM Dr David McNeill
Trinity College Dublin IRELAND Dr Robert Barklie
University of Texas at Dallas U.S.A. Prof Masimmo Fischetti
Chalmers University SWEDEN Prof Olof Engstrom

Book Chapters

YearPublication
2010Gate Stacks
O. Engstrom, I.Z. Mitrovic, S. Hall, P.K. Hurley, K. Cherkaoui, S. Monaghan, H.D.B. Gottlob, M.C. Lemme (2010) Gate Stacks. : John Wiley & Sons, Inc..
2010Chapter 2: Gate Stacks
O. Engström, I. Z. Mitrovic, S. Hall, P. K. Hurley, K. Cherkaoui, S. Monaghan, H. D. B. Gottlob and M. C. Lemme (2010) Chapter 2: Gate Stacks. : John Wiley & Sons, Inc..
2003Optical characterization of high-k dielectrics HfO(2) thin films obtained by MOCVD. Opto-Ireland 2002: Optics and Photonics Technologies and Applications, Pts 1 and 2
Modreanu, M.,Hurley, P. K.,O'Sullivan, B. J.,O'Looney, B.,Senateur, J. P.,Rousell, H.,Rousell, F.,Audier, M.,Dubourdieu, C.,Boyd, I. W.,Fang, Q.,Leedham, T. L.,Rushworth, S.,Jones, A. C.,Davies, H.,Jimenez, C.,Blau, W. J.,Donegan, J. F.,Duke, A. F.,MacCraith, J. A.,McMillan, N. D.,Oconnor, G. M.,Omongain, E.,Toal, V.,McLaughlin, J. A. (2003) Optical characterization of high-k dielectrics HfO(2) thin films obtained by MOCVD. Opto-Ireland 2002: Optics and Photonics Technologies and Applications, Pts 1 and 2. : .

Peer Reviewed Journals

YearJournalPublication
2014Applied Physics LettersDiffusion of In0.53Ga0.47As elements through hafnium oxide during post deposition annealing
Cabrera, W,Brennan, B,Dong, H,O'Regan, TP,Povey, IM,Monaghan, S,O'Connor, E,Hurley, PK,Wallace, RM,Chabal, YJ (2014) Diffusion of In0.53Ga0.47As elements through hafnium oxide during post deposition annealing. : . [Details]
2014Applied Physics LettersDiffusion of In0. 53Ga0. 47As elements through hafnium oxide during post deposition annealing
Cabrera, W and Brennan, B and Dong, H and O'Regan, TP and Povey, IM and Monaghan, S and O'Connor, 'E and Hurley, PK and Wallace, RM and Chabal, YJ (2014) Diffusion of In0. 53Ga0. 47As elements through hafnium oxide during post deposition annealing. : .
2014Applied Physics LettersFermi level de-pinning of aluminium contacts to n-type germanium using thin atomic layer deposited layers
Gajula, D.R. and Baine, P. and Modreanu, M. and Hurley, P.K. and Armstrong, B.M. and McNeill, D.W. (2014) Fermi level de-pinning of aluminium contacts to n-type germanium using thin atomic layer deposited layers. : .
2014Journal of Applied PhysicsA combined capacitance-voltage and hard x-ray photoelectron spectroscopy characterisation of metal/Al2O3/In0.53Ga0.47As capacitor structures
Lin, J,Walsh, L,Hughes, G,Woicik, JC,Povey, IM,O'Regan, TP,Hurley, PK (2014) A combined capacitance-voltage and hard x-ray photoelectron spectroscopy characterisation of metal/Al2O3/In0.53Ga0.47As capacitor structures. : . [Details]
2013Journal of Vacuum Science and Technology B: Microelectronics and Nanometer StructuresNonhomogeneous spatial distribution of filamentary leakage current paths in circular area Pt/HfO2/Pt capacitors
Miranda, E. and Jiménez, D. and Suñé, J. and O'Connor, E. and Monaghan, S. and Povey, I. and Cherkaoui, K. and Hurley, P.K. (2013) Nonhomogeneous spatial distribution of filamentary leakage current paths in circular area Pt/HfO2/Pt capacitors. : .
2013Journal of Vacuum Science & Technology BNonhomogeneous spatial distribution of filamentary leakage current paths in circular area Pt/HfO2/Pt capacitors
Miranda, E,Jimenez, D,Sune, J,O'Connor, E,Monaghan, S,Povey, I,Cherkaoui, K,Hurley, PK (2013) Nonhomogeneous spatial distribution of filamentary leakage current paths in circular area Pt/HfO2/Pt capacitors. : . [Details]
2013Journal of Applied PhysicsAnalysis of the breakdown spot spatial distribution in Pt/HfO2/Pt capacitors using nearest neighbor statistics
Saura, X., Suñé, J., Monaghan, S., Hurley, P.K., Miranda, E. (2013) Analysis of the breakdown spot spatial distribution in Pt/HfO2/Pt capacitors using nearest neighbor statistics. : . [Details]
2013Journal of Applied PhysicsAn investigation of capacitance-voltage hysteresis in metal/high-k/In0.53Ga0.47As metal-oxide-semiconductor capacitors
Lin, J., Gomeniuk, Y.Y., Monaghan, S., Povey, I.M., Cherkaoui, K., O'Connor, É., Power, M., Hurley, P.K. (2013) An investigation of capacitance-voltage hysteresis in metal/high-k/In0.53Ga0.47As metal-oxide-semiconductor capacitors. : . [Details]
2013Microelectronic EngineeringElectrically active interface defects in the In0.53Ga0.47As MOS system
Djara, V., O'Regan, T.P., Cherkaoui, K., Schmidt, M., Monaghan, S., O'Connor, É., Povey, I.M., O'Connell, D., Pemble, M.E., Hurley, P.K. (2013) Electrically active interface defects in the In0.53Ga0.47As MOS system. : . [Details]
2013Microelectronic EngineeringElectrically active interface defects in the In< sub> 0.53 Ga< sub> 0.47 As MOS system
Djara, V and O’Regan, TP and Cherkaoui, K and Schmidt, M and Monaghan, S and O’Connor, 'E and Povey, IM and O’Connell, D and Pemble, ME and Hurley, PK (2013) Electrically active interface defects in the In< sub> 0.53 Ga< sub> 0.47 As MOS system. : .
2013Journal of Applied PhysicsAnalysis of the breakdown spot spatial distribution in Pt/HfO2/Pt capacitors using nearest neighbor statistics
Saura, X,Sune, J,Monaghan, S,Hurley, PK,Miranda, E (2013) Analysis of the breakdown spot spatial distribution in Pt/HfO2/Pt capacitors using nearest neighbor statistics. : . [Details]
2013Journal of Applied PhysicsChemical and electrical characterization of the HfO2/InAlAs interface
Brennan, B,Galatage, RV,Thomas, K,Pelucchi, E,Hurley, PK,Kim, J,Hinkle, CL,Vogel, EM,Wallace, RM (2013) Chemical and electrical characterization of the HfO2/InAlAs interface. : . [Details]
2013IEEE Transactions on Device and Materials ReliabilityThe Characterization and Passivation of Fixed Oxide Charges and Interface States in the Al2O3/InGaAs MOS System
Hurley, PK,O'Connor, E,Djara, V,Monaghan, S,Povey, IM,Long, RD,Sheehan, B,Lin, J,McIntyre, PC,Brennan, B,Wallace, RM,Pemble, ME,Cherkaoui, K (2013) The Characterization and Passivation of Fixed Oxide Charges and Interface States in the Al2O3/InGaAs MOS System. : . [Details]
2013Journal of Applied PhysicsAn investigation of capacitance-voltage hysteresis in metal/high-k/In0.53Ga0.47As metal-oxide-semiconductor capacitors
Lin, J,Gomeniuk, YY,Monaghan, S,Povey, IM,Cherkaoui, K,O'Connor, E,Power, M,Hurley, PK (2013) An investigation of capacitance-voltage hysteresis in metal/high-k/In0.53Ga0.47As metal-oxide-semiconductor capacitors. : . [Details]
2013Physical Review BHard x-ray photoelectron spectroscopy and electrical characterization study of the surface potential in metal/Al2O3/GaAs(100) metal-oxide-semiconductor structures
Walsh, LA,Hughes, G,Lin, J,Hurley, PK,O'Regan, TP,Cockayne, E,Woicik, JC (2013) Hard x-ray photoelectron spectroscopy and electrical characterization study of the surface potential in metal/Al2O3/GaAs(100) metal-oxide-semiconductor structures. : . [Details]
2013Solid-State ElectronicsInvestigation of electron mobility in surface-channel Al2O3/In0.53Ga0.47As MOSFETs
Negara, MA,Djara, V,O'Regan, TP,Cherkaoui, K,Burke, M,Gomeniuk, YY,Schmidt, M,O'Connor, E,Povey, IM,Quinn, AJ,Hurley, PK (2013) Investigation of electron mobility in surface-channel Al2O3/In0.53Ga0.47As MOSFETs. : . [Details]
2013Microelectronics ReliabilityDirect observation of the generation of breakdown spots in MIM structures under constant voltage stress
Saura, X,Moix, D,Sune, J,Hurley, PK,Miranda, E (2013) Direct observation of the generation of breakdown spots in MIM structures under constant voltage stress. : . [Details]
2013Journal of Applied PhysicsChemical and electrical characterization of the HfO2/InAlAs interface
Brennan, B. and Galatage, R. V. and Thomas, K. and Pelucchi, E. and Hurley, P. K. and Kim, J. and Hinkle, C. L. and Vogel, E. M. and Wallace, R. M. (2013) Chemical and electrical characterization of the HfO2/InAlAs interface. : . [Details]
2013ECS TransactionsElectrical Properties and Charge Transport in the Pd/Al2O3/InGaAs MOS Structure
Gomeniuk, YY and Gomeniuk, YV and Nazarov, AN and Monaghan, S and Cherkaoui, K and O'Connor, 'E and Povey, I and Djara, V and Hurley, PK (2013) Electrical Properties and Charge Transport in the Pd/Al2O3/InGaAs MOS Structure. : .
2013Journal of Vacuum Science and Technology B: Microelectronics and Nanometer StructuresEffects of alternating current voltage amplitude and oxide capacitance on mid-gap interface state defect density extractions in In0.53Ga 0.47As capacitors
Monaghan, S. and O'Connor, E. and Povey, I.M. and Sheehan, B.J. and Cherkaoui, K. and Hutchinson, B.J.A. and Hurley, P.K. and Ferdousi, F. and Rios, R. and Kuhn, K.J. and Rahman, A. (2013) Effects of alternating current voltage amplitude and oxide capacitance on mid-gap interface state defect density extractions in In0.53Ga 0.47As capacitors. : .
2012Applied Physics LettersInterface barriers at the interfaces of polar GaAs(111) faces with Al2O3
Chou, HY,O'Connor, E,Hurley, PK,Afanas'ev, VV,Houssa, M,Stesmans, A,Ye, PD,Newcomb, SB (2012) Interface barriers at the interfaces of polar GaAs(111) faces with Al2O3. : . [Details]
2012Semiconductor Science and TechnologyOn the activation of implanted silicon ions in p-In0.53Ga0.47As
Djara, V,Cherkaoui, K,Newcomb, SB,Thomas, K,Pelucchi, E,O'Connell, D,Floyd, L,Dimastrodonato, V,Mereni, LO,Hurley, PK (2012) On the activation of implanted silicon ions in p-In0.53Ga0.47As. : . [Details]
2012Journal of the Electrochemical SocietyErratum: Charged Defect Quantification in Pt/Al2O3/In0.53Ga0.47As/InP MOS Capacitors (vol 158, pg G103, 2011)
Long, RD,Shin, B,Monaghan, S,Cherkaoui, K,Cagnon, J,Stemmer, S,McIntyre, PC,Hurley, PK (2012) Erratum: Charged Defect Quantification in Pt/Al2O3/In0.53Ga0.47As/InP MOS Capacitors (vol 158, pg G103, 2011). : . [Details]
2012Semiconductor Science and TechnologyOn the activation of implanted silicon ions in p-In0.53Ga0.47As
Djara, V. and Cherkaoui, K. and Newcomb, S. B. and Thomas, K. and Pelucchi, E. and O'Connell, D. and Floyd, L. and Dimastrodonato, V. and Mereni, L. O. and Hurley, P. K. (2012) On the activation of implanted silicon ions in p-In0.53Ga0.47As. : .
2012Microelectronic EngineeringThe structural and electrical characterization of a HfErOx dielectric for MIM capacitor DRAM applications
Toomey, B. and Cherkaoui, K. and Monaghan, S. and Djara, V. and O'Connor, E. and O'Connell, D. and Oberbeck, L. and Tois, E. and Blomberg, T. and Newcomb, S.B. and Hurley, P.K. (2012) The structural and electrical characterization of a HfErOx dielectric for MIM capacitor DRAM applications. : . [Details]
2012Journal of the Electrochemical SocietyErratum: Charged defect quantification in PtAl 2O 3In 0.53Ga 0.47AsInP MOS capacitors (Journal of the Electrochemical Society (2011) 158 (G103))
Long, R.D. and Shin, B. and Monaghan, S. and Cherkaoui, K. and Cagnon, J. and Stemmer, S. and McIntyre, P.C. and Hurley, P.K. (2012) Erratum: Charged defect quantification in PtAl 2O 3In 0.53Ga 0.47AsInP MOS capacitors (Journal of the Electrochemical Society (2011) 158 (G103)). : . [Details]
2012IEEE Transactions On Electron DevicesImpact of forming gas annealing on the performance of surface-channel In 0.53Ga 0.47As MOSFETs with an ALD Al 2O 3 gate dielectric
Djara, V. and Cherkaoui, K. and Schmidt, M. and Monaghan, S. and O'Connor, É. and Povey, I.M. and O'Connell, D. and Pemble, M.E. and Hurley, P.K. (2012) Impact of forming gas annealing on the performance of surface-channel In 0.53Ga 0.47As MOSFETs with an ALD Al 2O 3 gate dielectric. : .
2012Applied Physics LettersA combined hard x-ray photoelectron spectroscopy and electrical characterisation study of metal/SiO2/Si(100) metal-oxide-semiconductor structures
Walsh, LA,Hughes, G,Hurley, PK,Lin, J,Woicik, JC (2012) A combined hard x-ray photoelectron spectroscopy and electrical characterisation study of metal/SiO2/Si(100) metal-oxide-semiconductor structures. : . [Details]
2012Electrochemical Society TransactionsCan metal/Al2O3/In0.53Ga0.47As/InP MOSCAP properties translate to metal/Al2O3/In 0.53Ga0.47As/InP MOSFET characteristics?
Cherkaoui, K., Djara, V., O'Connor, É., Lin, J., Negara, M.A., Povey, I.M., Monaghan, S., Hurley, P.K. (2012) Can metal/Al2O3/In0.53Ga0.47As/InP MOSCAP properties translate to metal/Al2O3/In 0.53Ga0.47As/InP MOSFET characteristics?. : . [Details]
2011Microelectronic EngineeringThe structural and electrical properties of the SrTa2O6/In0.53Ga0.47As/InP system
Zhang, P. F.,Nagle, R. E.,Deepak, N.,Povey, I. M.,Gomeniuk, Y. Y.,O'Connor, E.,Petkov, N.,Schmidt, M.,O'Regan, T. P.,Cherkaoui, K.,Pemble, M. E.,Hurley, P. K.,Whatmore, R. W. (2011) The structural and electrical properties of the SrTa2O6/In0.53Ga0.47As/InP system. : .
2011Journal of Vacuum Science & Technology BElectrical analysis of three-stage passivated In0.53Ga0.47As capacitors with varying HfO2 thicknesses and incorporating an Al2O3 interface control layer
Monaghan, S,O'Mahony, A,Cherkaoui, K,O'Connor, E,Povey, IM,Nolan, MG,O'Connell, D,Pemble, ME,Hurley, PK,Provenzano, G,Crupi, F,Newcomb, SB; (2011) Electrical analysis of three-stage passivated In0.53Ga0.47As capacitors with varying HfO2 thicknesses and incorporating an Al2O3 interface control layer. : . [Details]
2011Applied Physics LettersIn-situ characterization of Ga2O passivation of In0.53Ga0.47As prior to high-k dielectric atomic layer deposition
Milojevic, M,Contreras-Guerrero, R,O'Connor, E,Brennan, B,Hurley, PK,Kim, J,Hinkle, CL,Wallace, RM; (2011) In-situ characterization of Ga2O passivation of In0.53Ga0.47As prior to high-k dielectric atomic layer deposition. : . [Details]
2011Applied Physics LettersCalculation of the capacitance-voltage characteristic of GaAs, In0.53Ga0.47As, and InAs metal-oxide-semiconductor structures
O'Regan, TP,Hurley, PK (2011) Calculation of the capacitance-voltage characteristic of GaAs, In0.53Ga0.47As, and InAs metal-oxide-semiconductor structures. : . [Details]
2011Applied Physics LettersAnalysis of effective mobility and hall effect mobility in high-k based In0.75Ga0.25As metal-oxide-semiconductor high-electron-mobility transistors
Negara, MA,Veksler, D,Huang, J,Ghibaudo, G,Hurley, PK,Bersuker, G,Goel, N,Kirsch, P (2011) Analysis of effective mobility and hall effect mobility in high-k based In0.75Ga0.25As metal-oxide-semiconductor high-electron-mobility transistors. : . [Details]
2011Microelectronic EngineeringInvestigation of bulk defects in amorphous and crystalline HfO2 thin films
Modreanu, M, Monaghan, S, Povey, IM, Cherkaoui, K, Hurley, PK, Androulidaki, M (2011) Investigation of bulk defects in amorphous and crystalline HfO2 thin films. : . [Details]
2011Microelectronic EngineeringMulti-technique characterisation of MOVPE-grown GaAs on Si
Wong, CS,Bennett, NS,McNally, PJ,Galiana, B,Tejedor, P,Benedicto, M,Molina-Aldareguia, JM,Monaghan, S,Hurley, PK,Cherkaoui, K (2011) Multi-technique characterisation of MOVPE-grown GaAs on Si. : . [Details]
2011Applied Physics LettersOn the calculation of effective electric field in In0.53Ga0.47As surface channel metal-oxide-semiconductor field-effect-transistors
Sonnet, A. M. and Galatage, R. V. and Hurley, P. K. and Pelucchi, E. and Thomas, K. K. and Gocalinska, A. and Huang, J. and Goel, N. and Bersuker, G. and Kirk, W. P. and Hinkle, C. L. and Wallace, R. M. and Vogel, E. M. (2011) On the calculation of effective electric field in In0.53Ga0.47As surface channel metal-oxide-semiconductor field-effect-transistors. : .
2011Microelectronic EngineeringRemote phonon and surface roughness limited universal electron mobility of In0.53Ga0.47As surface channel MOSFETs
Sonnet, A. M. and Galatage, R. V. and Hurley, P. M. and Pelucchi, E. and Thomas, K. and Gocalinska, A. and Huang, J. and Goel, N. and Bersuker, G. and Kirk, W. P. and Hinkle, C. L. and Vogel, E. M. (2011) Remote phonon and surface roughness limited universal electron mobility of In0.53Ga0.47As surface channel MOSFETs. : .
2011Applied Physics LettersAnalysis of the minority carrier response of n-type and p-type Au/Ni/Al2O3/In0.53Ga0.47As/InP capacitors following an optimized (NH4)2S treatment
O'Connor, E. and Monaghan, S. and Cherkaoui, K. and Povey, I.M. and Hurley, P.K. (2011) Analysis of the minority carrier response of n-type and p-type Au/Ni/Al2O3/In0.53Ga0.47As/InP capacitors following an optimized (NH4)2S treatment. : . [Details]
2011Advanced Materials ResearchElectrical properties of high-k LaLuO 3 gate oxide for SOI MOSFETs
Gomeniuk, Y.Y.a and Gomeniuk, Y.V.a and Nazarov, A.N.a and Hurley, P.K.b and Cherkaoui, K.b and Monaghan, S.b and Hellström, P.-E.c and Gottlob, H.D.B.d and Schubert, J.e and Lopes, J.M.J.e (2011) Electrical properties of high-k LaLuO 3 gate oxide for SOI MOSFETs. : .
2011Electrochemical Society TransactionsCapacitance-voltage and interface defect density characteristics of GaAs and In0.53Ga0.47As MOS capacitors incorporating a PECVD Si3N4 dielectric
O'Connor, É., Djara, V., Monaghan, S., Hurley, P.K., Cherkaoui, K. (2011) Capacitance-voltage and interface defect density characteristics of GaAs and In0.53Ga0.47As MOS capacitors incorporating a PECVD Si3N4 dielectric. : . [Details]
2011Microelectronic EngineeringTransport and interface states in high-κ LaSiO x dielectric
Gomeniuk, Y.Y. and Gomeniuk, Y.V. and Tyagulskii, I.P. and Tyagulskii, S.I. and Nazarov, A.N. and Lysenko, V.S. and Cherkaoui, K. and Monaghan, S. and Hurley, P.K. (2011) Transport and interface states in high-κ LaSiO x dielectric. : .
2011Journal of Applied PhysicsA systematic study of (NH 4) 2 S passivation (22%, 10%, 5%, or 1%) on the interface properties of the Al 2 O 3 / In 0.53 Ga 0.47 As/InP system for n -type and p -type In 0.53 Ga 0.47 As epitaxial layers
O'Connor, É. and Brennan, B. and Djara, V. and Cherkaoui, K. and Monaghan, S. and Newcomb, S.B. and Contreras, R. and Milojevic, M. and Hughes, G. and Pemble, M.E. and Wallace, R.M. and Hurley, P.K. (2011) A systematic study of (NH 4) 2 S passivation (22%, 10%, 5%, or 1%) on the interface properties of the Al 2 O 3 / In 0.53 Ga 0.47 As/InP system for n -type and p -type In 0.53 Ga 0.47 As epitaxial layers. : .
2011Journal of Vacuum Science & Technology BElectrical analysis of three-stage passivated In(0.53)Ga(0.47)As capacitors with varying HfO(2) thicknesses and incorporating an Al(2)O(3) interface control layer
Monaghan, S. and O'Mahony, A. and Cherkaoui, K. and O'Connor, E. and Povey, I. M. and Nolan, M. G. and O'Connell, D. and Pemble, M. E. and Hurley, P. K. and Provenzano, G. and Crupi, F. and Newcomb, S. B. (2011) Electrical analysis of three-stage passivated In(0.53)Ga(0.47)As capacitors with varying HfO(2) thicknesses and incorporating an Al(2)O(3) interface control layer. : .
2011Applied Physics LettersOn the calculation of effective electric field in In0.53Ga0.47As surface channel metal-oxide-semiconductor field-effect-transistors
Sonnet, AM,Galatage, RV,Hurley, PK,Pelucchi, E,Thomas, KK,Gocalinska, A,Huang, J,Goel, N,Bersuker, G,Kirk, WP,Hinkle, CL,Wallace, RM,Vogel, EM (2011) On the calculation of effective electric field in In0.53Ga0.47As surface channel metal-oxide-semiconductor field-effect-transistors. : . [Details]
2011Journal of Applied PhysicsA systematic study of (NH4) 2S passivation (22%, 10%, 5%, or 1%) on the interface properties of the Al2O3/In0. 53Ga0. 47As/InP system for n-type and p-type In0. 53Ga0. 47As epitaxial layers
O’Connor, 'E and Brennan, B and Djara, V and Cherkaoui, K and Monaghan, S and Newcomb, SB and Contreras, R and Milojevic, M and Hughes, G and Pemble, ME and others (2011) A systematic study of (NH4) 2S passivation (22%, 10%, 5%, or 1%) on the interface properties of the Al2O3/In0. 53Ga0. 47As/InP system for n-type and p-type In0. 53Ga0. 47As epitaxial layers. : .
2011Journal of Vacuum Science & Technology BElectrical analysis of three-stage passivated In0.53Ga0.47As capacitors with varying HfO2 thicknesses and incorporating an Al2O3 interface control layer
S. Monaghan, A. O'Mahony, K. Cherkaoui, É. O'Connor, I. M. Povey, M. G. Nolan, D. O'Connell, M. E. Pemble, P. K. Hurley, G. Provenzano, F. Crupi, S. B. Newcomb; (2011) Electrical analysis of three-stage passivated In0.53Ga0.47As capacitors with varying HfO2 thicknesses and incorporating an Al2O3 interface control layer. : .
2010Journal of Crystal GrowthLow-angle misorientation dependence of the optical properties of InGaAs/InAlAs quantum wells
Young, RJ,Mereni, LO,Petkov, N,Knight, GR,Dimastrodonato, V,Hurley, PK,Hughes, G,Pelucchi, E; (2010) Low-angle misorientation dependence of the optical properties of InGaAs/InAlAs quantum wells. : . [Details]
2010Applied Physics LettersModeling the capacitance-voltage response of In0.53Ga0.47As metal-oxide-semiconductor structures: Charge quantization and nonparabolic corrections
O'Regan, TP,Hurley, PK,Soree, B,Fischetti, MV; (2010) Modeling the capacitance-voltage response of In0.53Ga0.47As metal-oxide-semiconductor structures: Charge quantization and nonparabolic corrections. : . [Details]
2010Applied Physics LettersOrigin and passivation of fixed charge in atomic layer deposited aluminum oxide gate insulators on chemically treated InGaAs substrates
Shin, B,Weber, JR,Long, RD,Hurley, PK,Van de Walle, CG,McIntyre, PC; (2010) Origin and passivation of fixed charge in atomic layer deposited aluminum oxide gate insulators on chemically treated InGaAs substrates. : . [Details]
2010Applied Physics LettersElectron energy band alignment at the (100)Si/MgO interface
Afanas'ev, VV,Stesmans, A,Cherkaoui, K,Hurley, PK; (2010) Electron energy band alignment at the (100)Si/MgO interface. : . [Details]
2010Journal of Applied PhysicsA systematic study of NH42S passivation '22%, 10%, 5%, or 1%'
É. O'Connor; B. Brennan; V. Djara; K. Cherkaoui; S. Monaghan; S. B. Newcomb; R. Contreras; M. Milojevic; G. Hughes; M. E. Pemble; R. M. Wallace; P. K. Hurley; (2010) A systematic study of NH42S passivation '22%, 10%, 5%, or 1%'. : .
2010Applied Physics LettersElectron band alignment between (100)InP and atomic-layer deposited Al2O3
Chou, HY,Afanas'ev, VV,Stesmans, A,Lin, HC,Hurley, PK,Newcomb, SB; (2010) Electron band alignment between (100)InP and atomic-layer deposited Al2O3. : . [Details]
2010Applied Physics LettersStructural and electrical analysis of the atomic layer deposition of HfO2/n-In0.53Ga0.47As capacitors with and without an Al2O3 interface control layer
O'Mahony, A,Monaghan, S,Provenzano, G,Povey, IM,Nolan, MG,O'Connor, E,Cherkaoui, K,Newcomb, SB,Crupi, F,Hurley, PK,Pemble, ME; (2010) Structural and electrical analysis of the atomic layer deposition of HfO2/n-In0.53Ga0.47As capacitors with and without an Al2O3 interface control layer. : . [Details]
2010Electrochemical Society TransactionsElectrical properties of LaLuO 3/Si(100) structures prepared by molecular beam deposition
Gomeniuk, Y.Y., Gomeniuk, Y.V., Nazarov, A.N., Hurley, P.K., Cherkaoui, K., Monaghan, S., Gottlob, H.D.B., Schmidt, M., Schubert, J., Lopes, J.M.J., Engström, O. (2010) Electrical properties of LaLuO 3/Si(100) structures prepared by molecular beam deposition. : .
2010Applied Physics LettersStructural and electrical analysis of the atomic layer deposition of HfO2/n-In0.53Ga0.47As capacitors with and without an Al2O3 interface control layer
O'Mahony, A., Monaghan, S., Provenzano, G., Povey, I. M., Nolan, M. G., O'Connor, E., Cherkaoui, K., Newcomb, S. B., Crupi, F., Hurley, P. K., Pemble, M. E (2010) Structural and electrical analysis of the atomic layer deposition of HfO2/n-In0.53Ga0.47As capacitors with and without an Al2O3 interface control layer. : . [Details]
2009Microelectronic EngineeringBand offsets at interfaces of (100) In< i> x Ga< sub> 1-< i> x As (0¿< i> x¿ 0.53) with Al< sub> 2 O< sub> 3 and HfO< sub> 2
Afanas’ev, VV and Stesmans, Andre and Brammertz, G and Delabie, Annelies and Sionke, S and O’Mahony, A and Povey, IM and Pemble, ME and O’Connor, E and Hurley, PK and others (2009) Band offsets at interfaces of (100) In< i> x Ga< sub> 1-< i> x As (0¿< i> x¿ 0.53) with Al< sub> 2 O< sub> 3 and HfO< sub> 2. : .
2009Microelectronic EngineeringDegradation Dynamics and Breakdown of MgO Gate Oxides
Miranda, E, O'Connor, E, Hughes, G, Casey, P, Cherkaoui, K, Monaghan, S, Long, R, O'Connell, D, Hurley, PK; (2009) Degradation Dynamics and Breakdown of MgO Gate Oxides. : . [Details]
2009Applied Physics LettersElectrical Characterization of The Soft Breakdown Failure Mode In Mgo Layers
Miranda, E, O'Connor, E, Cherkaoui, K, Monaghan, S, Long, R, O'Connell, D, Hurley, PK, Hughes, G, Casey, P; (2009) Electrical Characterization of The Soft Breakdown Failure Mode In Mgo Layers. : . [Details]
2009Microelectronic EngineeringBand Offsets At Interfaces of (100)Inxga1-Xas (0 ≪= X ≪= 0.53) With Al2o3 and Hfo2
Afanas'ev, VV, Stesmans, A, Brammertz, G, Delabie, A, Sionke, S, O'Mahony, A, Povey, IM, Pemble, ME, O'Connor, E, Hurley, PK, Newcomb, SB; (2009) Band Offsets At Interfaces of (100)Inxga1-Xas (0 ≪= X ≪= 0.53) With Al2o3 and Hfo2. : . [Details]
2009Electrochemical and Solid State LettersUnpinned Interface Between Al2o3 Gate Dielectric Layer Grown By Atomic Layer Deposition and Chemically Treated N-In0.53ga0.47as(001)
Shin, B, Cagnon, J, Long, RD, Hurley, PK, Stemmer, S, McIntyre, PC; (2009) Unpinned Interface Between Al2o3 Gate Dielectric Layer Grown By Atomic Layer Deposition and Chemically Treated N-In0.53ga0.47as(001). : . [Details]
2009Applied Physics LettersEnergy Barriers At Interfaces Between (100) Inxga1-Xas (0 ≪= X ≪= 0.53) and Atomic-Layer Deposited Al2o3 and Hfo2
Afanas'ev, VV, Stesmans, A, Brammertz, G, Delabie, A, Sionke, S, O'Mahony, A, Povey, IM, Pemble, ME, O'Connor, E, Hurley, PK, Newcomb, SB; (2009) Energy Barriers At Interfaces Between (100) Inxga1-Xas (0 ≪= X ≪= 0.53) and Atomic-Layer Deposited Al2o3 and Hfo2. : . [Details]
2009Journal of Vacuum Science & Technology BLeakage Current Effects On C-V Plots of High-K Metal-Oxide-Semiconductor Capacitors
Lu, Y, Hall, S, Tan, LZ, Mitrovic, IZ, Davey, WM, Raeissi, B, Engstrom, O, Cherkaoui, K, Monaghan, S, Hurley, PK, Gottlob, HDB, Lemme, MC; (2009) Leakage Current Effects On C-V Plots of High-K Metal-Oxide-Semiconductor Capacitors. : . [Details]
2009Electrochemical and Solid State LettersHalf-Cycle Atomic Layer Deposition Reaction Study Using O-3 and H2o Oxidation of Al2o3 On In0.53ga0.47as
Brennan, B, Milojevic, M, Kim, HC, Hurley, PK, Kim, J, Hughes, G, Wallace, RM; (2009) Half-Cycle Atomic Layer Deposition Reaction Study Using O-3 and H2o Oxidation of Al2o3 On In0.53ga0.47as. : . [Details]
2009Applied Physics LettersTemperature and Frequency Dependent Electrical Characterization of Hfo2/Inxga1-Xas Interfaces Using Capacitance-Voltage and Conductance Methods
O'Connor, E, Monaghan, S, Long, RD, O'Mahony, A, Povey, IM, Cherkaoui, K, Pemble, ME, Brammertz, G, Heyns, M, Newcomb, SB, Afanas'ev, VV, Hurley, PK; (2009) Temperature and Frequency Dependent Electrical Characterization of Hfo2/Inxga1-Xas Interfaces Using Capacitance-Voltage and Conductance Methods. : . [Details]
2009IEEE Electron Device LettersTiN/ZrO2/Ti/Al Metal-Insulator-Metal Capacitors with Subnanometer CET using ALD-Deposited ZrO2 for DRAM Applications
Monaghan, S, Cherkaoui, K, O'Connor, E, Djara, V, Hurley, PK, Oberbeck, L, Tois, E, Wilde, L, Teichert, S; (2009) TiN/ZrO2/Ti/Al Metal-Insulator-Metal Capacitors with Subnanometer CET using ALD-Deposited ZrO2 for DRAM Applications. : . [Details]
2009Journal of Applied PhysicsAnalysis of Electron Mobility In Hfo2/Tin Gate Metal-Oxide-Semiconductor Field Effect Transistors: The Influence of Hfo2 Thickness, Temperature, and Oxide Charge
Negara, MA, Cherkaoui, K, Hurley, PK, Young, CD, Majhi, P, Tsai, W, Bauza, D, Ghibaudo, G; (2009) Analysis of Electron Mobility In Hfo2/Tin Gate Metal-Oxide-Semiconductor Field Effect Transistors: The Influence of Hfo2 Thickness, Temperature, and Oxide Charge. : . [Details]
2009Solid-State ElectronicsDetermination of electron effective mass and electron affinity in HfO2 using MOS and MOSFET structures
Monaghan, S, Hurley, PK, Cherkaoui, K, Negara, MA, Schenk, A; (2009) Determination of electron effective mass and electron affinity in HfO2 using MOS and MOSFET structures. : . [Details]
2009Journal of Applied PhysicsStructural analysis, elemental profiling, and electrical characterization of HfO2 thin films deposited on In0.53Ga0.47As surfaces by atomic layer deposition
Long, RD, O'Connor, E, Newcomb, SB, Monaghan, S, Cherkaoui, K, Casey, P, Hughes, G, Thomas, KK, Chalvet, F, Povey, IM, Pemble, ME, Hurley, PK (2009) Structural analysis, elemental profiling, and electrical characterization of HfO2 thin films deposited on In0.53Ga0.47As surfaces by atomic layer deposition. : . [Details]
2009Electrochemical and Solid State LettersHalf-Cycle Atomic Layer Deposition Reaction Study Using O-3 and H2O Oxidation of Al2O3 on In0.53Ga0.47As
Brennan, B,Milojevic, M,Kim, HC,Hurley, PK,Kim, J,Hughes, G,Wallace, RM; (2009) Half-Cycle Atomic Layer Deposition Reaction Study Using O-3 and H2O Oxidation of Al2O3 on In0.53Ga0.47As. : . [Details]
2009Applied Physics LettersTemperature and frequency dependent electrical characterization of HfO2/InxGa1-xAs interfaces using capacitance-voltage and conductance methods
O'Connor, E,Monaghan, S,Long, RD,O'Mahony, A,Povey, IM,Cherkaoui, K,Pemble, ME,Brammertz, G,Heyns, M,Newcomb, SB,Afanas'ev, VV,Hurley, PK; (2009) Temperature and frequency dependent electrical characterization of HfO2/InxGa1-xAs interfaces using capacitance-voltage and conductance methods. : . [Details]
2009Electrochemical and Solid State LettersUnpinned Interface Between Al2O3 Gate Dielectric Layer Grown by Atomic Layer Deposition and Chemically Treated n-In0.53Ga0.47As(001)
Shin, B,Cagnon, J,Long, RD,Hurley, PK,Stemmer, S,McIntyre, PC; (2009) Unpinned Interface Between Al2O3 Gate Dielectric Layer Grown by Atomic Layer Deposition and Chemically Treated n-In0.53Ga0.47As(001). : . [Details]
2009Journal of Applied PhysicsAnalysis of electron mobility in HfO2/TiN gate metal-oxide-semiconductor field effect transistors: The influence of HfO2 thickness, temperature, and oxide charge
Negara, MA,Cherkaoui, K,Hurley, PK,Young, CD,Majhi, P,Tsai, W,Bauza, D,Ghibaudo, G; (2009) Analysis of electron mobility in HfO2/TiN gate metal-oxide-semiconductor field effect transistors: The influence of HfO2 thickness, temperature, and oxide charge. : . [Details]
2009Applied Physics LettersEnergy barriers at interfaces between (100) InxGa1-xAs (0 <= x <= 0.53) and atomic-layer deposited Al2O3 and HfO2
Afanas'ev, VV,Stesmans, A,Brammertz, G,Delabie, A,Sionke, S,O'Mahony, A,Povey, IM,Pemble, ME,O'Connor, E,Hurley, PK,Newcomb, SB; (2009) Energy barriers at interfaces between (100) InxGa1-xAs (0 <= x <= 0.53) and atomic-layer deposited Al2O3 and HfO2. : . [Details]
2009Applied Physics LettersElectrical characterization of the soft breakdown failure mode in MgO layers
Miranda, E, O'Connor, E, Cherkaoui, K, Monaghan, S, Long, R, O'Connell, D, Hurley, PK, Hughes, G, Casey, P (2009) Electrical characterization of the soft breakdown failure mode in MgO layers. : . [Details]
2009IEEE Electron Device LettersTiN/ZrO2/Ti/Al Metal-Insulator-Metal Capacitors With Subnanometer CET Using ALD-Deposited ZrO2 for DRAM Applications
Monaghan, S,Cherkaoui, K,O'Connor, E,Djara, V,Hurley, PK,Oberbeck, L,Tois, E,Wilde, L,Teichert, S; (2009) TiN/ZrO2/Ti/Al Metal-Insulator-Metal Capacitors With Subnanometer CET Using ALD-Deposited ZrO2 for DRAM Applications. : . [Details]
2009Microelectronics ReliabilityEffects of the electrical stress on the conduction characteristics of metal gate/MgO/InP stacks
Miranda, E, Martin-Martinez, J, O'Connor, E, Hughes, G, Casey, P, Cherkaoui, K, Monaghan, S, Long, R, O'Connell, D, Hurley, PK (2009) Effects of the electrical stress on the conduction characteristics of metal gate/MgO/InP stacks. : . [Details]
2009Electrochemical Society TransactionsEffects of the semiconductor substrate material on the post-breakdown current of MgO dielectric layers
Miranda, E., O'Connor, E., Hughes, G., Casey, P., Cherkaoui, K., Monaghan, S., Long, R.D., O'Connell, D., Hurley, P.K. (2009) Effects of the semiconductor substrate material on the post-breakdown current of MgO dielectric layers. : . [Details]
2009Microelectronic EngineeringDegradation dynamics and breakdown of MgO gate oxides
Miranda, E. and O'Connor, E. and Hughes, G. and Casey, P. and Cherkaoui, K. and Monaghan, S. and Long, R. and O'Connell, D. and Hurley, P.K. (2009) Degradation dynamics and breakdown of MgO gate oxides. : .
2009Journal of Vacuum Science and Technology B: Microelectronics and Nanometer StructuresLeakage current effects on C-V plots of high- k metal-oxide-semiconductor capacitors
Lu, Y. and Hall, S. and Tan, L.Z. and Mitrovic, I.Z. and Davey, W.M. and Raeissi, B. and Engström, O. and Cherkaoui, K. and Monaghan, S. and Hurley, P.K. and Gottlob, H.D.B. and Lemme, M.C. (2009) Leakage current effects on C-V plots of high- k metal-oxide-semiconductor capacitors. : .
2009IEEE Electron Device LettersTiN/ZrO2/Ti/Al metal-insulator-metal capacitors with subnanometer CET using ALD-deposited ZrO2 for DRAM applications
Monaghan, S. and Cherkaoui, K. and O'Connor, É. and Djara, V. and Hurley, P.K. and Oberbeck, L. and Tois, E. and Wilde, L. and Teichert, S. (2009) TiN/ZrO2/Ti/Al metal-insulator-metal capacitors with subnanometer CET using ALD-deposited ZrO2 for DRAM applications. : .
2009Microelectronic EngineeringBand offsets at interfaces of (100)InxGa1-xAs (0 <= x <= 0.53) with Al2O3 and HfO2
Afanas'ev, V. V.,Stesmans, A.,Brammertz, G.,Delabie, A.,Sionke, S.,O'Mahony, A.,Povey, I. M.,Pemble, M. E.,O'Connor, E.,Hurley, P. K.,Newcomb, S. B. (2009) Band offsets at interfaces of (100)InxGa1-xAs (0 <= x <= 0.53) with Al2O3 and HfO2. : .
2009Applied Physics LettersEnergy barriers at interfaces between (100) InxGa1-xAs (0 <= x <= 0.53) and atomic-layer deposited Al2O3 and HfO2
Afanas'ev, V. V.,Stesmans, A.,Brammertz, G.,Delabie, A.,Sionke, S.,O'Mahony, A.,Povey, I. M.,Pemble, M. E.,O'Connor, E.,Hurley, P. K.,Newcomb, S. B. (2009) Energy barriers at interfaces between (100) InxGa1-xAs (0 <= x <= 0.53) and atomic-layer deposited Al2O3 and HfO2. : .
2009Solid-State ElectronicsDetermination of electron effective mass and electron affinity in HfO2 using MOS and MOSFET structures
Monaghan, S,Hurley, PK,Cherkaoui, K,Negara, MA,Schenk, A (2009) Determination of electron effective mass and electron affinity in HfO2 using MOS and MOSFET structures. : . [Details]
2009Applied Physics LettersEnergy barriers at interfaces between (100) InxGa1- xAs (0= x= 0.53) and atomic-layer deposited Al2O3 and HfO2
Afanas’ev, VV and Stesmans, Andre and Brammertz, G and Delabie, Annelies and Sionke, S and O’Mahony, A and Povey, IM and Pemble, ME and O’Connor, E and Hurley, PK and others (2009) Energy barriers at interfaces between (100) InxGa1- xAs (0= x= 0.53) and atomic-layer deposited Al2O3 and HfO2. : .
2008ChemphyschemFacile and Controlled Synthesis of Ultra-Thin Low Dielectric Constant Meso/Microporous Silica Films
Farrell, RA, Petkov, N, Cherkaoui, K, Amenitsch, H, Holmes, JD, Hurley, PK, Morris, MA; (2008) Facile and Controlled Synthesis of Ultra-Thin Low Dielectric Constant Meso/Microporous Silica Films. : . [Details]
2008Applied Physics LettersEnergy barriers at interfaces of (100) GaAs with atomic layer deposited Al 2 O 3 and HfO 2
Afanasev, VV and Badylevich, Mikhail and Stesmans, Andre and Brammertz, Guy and Delabie, Annelies and Sionke, S and OMahony, A and Povey, IM and Pemble, ME and OConnor, E and others (2008) Energy barriers at interfaces of (100) GaAs with atomic layer deposited Al 2 O 3 and HfO 2. : .
2008Journal of Material ChemistryThin and continuous films with controlled bi- and tri-modal porosities by embedment of zeolite nanoparticles in a mesoporous matrix
Farrell RA, Petkov, N; Cherkaoui K, Hurley P, Amenitsch H, Holmes JD and Morris MA; (2008) Thin and continuous films with controlled bi- and tri-modal porosities by embedment of zeolite nanoparticles in a mesoporous matrix. : .
2008Chem. Phys. ChemFacile and controlled synthesis of ultra-thin low dielectric constant meso/microporous silica films
Farrell RA, Petkov, N; Cherkaoui K, Hurley P, Amenitsch H, Holmes JD and Morris MA; (2008) Facile and controlled synthesis of ultra-thin low dielectric constant meso/microporous silica films. : .
2008ChemphyschemFacile and controlled synthesis of ultra-thin low dielectric constant meso/microporous silica films.
Farrell RA, Petkov N, Cherkaoui K, Amenitsch H, Holmes JD, Hurley PK, Morris MA; (2008) Facile and controlled synthesis of ultra-thin low dielectric constant meso/microporous silica films.. : . [Details]
2008ChemphyschemFacile and controlled synthesis of ultra-thin low dielectric constant meso/microporous silica films
Farrell, RA,Petkov, N,Cherkaoui, K,Amenitsch, H,Holmes, JD,Hurley, PK,Morris, MA; (2008) Facile and controlled synthesis of ultra-thin low dielectric constant meso/microporous silica films. : . [Details]
2008Applied Physics LettersIn situ H(2)S passivation of In(0.53)Ga(0.47)As/InP metal-oxide-semiconductor capacitors with atomic-layer deposited HfO(2) gate dielectric
O'Connor, E.,Long, R. D.,Cherkaoui, K.,Thomas, K. K.,Chalvet, F.,Povey, I. M.,Pemble, M. E.,Hurley, P. K.,Brennan, B.,Hughes, G.,Newcomb, S. B. (2008) In situ H(2)S passivation of In(0.53)Ga(0.47)As/InP metal-oxide-semiconductor capacitors with atomic-layer deposited HfO(2) gate dielectric. : .
2008Applied Physics LettersEnergy Barriers At Interfaces of (100)Gaas With Atomic Layer Deposited Al2o3 and Hfo2
Afanas'ev, VV, Badylevich, M, Stesmans, A, Brammertz, G, Delabie, A, Sionke, S, O'Mahony, A, Povey, IM, Pemble, ME, O'Connor, E, Hurley, PK, Newcomb, SB; (2008) Energy Barriers At Interfaces of (100)Gaas With Atomic Layer Deposited Al2o3 and Hfo2. : . [Details]
2008Solid-State ElectronicsHigh-K-Oxide/Silicon Interfaces Characterized By Capacitance Frequency Spectroscopy
Raeissi, B, Piscator, J, Engstrom, O, Hall, S, Buiu, O, Lemme, MC, Gottlob, HDB, Hurley, PK, Cherkaoui, K, Osten, HJ; (2008) High-K-Oxide/Silicon Interfaces Characterized By Capacitance Frequency Spectroscopy. : . [Details]
2008Journal of Applied PhysicsElectrical, Structural, and Chemical Properties of Hfo2 Films Formed By Electron Beam Evaporation
Cherkaoui, K, Monaghan, S, Negara, MA, Modreanu, M, Hurley, PK, O'Connell, D, McDonnell, S, Hughes, G, Wright, S, Barklie, RC, Bailey, P, Noakes, TCQ; (2008) Electrical, Structural, and Chemical Properties of Hfo2 Films Formed By Electron Beam Evaporation. : . [Details]
2008Applied Physics LettersEnergy State Distributions of The P-B Centers At The (100), (110), and (111) Si/Sio2 Interfaces Investigated By Laplace Deep Level Transient Spectroscopy
Dobaczewski, L, Bernardini, S, Kruszewski, P, Hurley, PK, Markevich, VP, Hawkins, ID, Peaker, AR; (2008) Energy State Distributions of The P-B Centers At The (100), (110), and (111) Si/Sio2 Interfaces Investigated By Laplace Deep Level Transient Spectroscopy. : . [Details]
2008Applied Physics LettersIn Situ H2s Passivation of In0.53ga0.47as/Inp Metal-Oxide-Semiconductor Capacitors With Atomic-Layer Deposited Hfo2 Gate Dielectric
O'Connor, E, Long, RD, Cherkaoui, K, Thomas, KK, Chalvet, F, Povey, IM, Pemble, ME, Hurley, PK, Brennan, B, Hughes, G, Newcomb, SB; (2008) In Situ H2s Passivation of In0.53ga0.47as/Inp Metal-Oxide-Semiconductor Capacitors With Atomic-Layer Deposited Hfo2 Gate Dielectric. : . [Details]
2008Journal of the Electrochemical SocietyInterface Defects In Hfo2, Lasiox, and Gd2o3 High-K/Metal-Gate Structures On Silicon
Hurley, PK, Cherkaoui, K, O'Connor, E, Lemme, MC, Gottlob, HDB, Schmidt, M, Hall, S, Lu, Y, Buiu, O, Raeissi, B, Piscator, J, Engstrom, O, Newcomb, SB; (2008) Interface Defects In Hfo2, Lasiox, and Gd2o3 High-K/Metal-Gate Structures On Silicon. : . [Details]
2008Applied Physics LettersEnergy barriers at interfaces of (100)GaAs with atomic layer deposited Al2O3 and HfO2
Afanas'ev, VV,Badylevich, M,Stesmans, A,Brammertz, G,Delabie, A,Sionke, S,O'Mahony, A,Povey, IM,Pemble, ME,O'Connor, E,Hurley, PK,Newcomb, SB; (2008) Energy barriers at interfaces of (100)GaAs with atomic layer deposited Al2O3 and HfO2. : . [Details]
2008Journal of Applied PhysicsElectrical, structural, and chemical properties of HfO2 films formed by electron beam evaporation
Cherkaoui, K,Monaghan, S,Negara, MA,Modreanu, M,Hurley, PK,O'Connell, D,McDonnell, S,Hughes, G,Wright, S,Barklie, RC,Bailey, P,Noakes, TCQ; (2008) Electrical, structural, and chemical properties of HfO2 films formed by electron beam evaporation. : . [Details]
2008Applied Physics LettersEnergy state distributions of the P-b centers at the (100), (110), and (111) Si/SiO2 interfaces investigated by Laplace deep level transient spectroscopy
Dobaczewski, L,Bernardini, S,Kruszewski, P,Hurley, PK,Markevich, VP,Hawkins, ID,Peaker, AR; (2008) Energy state distributions of the P-b centers at the (100), (110), and (111) Si/SiO2 interfaces investigated by Laplace deep level transient spectroscopy. : . [Details]
2008Journal of the Electrochemical SocietyInterface defects in HfO2, LaSiOx, and Gd2O3 high-k/metal-gate structures on silicon
Hurley, PK,Cherkaoui, K,O'Connor, E,Lemme, MC,Gottlob, HDB,Schmidt, M,Hall, S,Lu, Y,Buiu, O,Raeissi, B,Piscator, J,Engstrom, O,Newcomb, SB; (2008) Interface defects in HfO2, LaSiOx, and Gd2O3 high-k/metal-gate structures on silicon. : . [Details]
2008Applied Physics LettersIn situ H2S passivation of In0.53Ga0.47As/InP metal-oxide-semiconductor capacitors with atomic-layer deposited HfO2 gate dielectric
O'Connor, E,Long, RD,Cherkaoui, K,Thomas, KK,Chalvet, F,Povey, IM,Pemble, ME,Hurley, PK,Brennan, B,Hughes, G,Newcomb, SB; (2008) In situ H2S passivation of In0.53Ga0.47As/InP metal-oxide-semiconductor capacitors with atomic-layer deposited HfO2 gate dielectric. : . [Details]
2008Applied Physics LettersEnergy barriers at interfaces of (100)GaAs with atomic layer deposited Al(2)O(3) and HfO(2)
Afanas'ev, V. V.,Badylevich, M.,Stesmans, A.,Brammertz, G.,Delabie, A.,Sionke, S.,O'Mahony, A.,Povey, I. M.,Pemble, M. E.,O'Connor, E.,Hurley, P. K.,Newcomb, S. B. (2008) Energy barriers at interfaces of (100)GaAs with atomic layer deposited Al(2)O(3) and HfO(2). : .
2008Journal Of Applied Physicsjournal Of Applied PhysicsElectrical, structural, and chemical properties of HfO(2) films formed by electron beam evaporation
Cherkaoui, K.,Monaghan, S.,Negara, M. A.,Modreanu, M.,Hurley, P. K.,O'Connell, D.,McDonnell, S.,Hughes, G.,Wright, S.,Barklie, R. C.,Bailey, P.,Noakes, T. C. Q. (2008) Electrical, structural, and chemical properties of HfO(2) films formed by electron beam evaporation. : .
2008Applied Physics LettersIn situ H 2 S passivation of In 0.53 Ga 0.47 As/InP metal-oxide-semiconductor capacitors with atomic-layer deposited HfO 2 gate dielectric
OConnor, E and Long, RD and Cherkaoui, K and Thomas, KK and Chalvet, F and Povey, IM and Pemble, ME and Hurley, PK and Brennan, B and Hughes, G and others (2008) In situ H 2 S passivation of In 0.53 Ga 0.47 As/InP metal-oxide-semiconductor capacitors with atomic-layer deposited HfO 2 gate dielectric. : .
2008ChemphyschemFacile and controlled synthesis of ultra-thin low dielectric constant meso/microporous silica films
Farrell, R. A.,Petkov, N.,Cherkaoui, K.,Amenitsch, H.,Holmes, J. D.,Hurley, P. K.,Morris, M. A.; (2008) Facile and controlled synthesis of ultra-thin low dielectric constant meso/microporous silica films. : .
2007Microelectronics ReliabilityPhysical and electrical properties of low dielectric constant self-assembled mesoporous silica thin films
Farrell, R. A.,Cherkaoui, K.,Petkov, N.,Amenitsch, H.,Holmes, J. D.,Hurley, P. K.,Morris, M. A.; (2007) Physical and electrical properties of low dielectric constant self-assembled mesoporous silica thin films. : .
2007Microelectronics ReliabilityCharacterisation and Passivation of Interface Defects In (100)-Si/Sio2/Hfo2/Tin Gate Stacks
Hurley, PK, Cherkaoui, K, McDonnell, S, Hughes, G, Groenland, AW; (2007) Characterisation and Passivation of Interface Defects In (100)-Si/Sio2/Hfo2/Tin Gate Stacks. : . [Details]
2005Electrochemical and Solid State LettersInterface states and Pb defects at the Si(100)/HfO2 interface
Hurley, PK,O'Sullivan, BJ,Afanas'ev, VV,Stesmans, A; (2005) Interface states and Pb defects at the Si(100)/HfO2 interface. : . [Details]
2005Microelectronics Reliabilitymicroelectronics ReliabilityPost deposition UV-induced O(2) annealing of HfO(2) thin films
Fang, Q.,Liaw, I.,Modreanu, M.,Hurley, P. K.,Boyd, I. W. (2005) Post deposition UV-induced O(2) annealing of HfO(2) thin films. : .
2005Materials Science and Engineering B-Solid State Materials For Advanced TechnologyPulsed liquid-injection MOCVD of high-K oxides for advanced semiconductor technologies
Dubourdieu, C,Roussel, H,Jimenez, C,Audier, M,Senateur, JP,Lhostis, S,Auvray, L,Ducroquet, F,O'Sullivan, BJ,Hurley, PK,Rushworth, S,Hubert-Pfalzgraf, L (2005) Pulsed liquid-injection MOCVD of high-K oxides for advanced semiconductor technologies. : . [Details]
2005Microelectronics Reliabilitymicroelectronics ReliabilityElectrical characterization of HfO2 films obtained by UV assisted injection MOCVD
Decams, J. M.,Guillon, H.,Jimenez, C.,Audier, M.,Senateur, J. P.,Dubourdieu, C.,Cadix, O.,O'Sullivan, B. J.,Modreanu, M.,Hurley, P. K.,Rusworth, S.,Leedham, T. J.,Davies, H.,Fang, Q.,Boyd, I. (2005) Electrical characterization of HfO2 films obtained by UV assisted injection MOCVD. : .
2004Journal of the Electrochemical SocietyElectrical evaluation of defects at the Si(100)/HfO2 interface
O'Sullivan, BJ,Hurley, PK,O'Connor, E,Modreanu, M,Roussel, H,Jimenez, C,Dubourdieu, C,Audier, M,Senateur, JP (2004) Electrical evaluation of defects at the Si(100)/HfO2 interface. : . [Details]
2004IEEE Transactions On Electron DevicesAvalanche photodiode-based active pixel imager
Marshall, GF,Jackson, JC,Denton, J,Hurley, PK,Braddell, O,Mathewson, A (2004) Avalanche photodiode-based active pixel imager. : . [Details]
2004Thin Solid FilmsInterface of ultrathin HfO2 films deposited by UV-photo-CVD
Fang, Q,Zhang, JY,Wang, Z,Modreanu, M,O'Sullivan, BJ,Hurley, PK,Leedham, TL,Hywel, D,Audier, MA,Jimenez, C,Senateur, JP,Boyd, IW (2004) Interface of ultrathin HfO2 films deposited by UV-photo-CVD. : . [Details]
2004Thin Solid Filmsthin Solid FilmsInterface of ultrathin HfO2 films deposited by UV-photo-CVD
Fang, Q.,Zhang, J. Y.,Wang, Z.,Modreanu, M.,O'Sullivan, B. J.,Hurley, P. K.,Leedham, T. L.,Hywel, D.,Audier, M. A.,Jimenez, C.,Senateur, J. P.,Boyd, I. W. (2004) Interface of ultrathin HfO2 films deposited by UV-photo-CVD. : .
2004Journal Of The Electrochemical Societyjournal Of The Electrochemical SocietyElectrical evaluation of defects at the Si(100)/HfO2 interface
O'Sullivan, B. J.,Hurley, P. K.,O'Connor, E.,Modreanu, M.,Roussel, H.,Jimenez, C.,Dubourdieu, C.,Audier, M.,Senateur, J. P. (2004) Electrical evaluation of defects at the Si(100)/HfO2 interface. : .
2003IEEE Transactions on Semiconductor ManufacturingImproving the Accuracy and Efficiency of Junction Capacitance Characterization: Strategies for Probing Configuration and Data Set Size
MacSweeney,D.; McCarthy,K.G.; Floyd,L.; Duane,R.; Hurley, P.; Power, J.A.; Kelly, S.C.; Mathewson, A.; (2003) Improving the Accuracy and Efficiency of Junction Capacitance Characterization: Strategies for Probing Configuration and Data Set Size. : .
2003IEEE Transactions on Semiconductor ManufacturingImproving the accuracy and efficiency of junction capacitance characterization: Strategies for probing configuration and data set size
MacSweeney, D,McCarthy, KG,Floyd, L,Duane, R,Hurley, P,Power, JA,Kelly, SC,Mathewson, A (2003) Improving the accuracy and efficiency of junction capacitance characterization: Strategies for probing configuration and data set size. : . [Details]
2003Thin Solid FilmsInterface of tantalum oxide films on silicon by UV annealing at low temperature
Fang, Q,Zhang, JY,Wang, ZM,Wu, JX,O'Sullivan, BJ,Hurley, PK,Leedham, TL,Davies, H,Audier, MA,Jimenez, C,Senateur, JP,Boyd, IW (2003) Interface of tantalum oxide films on silicon by UV annealing at low temperature. : .
2003Journal of Applied PhysicsAnalysis of P-b centers at the Si(111)/SiO2 interface following rapid thermal annealing
Hurley, PK,Stesmans, A,Afanas'ev, VV,O'Sullivan, BJ,O'Callaghan, E (2003) Analysis of P-b centers at the Si(111)/SiO2 interface following rapid thermal annealing. : . [Details]
2003Physica E-Low-Dimensional Systems & Nanostructuresphysica E-Low-Dimensional Systems & NanostructuresInvestigation on preparation and physical properties of nanocrystalline Si/SiO2 superlattices for Si-based light-emitting devices
Modreanu, M.,Gartner, A.,Aperathitis, E.,Tomozeiu, N.,Androulidaki, M.,Cristea, D.,Hurley, P. (2003) Investigation on preparation and physical properties of nanocrystalline Si/SiO2 superlattices for Si-based light-emitting devices. : .
2003IEEE Transactions on Semiconductor ManufacturingSPECIAL SECTION ON THE INTERNATIONAL CONFERENCE ON MICROELECTRONICS TEST STRUCTURES-SPECIAL SECTION PAPERS-Improving the Accuracy and Efficiency of Junction Capacitance Characterization
MacSweeney, D and McCarthy, KG and Floyd, L and Duane, R and Hurley, P and Power, JA and Kelly, SC and Mathewson, A (2003) SPECIAL SECTION ON THE INTERNATIONAL CONFERENCE ON MICROELECTRONICS TEST STRUCTURES-SPECIAL SECTION PAPERS-Improving the Accuracy and Efficiency of Junction Capacitance Characterization. : .
2002Applied Physics LettersComparing leakage currents and dark count rates in Geiger-Mode avalanche photodiodes
J. C. Jackson, P. K. Hurley, A. P. Morrison, B. Lane, and A. Mathewson.; (2002) Comparing leakage currents and dark count rates in Geiger-Mode avalanche photodiodes. : .
2002Applied Physics LettersComparing leakage currents and dark count rates in Geiger-mode avalanche photodiodes
Jackson, JC,Hurley, PK,Lane, B,Mathewson, A,Morrison, AP; (2002) Comparing leakage currents and dark count rates in Geiger-mode avalanche photodiodes. : . [Details]
2002Journal of the Electrochemical SocietyExamination of the Si(111)-SiO2, Si(110)-SiO2, and Si(100)-SiO2 interfacial properties following rapid thermal annealing
Hurley, PK,O'Sullivan, BJ,Cubaynes, FN,Stolk, PA,Widdershoven, FP,Das, JH; (2002) Examination of the Si(111)-SiO2, Si(110)-SiO2, and Si(100)-SiO2 interfacial properties following rapid thermal annealing. : . [Details]
2001Journal of Applied PhysicsSi(100)-SiO2 interface properties following rapid thermal processing
O'Sullivan, BJ,Hurley, PK,Leveugle, C,Das, JH (2001) Si(100)-SiO2 interface properties following rapid thermal processing. : .
2001Journal De Physique IvPhoto-CVD deposited TiO(2) films studied by Raman and XPS spectroscopy
Zhang, JY,Fang, Q,Wu, JX,Xu, CY,O'Sullivan, BJ,Hurley, PK,Leedham, TL,Audier, MA,Senateur, JP,Boyd, IW (2001) Photo-CVD deposited TiO(2) films studied by Raman and XPS spectroscopy. : .
2001Journal De Physique IvEffects of active surface nitridation on the properties of high permittivity films deposited by UV-assisted CVD
O'Sullivan, BJ,O'Connor, E,Howley, R,Hurley, PK,Zhang, JY,Kaliwoh, N,Fang, Q,Boyd, IW,Dubourdieu, C,Audier, MA,Senateur, JP,Davies, HO,Leedham, TJ,Jones, AC,Semmache, B (2001) Effects of active surface nitridation on the properties of high permittivity films deposited by UV-assisted CVD. : .
1999Microelectronic EngineeringCharacteristics of tantalum pentoxide dielectric films deposited on silicon by excimer-lamp assisted photo-induced CVD using an injection liquid source.
Mooney, MB,Hurley, PK,O'Sullivan, BJ,Beechinor, JT,Zhang, JY,Boyd, IW,Kelly, PV,Senateur, JP,Crean, GM,Jimenez, C,Paillous, M (1999) Characteristics of tantalum pentoxide dielectric films deposited on silicon by excimer-lamp assisted photo-induced CVD using an injection liquid source.. : .
1997Journal of the Electrochemical SocietyDopants (P, As, and B) in the polycrystalline silicon/titanium silicide system: Redistribution and activation
Kalnitsky, A,Hurley, PK,Lepert, A; (1997) Dopants (P, As, and B) in the polycrystalline silicon/titanium silicide system: Redistribution and activation. : .
1996Microelectronics and ReliabilityImpact of Oxide Degradation on the Low Frequency (1/f) Noise Behaviour of p Channel MO'SFETs [B2671]
Hurley, P. K.; Sheehan, E.; Moran, S.; Mathewson, A.; (1996) Impact of Oxide Degradation on the Low Frequency (1/f) Noise Behaviour of p Channel MO'SFETs [B2671]. : .
1996IEEE Electron Device LettersEffects of Fowler-Nordheim stress on interface trap density and emission cross sections in n-MOSFET's studied by three-level charge pumping
Yuan, XJ,Kivi, M,Taylor, S,Hurley, P; (1996) Effects of Fowler-Nordheim stress on interface trap density and emission cross sections in n-MOSFET's studied by three-level charge pumping. : .
1995Quality and Reliability Engineering InternationalHOT-CARRIER RELIABILITY LIFETIMES AS PREDICTED BY BERKELEYS MODEL
MEEHAN, A,OSULLIVAN, P,HURLEY, P,MATHEWSON, A (1995) HOT-CARRIER RELIABILITY LIFETIMES AS PREDICTED BY BERKELEYS MODEL. : .
1995Semiconductor Science and TechnologyCapacitance-Voltage Characteristics of Heavily Doped Silicon-Insulator-Silicon Capacitors [B2669]
Hurley, P. K.; Wall, L.; Moran, S.; Mathewson, A.; (1995) Capacitance-Voltage Characteristics of Heavily Doped Silicon-Insulator-Silicon Capacitors [B2669]. : .
1994Microelectronics JournalEVALUATION OF HOT-CARRIER DEGRADATION OF N-CHANNEL MOSFETS AT LOW GATE BIAS
MEEHAN, A,OSULLIVAN, P,HURLEY, P,MATHEWSON, A; (1994) EVALUATION OF HOT-CARRIER DEGRADATION OF N-CHANNEL MOSFETS AT LOW GATE BIAS. : .

Other Journals

YearJournalPublication
2007Solid-State ElectronicsNavigation aids in the search for future high-< i> k dielectrics: Physical and electrical trends
Engstr"om, Olof and Raeissi, Bahman and Hall, Steve and Buiu, Octavian and Lemme, Max C and Gottlob, HDB and Hurley, PK and Cherkaoui, Karim (2007) Navigation aids in the search for future high-< i> k dielectrics: Physical and electrical trends. : .
2005Microelectronics ReliabilityElectrical characterization of HfO2 films obtained by UV assisted injection MOCVD
Decams, J.M. and Guillon, H. and Jiménez, C. and Audier, M. and Sénateur, J.P. and Dubourdieu, C. and Cadix, O. and O'Sullivan, B.J. and Modreanu, M. and Hurley, P.K. and Rusworth, S. and Leedham, T.J. and Davies, H. and Fang, Q. and Boyd, I. (2005) Electrical characterization of HfO2 films obtained by UV assisted injection MOCVD. : .
2005Microelectronics ReliabilityPost deposition UV-induced O2 annealing of HfO2 thin films
Fang, Q. and Liaw, I. and Modreanu, M. and Hurley, P.K. and Boyd, I.W. (2005) Post deposition UV-induced O2 annealing of HfO2 thin films. : .
2005Materials Science and Engineering: BPulsed liquid-injection MOCVD of high-K oxides for advanced semiconductor technologies
Dubourdieu, C and Roussel, H and Jimenez, C and Audier, M and S'enateur, JP and Lhostis, S and Auvray, L and Ducroquet, F and O'sullivan, BJ and Hurley, PK and others (2005) Pulsed liquid-injection MOCVD of high-K oxides for advanced semiconductor technologies. : .
2004Thin Solid FilmsInterface of ultrathin HfO< sub> 2 films deposited by UV-photo-CVD
Fang, Q and Zhang, J-Y and Wang, Z and Modreanu, M and O'Sullivan, BJ and Hurley, PK and Leedham, TL and Hywel, D and Audier, MA and Jimenez, C and others (2004) Interface of ultrathin HfO< sub> 2 films deposited by UV-photo-CVD. : .
2004Electron Devices, IEEE Transactions onAvalanche photodiode-based active pixel imager
Marshall, GF and Jackson, JC and Denton, J and Hurley, PK and Braddell, O and Mathewson, A (2004) Avalanche photodiode-based active pixel imager. : .
2004Thin Solid FilmsInterface of ultrathin HfO2 films deposited by UV-photo-CVD
Fang, Q. and Zhang, J.-Y. and Wang, Z. and Modreanu, M. and O'Sullivan, B.J. and Hurley, P.K. and Leedham, T.L. and Hywel, D. and Audier, M.A. and Jimenez, C. and Senateur, J.-P. and Boyd, I.W. (2004) Interface of ultrathin HfO2 films deposited by UV-photo-CVD. : .
2003Physica E: Low-Dimensional Systems and NanostructuresInvestigation on preparation and physical properties of nanocrystalline Si/SiO2 superlattices for Si-based light-emitting devices
Modreanu, M. and Gartner, M. and Aperathitis, E. and Tomozeiu, N. and Androulidaki, M. and Cristea, D. and Hurley, P. (2003) Investigation on preparation and physical properties of nanocrystalline Si/SiO2 superlattices for Si-based light-emitting devices. : .
2003Thin Solid FilmsInvestigation of TiO< sub> 2-doped HfO< sub> 2 thin films deposited by photo-CVD
Fang, Q and Zhang, J-Y and Wang, ZM and Wu, JX and O'Sullivan, BJ and Hurley, PK and Leedham, TL and Davies, H and Audier, MA and Jimenez, C and others (2003) Investigation of TiO< sub> 2-doped HfO< sub> 2 thin films deposited by photo-CVD. : .
2003Thin Solid FilmsCharacterisation of HfO< sub> 2 deposited by photo-induced chemical vapour deposition
Fang, Q and Zhang, J-Y and Wang, ZM and Wu, JX and O'Sullivan, BJ and Hurley, PK and Leedham, TL and Davies, H and Audier, MA and Jimenez, C and others (2003) Characterisation of HfO< sub> 2 deposited by photo-induced chemical vapour deposition. : .
2003Physica E: Low-dimensional Systems and NanostructuresInvestigation on preparation and physical properties of nanocrystalline Si/SiO< sub> 2 superlattices for Si-based light-emitting devices
Modreanu, M and Gartner, M and Aperathitis, E and Tomozeiu, N and Androulidaki, M and Cristea, D and Hurley, Paul (2003) Investigation on preparation and physical properties of nanocrystalline Si/SiO< sub> 2 superlattices for Si-based light-emitting devices. : .
2002Journal of non-crystalline solidsNanocrystalline TiO< sub> 2 films studied by optical, XRD and FTIR spectroscopy
Zhang, Jun-Ying and Boyd, Ian W and O'Sullivan, BJ and Hurley, PK and Kelly, PV and Senateur, J-P (2002) Nanocrystalline TiO< sub> 2 films studied by optical, XRD and FTIR spectroscopy. : .
2002Applied physics lettersComparing leakage currents and dark count rates in Geiger-mode avalanche photodiodes
Jackson, JC and Hurley, PK and Lane, B and Mathewson, A and Morrison, AP (2002) Comparing leakage currents and dark count rates in Geiger-mode avalanche photodiodes. : .
2001Journal of Applied PhysicsSi (100)--SiO 2 interface properties following rapid thermal processing
OSullivan, BJ and Hurley, PK and Leveugle, C and Das, JH (2001) Si (100)--SiO 2 interface properties following rapid thermal processing. : .
2000Microelectronics ReliabilityInterface properties of the Si (100)--SiO< sub> 2 system formed by rapid thermal oxidation
O’Sullivan, BJ and Hurley, PK and Mathewson, A and Das, JH and Daniel, AD (2000) Interface properties of the Si (100)--SiO< sub> 2 system formed by rapid thermal oxidation. : .
1998Microelectronics ReliabilityObservation of high interface state densities at the silicon/oxide interface for low doped polysilicon/oxide/silicon capacitor structures
Leveugle, C and Hurley, PK and Mathewson, A and Moran, S and Sheehan, E and Kalnitsky, A (1998) Observation of high interface state densities at the silicon/oxide interface for low doped polysilicon/oxide/silicon capacitor structures. : .
1998Microelectronics ReliabilityHot carrier degradation mechanisms in sub-micron< i> p channel MOSFETs: Impact on low frequency (1/f) noise behaviour
Sheehan, E and Hurley, PK and Mathewson, A (1998) Hot carrier degradation mechanisms in sub-micron< i> p channel MOSFETs: Impact on low frequency (1/f) noise behaviour. : .
1998MRS ProceedingsThe Impact of Rapid Thermal Annealing on the Properties of the Si (100)-SiO2 Interface
Hurley, PK and Leveugle, C and Mathewson, A and Doyle, D and Whiston, S and Prendergast, J and Lundgren, P (1998) The Impact of Rapid Thermal Annealing on the Properties of the Si (100)-SiO2 Interface. : .
1997Microelectronic engineeringImpact of the polysilicon doping level on the properties of the< i> silicon/oxide interface in polysilicon/oxide/silicon capacitor structures
Leveugle, C and Hurley, PK and Mathewson, A and Moran, S and Sheehan, E and Kalnitsky, A and Lepert, A and Beinglass, I and Venkatesan, M (1997) Impact of the polysilicon doping level on the properties of the< i> silicon/oxide interface in polysilicon/oxide/silicon capacitor structures. : .
1996Microelectronics ReliabilityInvestigation of trapped charge in oxides under Fowler-Nordheim stress using low bias conditions
Duane, R and Martin, A and O'Donovan, P and Hurley, P and O'Sullivan, P and Mathewson, A (1996) Investigation of trapped charge in oxides under Fowler-Nordheim stress using low bias conditions. : .

Conference Publications

YearPublication
2013Device Research Conference (DRC), 2013 71st Annual
Djara, V and Cherkaoui, K and Lopez, T and O'Connor, E and Povey, IM and Thomas, KK and Hurley, PK (2013) Device Research Conference (DRC), 2013 71st Annual. : .
2013Technical Proceedings of the 2013 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2013
Cabrera, W., Dong, H., Brennan, B., O'Connor, E., Carolan, P., Galatage, R., Monaghan, S., Povey, I., Hurley, P.K., Hinkle, C.L., Chabal, Y., Wallace, R.M. (2013) Technical Proceedings of the 2013 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2013. : . [Details]
201228th International Conference on Microelectronics - Proceedings (MIEL) 2012, art. no. 6222790
Miranda, E. , Jiménez, D. , Suñé, J. , O'Connor, E. , Monaghan, S. , Cherkaoui, K. , Hurley, P.K. (2012) 28th International Conference on Microelectronics - Proceedings (MIEL) 2012, art. no. 6222790. : . [Details]
2012Ultimate Integration on Silicon (ULIS), 2012 13th International Conference on
Djara, V and Cherkaoui, K and Schmidt, M and Gomeniuk, YY and O'Connor, E and Povey, IM and O'Connell, D and Monaghan, S and Pemble, ME and Hurley, PK (2012) Ultimate Integration on Silicon (ULIS), 2012 13th International Conference on. : .
20125th International Symposium on Dielectrics for Nanosystems: Materials Science, Processing, Reliability and Manufacturing - 221st ECS Meeting; Code93682
Cherkaoui, K., Djara, V., O'Connor, É., Lin, J., Negara, M.A., Povey, I.M., Monaghan, S., Hurley, P.K. (2012) 5th International Symposium on Dielectrics for Nanosystems: Materials Science, Processing, Reliability and Manufacturing - 221st ECS Meeting; Code93682. : . [Details]
201213th International Conference on Ultimate Integration on Silicon (ULIS) 2012, art. no. 6193349
Djara, V. , Cherkaoui, K. , Schmidt, M. , Gomeniuk, Y.Y. , O'Connor, É. , Povey, I.M. , O'Connell, D. , Monaghan, S. , Pemble, M.E. , Hurley, P.K. (2012) 13th International Conference on Ultimate Integration on Silicon (ULIS) 2012, art. no. 6193349. : . [Details]
2009Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) 2009, art. no. 5232695
Miranda, E. , O'connor, E. , Hughes, G. , Casey, P. , Cherkaoui, K. , Monaghan, S. , Long, R. , O'Connell, D. , Hurley, P.K. (2009) Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) 2009, art. no. 5232695. : . [Details]
2009IEEE International Reliability Physics Symposium Proceedings 2009, art. no. 5173330
Miranda, E. , O'Connor, E. , Hughes, G. , Casey, P. , Cherkaoui, K. , Monaghan, S. , Long, R. , O'Connell, D. , Hurley, P.K. (2009) IEEE International Reliability Physics Symposium Proceedings 2009, art. no. 5173330. : . [Details]
20089th International Conference on ULtimate Integration of Silicon (ULIS) 2008, art. no. 4527151
Monaghan, S. , Hurley, P.K. , Cherkaoui, K. , Negara, M.A. , Schenk, A. (2008) 9th International Conference on ULtimate Integration of Silicon (ULIS) 2008, art. no. 4527151. : . [Details]
200625th International Conference on Microelectronics
Cherkaoui, K.,Negara, A.,McDonnell, S.,Hughes, G.,Modreanu, M.,Hurley, P. K.,Ieee, (2006) 25th International Conference on Microelectronics. : .
2003International Reliability Physics Symposium (IRPS03)
J. C. Jackson, G. Healy, A-M. Kelleher, J. Alderman, J. Donnelly, P. K. Hurley, A. P. Morrison, and A. Mathewson.; (2003) International Reliability Physics Symposium (IRPS03). : .
2003Reliability Physics Symposium Proceedings, 2003. 41st Annual. 2003 IEEE International
Jackson, JC and Healy, G and Kelleher, AM and Alderman, J and Donnelly, J and Hurley, PK and Morrison, AP and Mathewson, A (2003) Reliability Physics Symposium Proceedings, 2003. 41st Annual. 2003 IEEE International. : .
2002International Conference on Microelectronic Test Structures (ICMTS 2002)
MacSweeney,D.; McCarthy,K.G.; Floyd,L.; Mathewson,A.; Hurley,P.; Power,S.; Kelly,S.; (2002) International Conference on Microelectronic Test Structures (ICMTS 2002). : .
2002Microelectronic Test Structures, 2002. ICMTS 2002. Proceedings of the 2002 International Conference on
MacSweeney, D and McCarthy, KG and Floyd, L and Mathewson, A and Hurley, P and Power, JA and Kelly, SC (2002) Microelectronic Test Structures, 2002. ICMTS 2002. Proceedings of the 2002 International Conference on. : .
2001Microelectronic Test Structures, 2001. ICMTS 2001. Proceedings of the 2001 International Conference on
Jackson, JC and Morrison, AP and Hurley, P and Harrell, WR and Damjanovic, D and Lane, B and Mathewson, A (2001) Microelectronic Test Structures, 2001. ICMTS 2001. Proceedings of the 2001 International Conference on. : .
1999Solid-State Device Research Conference, 1999. Proceeding of the 29th European
OSullivan, BJ and Hurley, PK and Mathewson, A and Beanland, R and Rodrigues, R and Kay, P (1999) Solid-State Device Research Conference, 1999. Proceeding of the 29th European. : .
1999Plasma Process-Induced Damage, 1999 4th International Symposium on
Hurley, PK and Rodrigues, R and Kay, P and Thakur, RPS and Clarke, D and Sheehan, E and Mathewson, A (1999) Plasma Process-Induced Damage, 1999 4th International Symposium on. : .
1996Microelectronic Test Structures, 1996. ICMTS 1996. Proceedings. 1996 IEEE International Conference on
Moran, S and Hurley, PK and Mathewson, A (1996) Microelectronic Test Structures, 1996. ICMTS 1996. Proceedings. 1996 IEEE International Conference on. : .
1995Solid State Device Research Conference, 1995. ESSDERC'95. Proceedings of the 25th European
Kalnitsky, Alex and Hurley, P and Lepert, Arnaud and Mallardeau, C and Sheehan, Eoin and Mathewson, A (1995) Solid State Device Research Conference, 1995. ESSDERC'95. Proceedings of the 25th European. : .
1994Solid State Device Research Conference, 1994. ESSDERC'94. 24th European
Hurley, PK and Moran, S and Wall, L and Mathewson, A and Mason, B (1994) Solid State Device Research Conference, 1994. ESSDERC'94. 24th European. : .
1993Solid State Device Research Conference, 1993. ESSDERC'93. 23rd European
Hurley, PK and Wall, L and Mathewson, A (1993) Solid State Device Research Conference, 1993. ESSDERC'93. 23rd European. : .

Conference Contributions

YearPublication
2011AVS 58th International Symposium and Exhibition, October 30 - November 4, 2011, Nashville Convention Center, Nashville, USA.
Eric Vogel , A. M. Sonnet, R. V. Galatage, P. K. Hurley, E. Pelucchi, K. K. Thomas, A. Gocalinska, J. Huang, N. Goel, G. Bersuker, W. P. Kirk, C. L. Hinkle, R. M. Wallace (2011) AVS 58th International Symposium and Exhibition, October 30 - November 4, 2011, Nashville Convention Center, Nashville, USA.. : .
2003Proceedings of 24th European Solid State Research Conference (ESSDERC '94), Edinburgh (September)
Hurley, P. K.; Moran, S.; Wall, L.; Mathewson, A.; Mason, B.; (2003) Proceedings of 24th European Solid State Research Conference (ESSDERC '94), Edinburgh (September). : .
2003Proceedings Semiconductor Interface Specialists Conference. SISC, Charleston, SC, USA
Hurley, P. K.; Kalnitsky, A.; Lepert, A.; Moran, S.; Mathewson, A.; (2003) Proceedings Semiconductor Interface Specialists Conference. SISC, Charleston, SC, USA. : .
2003Proceeding. ESSDERC 95, The Hague
Sheehan, E.; Mathewson, A.; Kalnitsky, A.; Hurley, P. K.; Lepert, A.; Mallardeau, C.; (2003) Proceeding. ESSDERC 95, The Hague. : .
2003Proceedings of the European Solid State Device Research Conference (ESSDERC-93), Grenoble
Hurley, P. K.; Wall, L.; Mathewson, A.; (2003) Proceedings of the European Solid State Device Research Conference (ESSDERC-93), Grenoble. : .

More Publications

YearPublication
2011The structural and electrical properties of the SrTa2O6/In0.53Ga0.47As/InP system
Zhang, PF,Nagle, RE,Deepak, N,Povey, IM,Gomeniuk, YY,O'Connor, E,Petkov, N,Schmidt, M,O'Regan, TP,Cherkaoui, K,Pemble, ME,Hurley, PK,Whatmore, RW (2011) The structural and electrical properties of the SrTa2O6/In0.53Ga0.47As/InP system. : . [Details]
2011Interface state densities, low frequency noise and electron mobility in surface channel In0.53Ga0.47As n-MOSFETs with a ZrO2 gate dielectric
Negara, MA,Goel, N,Bauza, D,Ghibaudo, G,Hurley, PK (2011) Interface state densities, low frequency noise and electron mobility in surface channel In0.53Ga0.47As n-MOSFETs with a ZrO2 gate dielectric. : . [Details]
2011Application of the quadrat counts method to the analysis of the spatial breakdown spots pattern in metal gate/MgO/InP structures
Miranda, E,O'Connor, E,Hurley, PK (2011) Application of the quadrat counts method to the analysis of the spatial breakdown spots pattern in metal gate/MgO/InP structures. : . [Details]
2009Scaling Potential and Mosfet Integration of Thermally Stable Gd Silicate Dielectrics
Gottlob, HDB, Schmidt, M, Stefani, A, Lemme, MC, Kurz, H, Mitrovic, IZ, Davey, WM, Hall, S, Werner, M, Chalker, PR, Cherkaoui, K, Hurley, PK, Piscator, J, Engstrom, O, Newcomb, SB; (2009) Scaling Potential and Mosfet Integration of Thermally Stable Gd Silicate Dielectrics. : . [Details]
2009Gd Silicate: A High-K Dielectric Compatible With High Temperature Annealing
Gottlob, HDB, Stefani, A, Schmidt, M, Lemme, MC, Kurz, H, Mitrovic, IZ, Werner, M, Davey, WM, Hall, S, Chalker, PR, Cherkaoui, K, Hurley, PK, Piscator, J, Engstrom, O, Newcomb, SB; (2009) Gd Silicate: A High-K Dielectric Compatible With High Temperature Annealing. : . [Details]
2009Gd silicate: A high-k dielectric compatible with high temperature annealing
Gottlob, HDB,Stefani, A,Schmidt, M,Lemme, MC,Kurz, H,Mitrovic, IZ,Werner, M,Davey, WM,Hall, S,Chalker, PR,Cherkaoui, K,Hurley, PK,Piscator, J,Engstrom, O,Newcomb, SB (2009) Gd silicate: A high-k dielectric compatible with high temperature annealing. : . [Details]
2009Leakage current effects on C-V plots of high-k metal-oxide-semiconductor capacitors
Lu, Y,Hall, S,Tan, LZ,Mitrovic, IZ,Davey, WM,Raeissi, B,Engstrom, O,Cherkaoui, K,Monaghan, S,Hurley, PK,Gottlob, HDB,Lemme, MC (2009) Leakage current effects on C-V plots of high-k metal-oxide-semiconductor capacitors. : . [Details]
2009Scaling potential and MOSFET integration of thermally stable Gd silicate dielectrics
Gottlob, HDB,Schmidt, M,Stefani, A,Lemme, MC,Kurz, H,Mitrovic, IZ,Davey, WM,Hall, S,Werner, M,Chalker, PR,Cherkaoui, K,Hurley, PK,Piscator, J,Engstrom, O,Newcomb, SB (2009) Scaling potential and MOSFET integration of thermally stable Gd silicate dielectrics. : . [Details]
2009Growth, ambient stability and electrical characterisation of MgO thin films on silicon surfaces
Casey, P,O'Connor, E,Long, R,Brennan, B,Krasnikov, SA,O'Connell, D,Hurley, PK,Hughes, G (2009) Growth, ambient stability and electrical characterisation of MgO thin films on silicon surfaces. : . [Details]
2009Degradation dynamics and breakdown of MgO gate oxides
Miranda, E,O'Connor, E,Hughes, G,Casey, P,Cherkaoui, K,Monaghan, S,Long, R,O'Connell, D,Hurley, PK (2009) Degradation dynamics and breakdown of MgO gate oxides. : . [Details]
2009Band offsets at interfaces of (100)InxGa1-xAs (0 <= x <= 0.53) with Al2O3 and HfO2
Afanas'ev, VV,Stesmans, A,Brammertz, G,Delabie, A,Sionke, S,O'Mahony, A,Povey, IM,Pemble, ME,O'Connor, E,Hurley, PK,Newcomb, SB (2009) Band offsets at interfaces of (100)InxGa1-xAs (0 <= x <= 0.53) with Al2O3 and HfO2. : . [Details]
2009Growth, Ambient Stability and Electrical Characterisation of Mgo Thin Films On Silicon Surfaces
Casey, P, O'Connor, E, Long, R, Brennan, B, Krasnikov, SA, O'Connell, D, Hurley, PK, Hughes, G; (2009) Growth, Ambient Stability and Electrical Characterisation of Mgo Thin Films On Silicon Surfaces. : . [Details]
2008Gentle Fusi Nisi Metal Gate Process For High-K Dielectric Screening
Gottlob, HDB, Lemme, MC, Schmidt, M, Echtermeyer, TJ, Mollenhauer, T, Kurz, H, Cherkaoui, K, Hurley, PK, Newcomb, SB; (2008) Gentle Fusi Nisi Metal Gate Process For High-K Dielectric Screening. : . [Details]
2008Gentle FUSI NiSi metal gate process for high-k dielectric screening
Gottlob, HDB,Lemme, MC,Schmidt, M,Echtermeyer, TJ,Mollenhauer, T,Kurz, H,Cherkaoui, K,Hurley, PK,Newcomb, SB (2008) Gentle FUSI NiSi metal gate process for high-k dielectric screening. : . [Details]
2007Extracting The Relative Dielectric Constant For "High-K Layers" From Cv Measurements - Errors and Error Propagation
Buiu, O, Hall, S, Engstrom, O, Raeissi, B, Lemme, M, Hurley, PK, Cherkaoui, K; (2007) Extracting The Relative Dielectric Constant For "High-K Layers" From Cv Measurements - Errors and Error Propagation. : . [Details]
2007Physical and Electrical Properties of Low Dielectric Constant Self-Assembled Mesoporous Silica Thin Films
Farrell, RA, Cherkaoui, K, Petkov, N, Amenitsch, H, Holmes, JD, Hurley, PK, Morris, MA; (2007) Physical and Electrical Properties of Low Dielectric Constant Self-Assembled Mesoporous Silica Thin Films. : . [Details]
2007Extrinsic Stacking Fault Generation Related to High-K Dielectric Growth On A Si Substrate
Volkos, SN, Bernardinia, S, Rigopoulos, N, Efthymiou, ES, Hawkins, ID, Hamilton, B, Dobaczewski, L, Hall, S, Hurley, PK, Delabie, A, Peaker, AR; (2007) Extrinsic Stacking Fault Generation Related to High-K Dielectric Growth On A Si Substrate. : . [Details]
2007Navigation Aids In The Search For Future High-K Dielectrics: Physical and Electrical Trends
Engstrom, O, Raeissi, B, Hall, S, Buiu, O, Lemme, MC, Gottlob, HDB, Hurley, PK, Cherkaoui, K; (2007) Navigation Aids In The Search For Future High-K Dielectrics: Physical and Electrical Trends. : . [Details]
2007Extrinsic stacking fault generation related to high-k dielectric growth on a Si substrate
Volkos, SN,Bernardinia, S,Rigopoulos, N,Efthymiou, ES,Hawkins, ID,Hamilton, B,Dobaczewski, L,Hall, S,Hurley, PK,Delabie, A,Peaker, AR (2007) Extrinsic stacking fault generation related to high-k dielectric growth on a Si substrate. : . [Details]
2007Extracting the relative dielectric constant for "high-k layers" from CV measurements - Errors and error propagation
Buiu, O,Hall, S,Engstrom, O,Raeissi, B,Lemme, M,Hurley, PK,Cherkaoui, K (2007) Extracting the relative dielectric constant for "high-k layers" from CV measurements - Errors and error propagation. : . [Details]
2007The Influence of Hfo2 Film Thickness On The Interface State Density and Low Field Mobility of N Channel Hfo2/Tin Gate Mosfets
Negara, AA, Cherkaoui, K, Majhi, P, Young, CD, Tsai, W, Bauza, D, Ghibaudo, G, Hurley, PK; (2007) The Influence of Hfo2 Film Thickness On The Interface State Density and Low Field Mobility of N Channel Hfo2/Tin Gate Mosfets. : . [Details]
2006Special Issue - Proceedings of E-Mrs Spring Meeting Symposium L On Characterization of High-K Dielectric Materials, Nice, France, 29 May-2 June 2006 - Preface
Dabrowski, J, Hurley, PK, Murota, J, Weber, ER; (2006) Special Issue - Proceedings of E-Mrs Spring Meeting Symposium L On Characterization of High-K Dielectric Materials, Nice, France, 29 May-2 June 2006 - Preface. : . [Details]
2006Electrical Properties of Hfo2 Films Formed By Ion Assisted Deposition
Cherkaoui, K, Negara, A, McDonnell, S, Hughes, G, Modreanu, M, Hurley, PK; (2006) Electrical Properties of Hfo2 Films Formed By Ion Assisted Deposition. : .
2006Electrically Active Defects At The Interface Between (100)Si and Hafnium Dioxide Thin Films
Hurley, PK, Cherkaoui, K; (2006) Electrically Active Defects At The Interface Between (100)Si and Hafnium Dioxide Thin Films. : .
2005Impact of H-2/N-2 annealing on interface defect densities in Si(100)/SiO2/HfO2/TiN gate stacks
Schmidt, M,Lemme, MC,Kurz, H,Witters, T,Schram, T,Cherkaoui, K,Negara, A,Hurley, PK (2005) Impact of H-2/N-2 annealing on interface defect densities in Si(100)/SiO2/HfO2/TiN gate stacks. : . [Details]
2005Electrical characterization of HfO2 films obtained by UV assisted injection MOCVD
Decams, JM,Guillon, H,Jimenez, C,Audier, M,Senateur, JP,Dubourdieu, C,Cadix, O,O'Sullivan, BJ,Modreanu, M,Hurley, PK,Rusworth, S,Leedham, TJ,Davies, H,Fang, Q,Boyd, I (2005) Electrical characterization of HfO2 films obtained by UV assisted injection MOCVD. : . [Details]
2005Post deposition UV-induced O-2 annealing of HfO2 thin films
Fang, Q,Liaw, I,Modreanu, M,Hurley, PK,Boyd, IW (2005) Post deposition UV-induced O-2 annealing of HfO2 thin films. : . [Details]
2005Optical and electrical characterization of hafnium oxide deposited by MOCVD
Lu, Y,Buiu, O,Hall, S,Hurley, PK (2005) Optical and electrical characterization of hafnium oxide deposited by MOCVD. : . [Details]
2003Investigation of TiO2-doped HfO2 thin films deposited by photo-CVD
Fang, Q,Zhang, JY,Wang, ZM,Wu, JX,O'Sullivan, BJ,Hurley, PK,Leedham, TL,Davies, H,Audier, MA,Jimenez, C,Senateur, JP,Boyd, IW (2003) Investigation of TiO2-doped HfO2 thin films deposited by photo-CVD. : . [Details]
2002Nanocrystalline TiO2 films studied by optical, XRD and FTIR spectroscopy
Zhang, JY,Boyd, IW,O'Sullivan, BJ,Hurley, PK,Kelly, PV,Senateur, JP (2002) Nanocrystalline TiO2 films studied by optical, XRD and FTIR spectroscopy. : . [Details]
1998Observation of high interface state densities at the silicon/oxide interface for low doped polysilicon/oxide/silicon capacitor structures
Leveugle, C,Hurley, PK,Mathewson, A,Moran, S,Sheehan, E,Kalnitsky, A (1998) Observation of high interface state densities at the silicon/oxide interface for low doped polysilicon/oxide/silicon capacitor structures. : .
1998Strategies for MilliRad sensitivity in PMOS dosimeters
Conneely, C,O'Connell, B,Hurley, P,Lane, W,Adams, L (1998) Strategies for MilliRad sensitivity in PMOS dosimeters. : .
1996The impact of oxide degradation on the low frequency (1/F) noise behaviour of P channel MOSFETs
Hurley, PK,Sheehan, E,Moran, S,Mathewson, A (1996) The impact of oxide degradation on the low frequency (1/F) noise behaviour of P channel MOSFETs. : .

Honours and Awards

  • [2012] - Intel Outstanding Researcher Award
  • [2009] - Best Presentation Award 216th ECS Meeting
  • [1985] - IEE Departmental Prize (1985).
  • [1985] - William Henry McMenemey Engineering Faculty Prize (1985).
  • [2014] - Cork Conference Ambassador Award

Professional Associations

  • [2013] Member

Patents

  • [2014] P10945EP - Junctionless Transistors for 3D Monolithic Integration of CMOS Inverters

Committees

  • [2004] Insulating Films on Semiconductors (INFOS), Scientific Committee
  • [2002] Workshop on Dielectrics in Microelectronics (WODIM), General Chair in 2014 and 2004 Scientific Committee: 2003 to 2014
  • [2013] IEEE International Integrated Reliability Workshop (IIRW) , Scientific Committee
  • [2014] European Mamterials Research Society, Scientific Committee

Outreach Activities

  • Hosting Transition Year students at Tyndall

    Discovery Science Exhibition Cork


Employment

  • [1989] Liverpool University - Research Associate
  • [1992] University College Cork - Research Scientist
  • [1994] University College Cork - Senior Research Scientist
  • [2012] University College Cork - Senior Research Scientist and Head of Group

Education

  • [1985] Unversity of Liverpool - B.Eng.
  • [1990] University of Liverpool - PhD

Journal Activities

  • J Appl Phys - Referee
  • Applied Physics Letters - Referee
  • Microelectronics Reliability - Guest Editor
  • IEEE Electron Device Letters - Referee
  • IEEE Transactions on Electron Devices - Referee
  • J. Electrochem. Soc. - Referee
  • Semiconductor Science and Technology - Referee
  • J Vac Sci Technol - Referee
  • Microelectronic Engineering - Referee

Other Professional Activities

I am a member of the technical committee of the international conference “Insulating Films on Semiconductors (INFOS)” and the International “Workshop on Dielectrics in Microelectronics (WoDiM). INFOS and WoDiM are the two main oxide conferences in Europe. Acted as Chair of the 2004 and 2014 WoDiM events in Kinsale, Co. Cork and Co-Chair of the “Characterization of High-k Materials” Symposium L at the 2006 EMRS. I have acted as the external examiner for PhD students from, Dublin City University, Trinity College Dublin, Liverpool University (x4), Manchester University (x2), University Autonoma de Barcelona and the Catholic University of Leuven. I have also acted as the internal examiner for a number of UCC PhD and MSc students Reviewer of National and EU proposals

Teaching Interests

Semiconductor materials and devices for information and communication technologies

Specialist guest lectures covering recent technology challenges and developments for state of the art transistors

Recent Postgraduates

Student Degree Graduation Year Institution Thesis
Adi Negara PHD UCC A STUDY OF ELECTRON MOBILITY IN HFO2/TIN GATE MOSFETS
Rathnait Long PHD UCC A Study of the Electronic and Structural Properties of the High-κ/In0.53Ga0.47As System
Vladimir Djara PHD UCC Development of Inversion-Mode and Junctiolness InGaAs MOSFETs
Eamon O'Connor PHD UCC Investigation of electrically active defects at the interface of high-k dielectrics and compound semiconductors
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struct
biography <p>Professor&nbsp;Hurley received his Ph.D. (1990) and B.Eng. (1985, 1st class honors) in Electronic Engineering at the University of Liverpool. Paul is the Head of the Nanoelectronic Materials and Devices Group at the Tyndall National Institute and a Research Professor in Depertment of Chemistry&nbsp;at University College Cork. &nbsp;</p><p> </p><p><span>Paul’s &nbsp;research group are exploring alternative semiconductor materials and device structures aimed at improving energy efficiency in the next generation of logic switches which will be used in applications, covering: </span>nanoelectronics, flexible electronics, mobile communications and low power sensor technologies. Paul leads a research team of around ten PhD students, post-doctoral researchers, visiting students and Tyndall Research staff who perform research into alternative semiconductor materials and device structures aimed at improving the energy efficiency in the next generation of logic devices. In particular the group are working on <span>III-V and 2D (e.g., MoS2, WSe2) semiconductors and their interfaces with metals and oxides which will form the heart of logic devices incorporating these materials. &nbsp;The group are also exploring the use of metal-oxide-semiconductor (MOS) systems for the creation of solar fuels through water splitting reactions</span> </p>
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title A combined capacitance-voltage and hard x-ray photoelectron spectroscopy characterisation of metal/Al2O3/In0.53Ga0.47As capacitor structures
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year 2014
5
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title Nonhomogeneous spatial distribution of filamentary leakage current paths in circular area Pt/HfO2/Pt capacitors
type Peer Reviewed Journal
year 2013
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7
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authors Miranda, E,Jimenez, D,Sune, J,O'Connor, E,Monaghan, S,Povey, I,Cherkaoui, K,Hurley, PK
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journal Journal of Vacuum Science & Technology B
other_type [empty string]
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title Nonhomogeneous spatial distribution of filamentary leakage current paths in circular area Pt/HfO2/Pt capacitors
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authors Saura, X., Suñé, J., Monaghan, S., Hurley, P.K., Miranda, E.
doi 10.1063/1.4825321
id 240737127
journal Journal of Applied Physics
other_type [empty string]
publisher [empty string]
title Analysis of the breakdown spot spatial distribution in Pt/HfO2/Pt capacitors using nearest neighbor statistics
type Peer Reviewed Journal
year 2013
9
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authors Lin, J., Gomeniuk, Y.Y., Monaghan, S., Povey, I.M., Cherkaoui, K., O'Connor, É., Power, M., Hurley, P.K.
doi 10.1063/1.4824066
id 240737129
journal Journal of Applied Physics
other_type [empty string]
publisher [empty string]
title An investigation of capacitance-voltage hysteresis in metal/high-k/In0.53Ga0.47As metal-oxide-semiconductor capacitors
type Peer Reviewed Journal
year 2013
10
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authors Cabrera, W., Dong, H., Brennan, B., O'Connor, E., Carolan, P., Galatage, R., Monaghan, S., Povey, I., Hurley, P.K., Hinkle, C.L., Chabal, Y., Wallace, R.M.
doi ISBN: 978-148220584-8
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journal [empty string]
other_type [empty string]
publisher [empty string]
title Technical Proceedings of the 2013 NSTI Nanotechnology Conference and Expo, NSTI-Nanotech 2013
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year 2013
11
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authors Djara, V., O'Regan, T.P., Cherkaoui, K., Schmidt, M., Monaghan, S., O'Connor, É., Povey, I.M., O'Connell, D., Pemble, M.E., Hurley, P.K.
doi 10.1016/j.mee.2013.03.026
id 240737137
journal Microelectronic Engineering
other_type [empty string]
publisher [empty string]
title Electrically active interface defects in the In0.53Ga0.47As MOS system
type Peer Reviewed Journal
year 2013
12
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authors Djara, V and O’Regan, TP and Cherkaoui, K and Schmidt, M and Monaghan, S and O’Connor, 'E and Povey, IM and O’Connell, D and Pemble, ME and Hurley, PK
doi [empty string]
id 252761752
journal Microelectronic Engineering
other_type [empty string]
publisher [empty string]
title Electrically active interface defects in the In< sub> 0.53</sub> Ga< sub> 0.47</sub> As MOS system
type Peer Reviewed Journal
year 2013
13
struct
authors Saura, X,Sune, J,Monaghan, S,Hurley, PK,Miranda, E
doi 10.1063/1.4825321
id 243941170
journal Journal of Applied Physics
other_type [empty string]
publisher [empty string]
title Analysis of the breakdown spot spatial distribution in Pt/HfO2/Pt capacitors using nearest neighbor statistics
type Peer Reviewed Journal
year 2013
14
struct
authors Brennan, B,Galatage, RV,Thomas, K,Pelucchi, E,Hurley, PK,Kim, J,Hinkle, CL,Vogel, EM,Wallace, RM
doi 10.1063/1.4821021
id 243942029
journal Journal of Applied Physics
other_type [empty string]
publisher [empty string]
title Chemical and electrical characterization of the HfO2/InAlAs interface
type Peer Reviewed Journal
year 2013
15
struct
authors Hurley, PK,O'Connor, E,Djara, V,Monaghan, S,Povey, IM,Long, RD,Sheehan, B,Lin, J,McIntyre, PC,Brennan, B,Wallace, RM,Pemble, ME,Cherkaoui, K
doi 10.1109/TDMR.2013.2282216
id 243943437
journal IEEE Transactions on Device and Materials Reliability
other_type [empty string]
publisher [empty string]
title The Characterization and Passivation of Fixed Oxide Charges and Interface States in the Al2O3/InGaAs MOS System
type Peer Reviewed Journal
year 2013
16
struct
authors Lin, J,Gomeniuk, YY,Monaghan, S,Povey, IM,Cherkaoui, K,O'Connor, E,Power, M,Hurley, PK
doi 10.1063/1.4824066
id 243944012
journal Journal of Applied Physics
other_type [empty string]
publisher [empty string]
title An investigation of capacitance-voltage hysteresis in metal/high-k/In0.53Ga0.47As metal-oxide-semiconductor capacitors
type Peer Reviewed Journal
year 2013
17
struct
authors Walsh, LA,Hughes, G,Lin, J,Hurley, PK,O'Regan, TP,Cockayne, E,Woicik, JC
doi 10.1103/PhysRevB.88.045322
id 243944325
journal Physical Review B
other_type [empty string]
publisher [empty string]
title Hard x-ray photoelectron spectroscopy and electrical characterization study of the surface potential in metal/Al2O3/GaAs(100) metal-oxide-semiconductor structures
type Peer Reviewed Journal
year 2013
18
struct
authors Negara, MA,Djara, V,O'Regan, TP,Cherkaoui, K,Burke, M,Gomeniuk, YY,Schmidt, M,O'Connor, E,Povey, IM,Quinn, AJ,Hurley, PK
doi 10.1016/j.sse.2013.04.014
id 243944413
journal Solid-State Electronics
other_type [empty string]
publisher [empty string]
title Investigation of electron mobility in surface-channel Al2O3/In0.53Ga0.47As MOSFETs
type Peer Reviewed Journal
year 2013
19
struct
authors Saura, X,Moix, D,Sune, J,Hurley, PK,Miranda, E
doi 10.1016/j.microrel.2013.07.063
id 243944468
journal Microelectronics Reliability
other_type [empty string]
publisher [empty string]
title Direct observation of the generation of breakdown spots in MIM structures under constant voltage stress
type Peer Reviewed Journal
year 2013
20
struct
authors Brennan, B. and Galatage, R. V. and Thomas, K. and Pelucchi, E. and Hurley, P. K. and Kim, J. and Hinkle, C. L. and Vogel, E. M. and Wallace, R. M.
doi 10.1063/1.4821021
id 262190939
journal Journal of Applied Physics
other_type [empty string]
publisher [empty string]
title Chemical and electrical characterization of the HfO2/InAlAs interface
type Peer Reviewed Journal
year 2013
21
struct
authors Gomeniuk, YY and Gomeniuk, YV and Nazarov, AN and Monaghan, S and Cherkaoui, K and O'Connor, 'E and Povey, I and Djara, V and Hurley, PK
doi [empty string]
id 281444172
journal ECS Transactions
other_type [empty string]
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title Electrical Properties and Charge Transport in the Pd/Al2O3/InGaAs MOS Structure
type Peer Reviewed Journal
year 2013
22
struct
authors Monaghan, S. and O'Connor, E. and Povey, I.M. and Sheehan, B.J. and Cherkaoui, K. and Hutchinson, B.J.A. and Hurley, P.K. and Ferdousi, F. and Rios, R. and Kuhn, K.J. and Rahman, A.
doi [empty string]
id 198534051
journal Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
other_type [empty string]
publisher [empty string]
title Effects of alternating current voltage amplitude and oxide capacitance on mid-gap interface state defect density extractions in In0.53Ga 0.47As capacitors
type Peer Reviewed Journal
year 2013
23
struct
authors Chou, HY,O'Connor, E,Hurley, PK,Afanas'ev, VV,Houssa, M,Stesmans, A,Ye, PD,Newcomb, SB
doi ARTN 141602
id 146554627
journal Applied Physics Letters
other_type [empty string]
publisher [empty string]
title Interface barriers at the interfaces of polar GaAs(111) faces with Al2O3
type Peer Reviewed Journal
year 2012
24
struct
authors Djara, V,Cherkaoui, K,Newcomb, SB,Thomas, K,Pelucchi, E,O'Connell, D,Floyd, L,Dimastrodonato, V,Mereni, LO,Hurley, PK
doi ARTN 082001
id 160747217
journal Semiconductor Science and Technology
other_type [empty string]
publisher [empty string]
title On the activation of implanted silicon ions in p-In0.53Ga0.47As
type Peer Reviewed Journal
year 2012
25
struct
authors Long, RD,Shin, B,Monaghan, S,Cherkaoui, K,Cagnon, J,Stemmer, S,McIntyre, PC,Hurley, PK
doi DOI 10.1149/2.119206jes
id 160958875
journal Journal of the Electrochemical Society
other_type [empty string]
publisher [empty string]
title Erratum: Charged Defect Quantification in Pt/Al2O3/In0.53Ga0.47As/InP MOS Capacitors (vol 158, pg G103, 2011)
type Peer Reviewed Journal
year 2012
26
struct
authors Djara, V. and Cherkaoui, K. and Newcomb, S. B. and Thomas, K. and Pelucchi, E. and O'Connell, D. and Floyd, L. and Dimastrodonato, V. and Mereni, L. O. and Hurley, P. K.
doi [empty string]
id 164121001
journal Semiconductor Science and Technology
other_type [empty string]
publisher [empty string]
title On the activation of implanted silicon ions in p-In0.53Ga0.47As
type Peer Reviewed Journal
year 2012
27
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authors Toomey, B. and Cherkaoui, K. and Monaghan, S. and Djara, V. and O'Connor, E. and O'Connell, D. and Oberbeck, L. and Tois, E. and Blomberg, T. and Newcomb, S.B. and Hurley, P.K.
doi 10.1016/j.mee.2012.01.001
id 165701743
journal Microelectronic Engineering
other_type [empty string]
publisher [empty string]
title The structural and electrical characterization of a HfErOx dielectric for MIM capacitor DRAM applications
type Peer Reviewed Journal
year 2012
28
struct
authors Miranda, E. , Jiménez, D. , Suñé, J. , O'Connor, E. , Monaghan, S. , Cherkaoui, K. , Hurley, P.K.
doi 10.1109/MIEL.2012.6222790
id 165701881
journal [empty string]
other_type [empty string]
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title 28th International Conference on Microelectronics - Proceedings (MIEL) 2012, art. no. 6222790
type Conference Publication
year 2012
29
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authors Djara, V and Cherkaoui, K and Schmidt, M and Gomeniuk, YY and O'Connor, E and Povey, IM and O'Connell, D and Monaghan, S and Pemble, ME and Hurley, PK
doi [empty string]
id 252761703
journal [empty string]
other_type [empty string]
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title Ultimate Integration on Silicon (ULIS), 2012 13th International Conference on
type Conference Publication
year 2012
30
struct
authors Long, R.D. and Shin, B. and Monaghan, S. and Cherkaoui, K. and Cagnon, J. and Stemmer, S. and McIntyre, P.C. and Hurley, P.K.
doi 10.1149/2.119206jes
id 198534059
journal Journal of the Electrochemical Society
other_type [empty string]
publisher [empty string]
title Erratum: Charged defect quantification in PtAl 2O 3In 0.53Ga 0.47AsInP MOS capacitors (Journal of the Electrochemical Society (2011) 158 (G103))
type Peer Reviewed Journal
year 2012
31
struct
authors Djara, V. and Cherkaoui, K. and Schmidt, M. and Monaghan, S. and O'Connor, É. and Povey, I.M. and O'Connell, D. and Pemble, M.E. and Hurley, P.K.
doi [empty string]
id 198534062
journal IEEE Transactions On Electron Devices
other_type [empty string]
publisher [empty string]
title Impact of forming gas annealing on the performance of surface-channel In 0.53Ga 0.47As MOSFETs with an ALD Al 2O 3 gate dielectric
type Peer Reviewed Journal
year 2012
32
struct
authors Cherkaoui, K., Djara, V., O'Connor, É., Lin, J., Negara, M.A., Povey, I.M., Monaghan, S., Hurley, P.K.
doi 10.1149/1.3700874
id 198534161
journal [empty string]
other_type [empty string]
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title 5th International Symposium on Dielectrics for Nanosystems: Materials Science, Processing, Reliability and Manufacturing - 221st ECS Meeting; Code93682
type Conference Publication
year 2012
33
struct
authors Walsh, LA,Hughes, G,Hurley, PK,Lin, J,Woicik, JC
doi ARTN 241602
id 206308198
journal Applied Physics Letters
other_type [empty string]
publisher [empty string]
title A combined hard x-ray photoelectron spectroscopy and electrical characterisation study of metal/SiO2/Si(100) metal-oxide-semiconductor structures
type Peer Reviewed Journal
year 2012
34
struct
authors Cherkaoui, K., Djara, V., O'Connor, É., Lin, J., Negara, M.A., Povey, I.M., Monaghan, S., Hurley, P.K.
doi 10.1149/1.3700874
id 240737139
journal Electrochemical Society Transactions
other_type [empty string]
publisher [empty string]
title Can metal/Al2O3/In0.53Ga0.47As/InP MOSCAP properties translate to metal/Al2O3/In 0.53Ga0.47As/InP MOSFET characteristics?
type Peer Reviewed Journal
year 2012
35
struct
authors Djara, V. , Cherkaoui, K. , Schmidt, M. , Gomeniuk, Y.Y. , O'Connor, É. , Povey, I.M. , O'Connell, D. , Monaghan, S. , Pemble, M.E. , Hurley, P.K.
doi 10.1109/ULIS.2012.6193349
id 165701901
journal [empty string]
other_type [empty string]
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title 13th International Conference on Ultimate Integration on Silicon (ULIS) 2012, art. no. 6193349
type Conference Publication
year 2012
36
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authors Zhang, P. F.,Nagle, R. E.,Deepak, N.,Povey, I. M.,Gomeniuk, Y. Y.,O'Connor, E.,Petkov, N.,Schmidt, M.,O'Regan, T. P.,Cherkaoui, K.,Pemble, M. E.,Hurley, P. K.,Whatmore, R. W.
doi [empty string]
id 198662474
journal Microelectronic Engineering
other_type [empty string]
publisher [empty string]
title The structural and electrical properties of the SrTa2O6/In0.53Ga0.47As/InP system
type Peer Reviewed Journal
year 2011
37
struct
authors Eric Vogel , A. M. Sonnet, R. V. Galatage, P. K. Hurley, E. Pelucchi, K. K. Thomas, A. Gocalinska, J. Huang, N. Goel, G. Bersuker, W. P. Kirk, C. L. Hinkle, R. M. Wallace
doi [empty string]
id 262190881
journal [empty string]
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title AVS 58th International Symposium and Exhibition, October 30 - November 4, 2011, Nashville Convention Center, Nashville, USA.
type Conference Contribution
year 2011
38
struct
authors Monaghan, S,O'Mahony, A,Cherkaoui, K,O'Connor, E,Povey, IM,Nolan, MG,O'Connell, D,Pemble, ME,Hurley, PK,Provenzano, G,Crupi, F,Newcomb, SB;
doi 10.1116/1.3532826
id 70046321
journal Journal of Vacuum Science & Technology B
other_type [empty string]
publisher [empty string]
title Electrical analysis of three-stage passivated In0.53Ga0.47As capacitors with varying HfO2 thicknesses and incorporating an Al2O3 interface control layer
type Peer Reviewed Journal
year 2011
39
struct
authors Milojevic, M,Contreras-Guerrero, R,O'Connor, E,Brennan, B,Hurley, PK,Kim, J,Hinkle, CL,Wallace, RM;
doi ARTN 042904
id 102259582
journal Applied Physics Letters
other_type [empty string]
publisher [empty string]
title In-situ characterization of Ga2O passivation of In0.53Ga0.47As prior to high-k dielectric atomic layer deposition
type Peer Reviewed Journal
year 2011
40
struct
authors O'Regan, TP,Hurley, PK
doi ARTN 163502
id 116731969
journal Applied Physics Letters
other_type [empty string]
publisher [empty string]
title Calculation of the capacitance-voltage characteristic of GaAs, In0.53Ga0.47As, and InAs metal-oxide-semiconductor structures
type Peer Reviewed Journal
year 2011
41
struct
authors Negara, MA,Veksler, D,Huang, J,Ghibaudo, G,Hurley, PK,Bersuker, G,Goel, N,Kirsch, P
doi ARTN 232101
id 160747703
journal Applied Physics Letters
other_type [empty string]
publisher [empty string]
title Analysis of effective mobility and hall effect mobility in high-k based In0.75Ga0.25As metal-oxide-semiconductor high-electron-mobility transistors
type Peer Reviewed Journal
year 2011
42
struct
authors Zhang, PF,Nagle, RE,Deepak, N,Povey, IM,Gomeniuk, YY,O'Connor, E,Petkov, N,Schmidt, M,O'Regan, TP,Cherkaoui, K,Pemble, ME,Hurley, PK,Whatmore, RW
doi DOI 10.1016/j.mee.2011.03.118
id 160958951
journal Microelectronic Engineering
other_type Other
publisher [empty string]
title The structural and electrical properties of the SrTa2O6/In0.53Ga0.47As/InP system
type More Publications
year 2011
43
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authors Modreanu, M, Monaghan, S, Povey, IM, Cherkaoui, K, Hurley, PK, Androulidaki, M
doi DOI 10.1016/j.mee.2011.03.107
id 160958957
journal Microelectronic Engineering
other_type [empty string]
publisher [empty string]
title Investigation of bulk defects in amorphous and crystalline HfO2 thin films
type Peer Reviewed Journal
year 2011
44
struct
authors Negara, MA,Goel, N,Bauza, D,Ghibaudo, G,Hurley, PK
doi DOI 10.1016/j.mee.2011.03.091
id 160958959
journal Microelectronic Engineering
other_type Other
publisher [empty string]
title Interface state densities, low frequency noise and electron mobility in surface channel In0.53Ga0.47As n-MOSFETs with a ZrO2 gate dielectric
type More Publications
year 2011
45
struct
authors Miranda, E,O'Connor, E,Hurley, PK
doi DOI 10.1016/j.mee.2010.07.024
id 160959003
journal Microelectronic Engineering
other_type Other
publisher [empty string]
title Application of the quadrat counts method to the analysis of the spatial breakdown spots pattern in metal gate/MgO/InP structures
type More Publications
year 2011
46
struct
authors Wong, CS,Bennett, NS,McNally, PJ,Galiana, B,Tejedor, P,Benedicto, M,Molina-Aldareguia, JM,Monaghan, S,Hurley, PK,Cherkaoui, K
doi DOI 10.1016/j.mee.2010.09.026
id 160959005
journal Microelectronic Engineering
other_type [empty string]
publisher [empty string]
title Multi-technique characterisation of MOVPE-grown GaAs on Si
type Peer Reviewed Journal
year 2011
47
struct
authors Sonnet, A. M. and Galatage, R. V. and Hurley, P. K. and Pelucchi, E. and Thomas, K. K. and Gocalinska, A. and Huang, J. and Goel, N. and Bersuker, G. and Kirk, W. P. and Hinkle, C. L. and Wallace, R. M. and Vogel, E. M.
doi [empty string]
id 164121052
journal Applied Physics Letters
other_type [empty string]
publisher [empty string]
title On the calculation of effective electric field in In0.53Ga0.47As surface channel metal-oxide-semiconductor field-effect-transistors
type Peer Reviewed Journal
year 2011
48
struct
authors Sonnet, A. M. and Galatage, R. V. and Hurley, P. M. and Pelucchi, E. and Thomas, K. and Gocalinska, A. and Huang, J. and Goel, N. and Bersuker, G. and Kirk, W. P. and Hinkle, C. L. and Vogel, E. M.
doi [empty string]
id 164121053
journal Microelectronic Engineering
other_type [empty string]
publisher [empty string]
title Remote phonon and surface roughness limited universal electron mobility of In0.53Ga0.47As surface channel MOSFETs
type Peer Reviewed Journal
year 2011
49
struct
authors O'Connor, E. and Monaghan, S. and Cherkaoui, K. and Povey, I.M. and Hurley, P.K.
doi 10.1063/1.3663535
id 165701747
journal Applied Physics Letters
other_type [empty string]
publisher [empty string]
title Analysis of the minority carrier response of n-type and p-type Au/Ni/Al2O3/In0.53Ga0.47As/InP capacitors following an optimized (NH4)2S treatment
type Peer Reviewed Journal
year 2011
50
struct
authors Gomeniuk, Y.Y.a and Gomeniuk, Y.V.a and Nazarov, A.N.a and Hurley, P.K.b and Cherkaoui, K.b and Monaghan, S.b and Hellström, P.-E.c and Gottlob, H.D.B.d and Schubert, J.e and Lopes, J.M.J.e
doi [empty string]
id 165701751
journal Advanced Materials Research
other_type [empty string]
publisher [empty string]
title Electrical properties of high-k LaLuO 3 gate oxide for SOI MOSFETs
type Peer Reviewed Journal
year 2011
51
struct
authors O'Connor, É., Djara, V., Monaghan, S., Hurley, P.K., Cherkaoui, K.
doi 10.1149/1.3569934
id 166096965
journal Electrochemical Society Transactions
other_type [empty string]
publisher [empty string]
title Capacitance-voltage and interface defect density characteristics of GaAs and In0.53Ga0.47As MOS capacitors incorporating a PECVD Si3N4 dielectric
type Peer Reviewed Journal
year 2011
52
struct
authors Gomeniuk, Y.Y. and Gomeniuk, Y.V. and Tyagulskii, I.P. and Tyagulskii, S.I. and Nazarov, A.N. and Lysenko, V.S. and Cherkaoui, K. and Monaghan, S. and Hurley, P.K.
doi [empty string]
id 198534076
journal Microelectronic Engineering
other_type [empty string]
publisher [empty string]
title Transport and interface states in high-κ LaSiO x dielectric
type Peer Reviewed Journal
year 2011
53
struct
authors O'Connor, É. and Brennan, B. and Djara, V. and Cherkaoui, K. and Monaghan, S. and Newcomb, S.B. and Contreras, R. and Milojevic, M. and Hughes, G. and Pemble, M.E. and Wallace, R.M. and Hurley, P.K.
doi [empty string]
id 198534082
journal Journal of Applied Physics
other_type [empty string]
publisher [empty string]
title A systematic study of (NH 4) 2 S passivation (22%, 10%, 5%, or 1%) on the interface properties of the Al 2 O 3 / In 0.53 Ga 0.47 As/InP system for n -type and p -type In 0.53 Ga 0.47 As epitaxial layers
type Peer Reviewed Journal
year 2011
54
struct
authors Monaghan, S. and O'Mahony, A. and Cherkaoui, K. and O'Connor, E. and Povey, I. M. and Nolan, M. G. and O'Connell, D. and Pemble, M. E. and Hurley, P. K. and Provenzano, G. and Crupi, F. and Newcomb, S. B.
doi [empty string]
id 198661850
journal Journal of Vacuum Science & Technology B
other_type [empty string]
publisher [empty string]
title Electrical analysis of three-stage passivated In(0.53)Ga(0.47)As capacitors with varying HfO(2) thicknesses and incorporating an Al(2)O(3) interface control layer
type Peer Reviewed Journal
year 2011
55
struct
authors Sonnet, AM,Galatage, RV,Hurley, PK,Pelucchi, E,Thomas, KK,Gocalinska, A,Huang, J,Goel, N,Bersuker, G,Kirk, WP,Hinkle, CL,Wallace, RM,Vogel, EM
doi 10.1063/1.3588255
id 243944491
journal Applied Physics Letters
other_type [empty string]
publisher [empty string]
title On the calculation of effective electric field in In0.53Ga0.47As surface channel metal-oxide-semiconductor field-effect-transistors
type Peer Reviewed Journal
year 2011
56
struct
authors O’Connor, 'E and Brennan, B and Djara, V and Cherkaoui, K and Monaghan, S and Newcomb, SB and Contreras, R and Milojevic, M and Hughes, G and Pemble, ME and others
doi [empty string]
id 252761544
journal Journal of Applied Physics
other_type [empty string]
publisher [empty string]
title A systematic study of (NH4) 2S passivation (22%, 10%, 5%, or 1%) on the interface properties of the Al2O3/In0. 53Ga0. 47As/InP system for n-type and p-type In0. 53Ga0. 47As epitaxial layers
type Peer Reviewed Journal
year 2011
57
struct
authors S. Monaghan, A. O'Mahony, K. Cherkaoui, É. O'Connor, I. M. Povey, M. G. Nolan, D. O'Connell, M. E. Pemble, P. K. Hurley, G. Provenzano, F. Crupi, S. B. Newcomb;
doi [empty string]
id 70045703
journal Journal of Vacuum Science & Technology B
other_type [empty string]
publisher [empty string]
title Electrical analysis of three-stage passivated In0.53Ga0.47As capacitors with varying HfO2 thicknesses and incorporating an Al2O3 interface control layer
type Peer Reviewed Journal
year 2011
58
struct
authors Young, RJ,Mereni, LO,Petkov, N,Knight, GR,Dimastrodonato, V,Hurley, PK,Hughes, G,Pelucchi, E;
doi DOI 10.1016/j.jcrysgro.2010.01.033
id 43334275
journal Journal of Crystal Growth
other_type [empty string]
publisher [empty string]
title Low-angle misorientation dependence of the optical properties of InGaAs/InAlAs quantum wells
type Peer Reviewed Journal
year 2010
59
struct
authors O'Regan, TP,Hurley, PK,Soree, B,Fischetti, MV;
doi ARTN 213514
id 43334228
journal Applied Physics Letters
other_type [empty string]
publisher [empty string]
title Modeling the capacitance-voltage response of In0.53Ga0.47As metal-oxide-semiconductor structures: Charge quantization and nonparabolic corrections
type Peer Reviewed Journal
year 2010
60
struct
authors Shin, B,Weber, JR,Long, RD,Hurley, PK,Van de Walle, CG,McIntyre, PC;
doi ARTN 152908
id 43334355
journal Applied Physics Letters
other_type [empty string]
publisher [empty string]
title Origin and passivation of fixed charge in atomic layer deposited aluminum oxide gate insulators on chemically treated InGaAs substrates
type Peer Reviewed Journal
year 2010
61
struct
authors Afanas'ev, VV,Stesmans, A,Cherkaoui, K,Hurley, PK;
doi ARTN 052103
id 43334662
journal Applied Physics Letters
other_type [empty string]
publisher [empty string]
title Electron energy band alignment at the (100)Si/MgO interface
type Peer Reviewed Journal
year 2010
62
struct
authors É. O'Connor; B. Brennan; V. Djara; K. Cherkaoui; S. Monaghan; S. B. Newcomb; R. Contreras; M. Milojevic; G. Hughes; M. E. Pemble; R. M. Wallace; P. K. Hurley;
doi [empty string]
id 70045699
journal Journal of Applied Physics
other_type [empty string]
publisher [empty string]
title A systematic study of NH42S passivation '22%, 10%, 5%, or 1%'
type Peer Reviewed Journal
year 2010
63
struct
authors O. Engstrom, I.Z. Mitrovic, S. Hall, P.K. Hurley, K. Cherkaoui, S. Monaghan, H.D.B. Gottlob, M.C. Lemme
doi [empty string]
id 216122921
journal Nanoscale CMOS Innovative Materials, Modeling and Characterization
other_type [empty string]
publisher John Wiley & Sons, Inc.
title Gate Stacks
type Book Chapter
year 2010
64
struct
authors Chou, HY,Afanas'ev, VV,Stesmans, A,Lin, HC,Hurley, PK,Newcomb, SB;
doi ARTN 132112
id 70046577
journal Applied Physics Letters
other_type [empty string]
publisher [empty string]
title Electron band alignment between (100)InP and atomic-layer deposited Al2O3
type Peer Reviewed Journal
year 2010
65
struct
authors O'Mahony, A,Monaghan, S,Provenzano, G,Povey, IM,Nolan, MG,O'Connor, E,Cherkaoui, K,Newcomb, SB,Crupi, F,Hurley, PK,Pemble, ME;
doi ARTN 052904
id 70046751
journal Applied Physics Letters
other_type [empty string]
publisher [empty string]
title Structural and electrical analysis of the atomic layer deposition of HfO2/n-In0.53Ga0.47As capacitors with and without an Al2O3 interface control layer
type Peer Reviewed Journal
year 2010
66
struct
authors Gomeniuk, Y.Y., Gomeniuk, Y.V., Nazarov, A.N., Hurley, P.K., Cherkaoui, K., Monaghan, S., Gottlob, H.D.B., Schmidt, M., Schubert, J., Lopes, J.M.J., Engström, O.
doi [empty string]
id 165701787
journal Electrochemical Society Transactions
other_type [empty string]
publisher [empty string]
title Electrical properties of LaLuO 3/Si(100) structures prepared by molecular beam deposition
type Peer Reviewed Journal
year 2010
67
struct
authors O. Engström, I. Z. Mitrovic, S. Hall, P. K. Hurley, K. Cherkaoui, S. Monaghan, H. D. B. Gottlob and M. C. Lemme
doi [empty string]
id 178375122
journal Nanoscale CMOS: Innovative Materials, Modelling, and Characterisation
other_type [empty string]
publisher John Wiley & Sons, Inc.
title Chapter 2: Gate Stacks
type Book Chapter
year 2010
68
struct
authors O'Mahony, A., Monaghan, S., Provenzano, G., Povey, I. M., Nolan, M. G., O'Connor, E., Cherkaoui, K., Newcomb, S. B., Crupi, F., Hurley, P. K., Pemble, M. E
doi 10.1063/1.3473773
id 70045762
journal Applied Physics Letters
other_type [empty string]
publisher [empty string]
title Structural and electrical analysis of the atomic layer deposition of HfO2/n-In0.53Ga0.47As capacitors with and without an Al2O3 interface control layer
type Peer Reviewed Journal
year 2010
69
struct
authors Gottlob, HDB, Schmidt, M, Stefani, A, Lemme, MC, Kurz, H, Mitrovic, IZ, Davey, WM, Hall, S, Werner, M, Chalker, PR, Cherkaoui, K, Hurley, PK, Piscator, J, Engstrom, O, Newcomb, SB;
doi DOI 10.1016/j.mee.2009.03.084
id 720593
journal Microelectronic Engineering
other_type Other
publisher [empty string]
title Scaling Potential and Mosfet Integration of Thermally Stable Gd Silicate Dielectrics
type More Publications
year 2009
70
struct
authors Afanas’ev, VV and Stesmans, Andre and Brammertz, G and Delabie, Annelies and Sionke, S and O’Mahony, A and Povey, IM and Pemble, ME and O’Connor, E and Hurley, PK and others
doi [empty string]
id 252761619
journal Microelectronic Engineering
other_type [empty string]
publisher [empty string]
title Band offsets at interfaces of (100) In< i> x</i> Ga< sub> 1-</sub>< i> x</i> As (0¿< i> x</i>¿ 0.53) with Al< sub> 2</sub> O< sub> 3</sub> and HfO< sub> 2</sub>
type Peer Reviewed Journal
year 2009
71
struct
authors Miranda, E, O'Connor, E, Hughes, G, Casey, P, Cherkaoui, K, Monaghan, S, Long, R, O'Connell, D, Hurley, PK;
doi DOI 10.1016/j.mee.2009.03.009
id 720598
journal Microelectronic Engineering
other_type [empty string]
publisher [empty string]
title Degradation Dynamics and Breakdown of MgO Gate Oxides
type Peer Reviewed Journal
year 2009
72
struct
authors Miranda, E, O'Connor, E, Cherkaoui, K, Monaghan, S, Long, R, O'Connell, D, Hurley, PK, Hughes, G, Casey, P;
doi DOI 10.1063/1.3167827
id 720631
journal Applied Physics Letters
other_type [empty string]
publisher [empty string]
title Electrical Characterization of The Soft Breakdown Failure Mode In Mgo Layers
type Peer Reviewed Journal
year 2009
73
struct
authors Afanas'ev, VV, Stesmans, A, Brammertz, G, Delabie, A, Sionke, S, O'Mahony, A, Povey, IM, Pemble, ME, O'Connor, E, Hurley, PK, Newcomb, SB;
doi DOI 10.1016/j.mee.2009.03.003
id 720639
journal Microelectronic Engineering
other_type [empty string]
publisher [empty string]
title Band Offsets At Interfaces of (100)Inxga1-Xas (0 &#8810;= X &#8810;= 0.53) With Al2o3 and Hfo2
type Peer Reviewed Journal
year 2009
74
struct
authors Shin, B, Cagnon, J, Long, RD, Hurley, PK, Stemmer, S, McIntyre, PC;
doi DOI 10.1149/1.3139603
id 720745
journal Electrochemical and Solid State Letters
other_type [empty string]
publisher [empty string]
title Unpinned Interface Between Al2o3 Gate Dielectric Layer Grown By Atomic Layer Deposition and Chemically Treated N-In0.53ga0.47as(001)
type Peer Reviewed Journal
year 2009
75
struct
authors Afanas'ev, VV, Stesmans, A, Brammertz, G, Delabie, A, Sionke, S, O'Mahony, A, Povey, IM, Pemble, ME, O'Connor, E, Hurley, PK, Newcomb, SB;
doi DOI 10.1063/1.3137187
id 720978
journal Applied Physics Letters
other_type [empty string]
publisher [empty string]
title Energy Barriers At Interfaces Between (100) Inxga1-Xas (0 &Lt;= X &Lt;= 0.53) and Atomic-Layer Deposited Al2o3 and Hfo2
type Peer Reviewed Journal
year 2009
76
struct
authors Gottlob, HDB, Stefani, A, Schmidt, M, Lemme, MC, Kurz, H, Mitrovic, IZ, Werner, M, Davey, WM, Hall, S, Chalker, PR, Cherkaoui, K, Hurley, PK, Piscator, J, Engstrom, O, Newcomb, SB;
doi DOI 10.1116/1.3025904
id 721072
journal Journal of Vacuum Science & Technology B
other_type Other
publisher [empty string]
title Gd Silicate: A High-K Dielectric Compatible With High Temperature Annealing
type More Publications
year 2009
77
struct
authors Lu, Y, Hall, S, Tan, LZ, Mitrovic, IZ, Davey, WM, Raeissi, B, Engstrom, O, Cherkaoui, K, Monaghan, S, Hurley, PK, Gottlob, HDB, Lemme, MC;
doi DOI 10.1116/1.3025910
id 721075
journal Journal of Vacuum Science & Technology B
other_type [empty string]
publisher [empty string]
title Leakage Current Effects On C-V Plots of High-K Metal-Oxide-Semiconductor Capacitors
type Peer Reviewed Journal
year 2009
78
struct
authors Brennan, B, Milojevic, M, Kim, HC, Hurley, PK, Kim, J, Hughes, G, Wallace, RM;
doi DOI 10.1149/1.3109624
id 721325
journal Electrochemical and Solid State Letters
other_type [empty string]
publisher [empty string]
title Half-Cycle Atomic Layer Deposition Reaction Study Using O-3 and H2o Oxidation of Al2o3 On In0.53ga0.47as
type Peer Reviewed Journal
year 2009
79
struct
authors O'Connor, E, Monaghan, S, Long, RD, O'Mahony, A, Povey, IM, Cherkaoui, K, Pemble, ME, Brammertz, G, Heyns, M, Newcomb, SB, Afanas'ev, VV, Hurley, PK;
doi DOI 10.1063/1.3089688
id 721371
journal Applied Physics Letters
other_type [empty string]
publisher [empty string]
title Temperature and Frequency Dependent Electrical Characterization of Hfo2/Inxga1-Xas Interfaces Using Capacitance-Voltage and Conductance Methods
type Peer Reviewed Journal
year 2009
80
struct
authors Monaghan, S, Cherkaoui, K, O'Connor, E, Djara, V, Hurley, PK, Oberbeck, L, Tois, E, Wilde, L, Teichert, S;
doi DOI 10.1109/LED.2008.2012356
id 721456
journal IEEE Electron Device Letters
other_type [empty string]
publisher [empty string]
title TiN/ZrO2/Ti/Al Metal-Insulator-Metal Capacitors with Subnanometer CET using ALD-Deposited ZrO2 for DRAM Applications
type Peer Reviewed Journal
year 2009
81
struct
authors Negara, MA, Cherkaoui, K, Hurley, PK, Young, CD, Majhi, P, Tsai, W, Bauza, D, Ghibaudo, G;
doi DOI 10.1063/1.3068367
id 721823
journal Journal of Applied Physics
other_type [empty string]
publisher [empty string]
title Analysis of Electron Mobility In Hfo2/Tin Gate Metal-Oxide-Semiconductor Field Effect Transistors: The Influence of Hfo2 Thickness, Temperature, and Oxide Charge
type Peer Reviewed Journal
year 2009
82
struct
authors Monaghan, S, Hurley, PK, Cherkaoui, K, Negara, MA, Schenk, A;
doi 10.1016/j.sse.2008.09.018
id 723984
journal Solid-State Electronics
other_type [empty string]
publisher [empty string]
title Determination of electron effective mass and electron affinity in HfO2 using MOS and MOSFET structures
type Peer Reviewed Journal
year 2009
83
struct
authors Long, RD, O'Connor, E, Newcomb, SB, Monaghan, S, Cherkaoui, K, Casey, P, Hughes, G, Thomas, KK, Chalvet, F, Povey, IM, Pemble, ME, Hurley, PK
doi 10.1063/1.3243234
id 43334760
journal Journal of Applied Physics
other_type [empty string]
publisher [empty string]
title Structural analysis, elemental profiling, and electrical characterization of HfO2 thin films deposited on In0.53Ga0.47As surfaces by atomic layer deposition
type Peer Reviewed Journal
year 2009
84
struct
authors Brennan, B,Milojevic, M,Kim, HC,Hurley, PK,Kim, J,Hughes, G,Wallace, RM;
doi DOI 10.1149/1.3109624
id 43334941
journal Electrochemical and Solid State Letters
other_type [empty string]
publisher [empty string]
title Half-Cycle Atomic Layer Deposition Reaction Study Using O-3 and H2O Oxidation of Al2O3 on In0.53Ga0.47As
type Peer Reviewed Journal
year 2009
85
struct
authors O'Connor, E,Monaghan, S,Long, RD,O'Mahony, A,Povey, IM,Cherkaoui, K,Pemble, ME,Brammertz, G,Heyns, M,Newcomb, SB,Afanas'ev, VV,Hurley, PK;
doi 10.1063/1.3089688
id 43334994
journal Applied Physics Letters
other_type [empty string]
publisher [empty string]
title Temperature and frequency dependent electrical characterization of HfO2/InxGa1-xAs interfaces using capacitance-voltage and conductance methods
type Peer Reviewed Journal
year 2009
86
struct
authors Shin, B,Cagnon, J,Long, RD,Hurley, PK,Stemmer, S,McIntyre, PC;
doi DOI 10.1149/1.3139603
id 43335047
journal Electrochemical and Solid State Letters
other_type [empty string]
publisher [empty string]
title Unpinned Interface Between Al2O3 Gate Dielectric Layer Grown by Atomic Layer Deposition and Chemically Treated n-In0.53Ga0.47As(001)
type Peer Reviewed Journal
year 2009
87
struct
authors Negara, MA,Cherkaoui, K,Hurley, PK,Young, CD,Majhi, P,Tsai, W,Bauza, D,Ghibaudo, G;
doi ARTN 024510
id 43335111
journal Journal of Applied Physics
other_type [empty string]
publisher [empty string]
title Analysis of electron mobility in HfO2/TiN gate metal-oxide-semiconductor field effect transistors: The influence of HfO2 thickness, temperature, and oxide charge
type Peer Reviewed Journal
year 2009
88
struct
authors Afanas'ev, VV,Stesmans, A,Brammertz, G,Delabie, A,Sionke, S,O'Mahony, A,Povey, IM,Pemble, ME,O'Connor, E,Hurley, PK,Newcomb, SB;
doi ARTN 202110
id 43335132
journal Applied Physics Letters
other_type [empty string]
publisher [empty string]
title Energy barriers at interfaces between (100) InxGa1-xAs (0 <= x <= 0.53) and atomic-layer deposited Al2O3 and HfO2
type Peer Reviewed Journal
year 2009
89
struct
authors Miranda, E, O'Connor, E, Cherkaoui, K, Monaghan, S, Long, R, O'Connell, D, Hurley, PK, Hughes, G, Casey, P
doi 10.1063/1.3167827
id 43335151
journal Applied Physics Letters
other_type [empty string]
publisher [empty string]
title Electrical characterization of the soft breakdown failure mode in MgO layers
type Peer Reviewed Journal
year 2009
90
struct
authors Monaghan, S,Cherkaoui, K,O'Connor, E,Djara, V,Hurley, PK,Oberbeck, L,Tois, E,Wilde, L,Teichert, S;
doi DOI 10.1109/LED.2008.2012356
id 43335212
journal IEEE Electron Device Letters
other_type [empty string]
publisher [empty string]
title TiN/ZrO2/Ti/Al Metal-Insulator-Metal Capacitors With Subnanometer CET Using ALD-Deposited ZrO2 for DRAM Applications
type Peer Reviewed Journal
year 2009
91
struct
authors Miranda, E, Martin-Martinez, J, O'Connor, E, Hughes, G, Casey, P, Cherkaoui, K, Monaghan, S, Long, R, O'Connell, D, Hurley, PK
doi DOI 10.1016/j.microrel.2009.06.017
id 160959194
journal Microelectronics Reliability
other_type [empty string]
publisher [empty string]
title Effects of the electrical stress on the conduction characteristics of metal gate/MgO/InP stacks
type Peer Reviewed Journal
year 2009
92
struct
authors Gottlob, HDB,Stefani, A,Schmidt, M,Lemme, MC,Kurz, H,Mitrovic, IZ,Werner, M,Davey, WM,Hall, S,Chalker, PR,Cherkaoui, K,Hurley, PK,Piscator, J,Engstrom, O,Newcomb, SB
doi DOI 10.1116/1.3025904
id 160959206
journal Journal of Vacuum Science & Technology B
other_type Other
publisher [empty string]
title Gd silicate: A high-k dielectric compatible with high temperature annealing
type More Publications
year 2009
93
struct
authors Lu, Y,Hall, S,Tan, LZ,Mitrovic, IZ,Davey, WM,Raeissi, B,Engstrom, O,Cherkaoui, K,Monaghan, S,Hurley, PK,Gottlob, HDB,Lemme, MC
doi DOI 10.1116/1.3025910
id 160959208
journal Journal of Vacuum Science & Technology B
other_type Other
publisher [empty string]
title Leakage current effects on C-V plots of high-k metal-oxide-semiconductor capacitors
type More Publications
year 2009
94
struct
authors Gottlob, HDB,Schmidt, M,Stefani, A,Lemme, MC,Kurz, H,Mitrovic, IZ,Davey, WM,Hall, S,Werner, M,Chalker, PR,Cherkaoui, K,Hurley, PK,Piscator, J,Engstrom, O,Newcomb, SB
doi DOI 10.1016/j.mee.2009.03.084
id 160959238
journal Microelectronic Engineering
other_type Other
publisher [empty string]
title Scaling potential and MOSFET integration of thermally stable Gd silicate dielectrics
type More Publications
year 2009
95
struct
authors Casey, P,O'Connor, E,Long, R,Brennan, B,Krasnikov, SA,O'Connell, D,Hurley, PK,Hughes, G
doi DOI 10.1016/j.mee.2009.03.046
id 160959240
journal Microelectronic Engineering
other_type Other
publisher [empty string]
title Growth, ambient stability and electrical characterisation of MgO thin films on silicon surfaces
type More Publications
year 2009
96
struct
authors Miranda, E,O'Connor, E,Hughes, G,Casey, P,Cherkaoui, K,Monaghan, S,Long, R,O'Connell, D,Hurley, PK
doi DOI 10.1016/j.mee.2009.03.009
id 160959242
journal Microelectronic Engineering
other_type Other
publisher [empty string]
title Degradation dynamics and breakdown of MgO gate oxides
type More Publications
year 2009
97
struct
authors Afanas'ev, VV,Stesmans, A,Brammertz, G,Delabie, A,Sionke, S,O'Mahony, A,Povey, IM,Pemble, ME,O'Connor, E,Hurley, PK,Newcomb, SB
doi DOI 10.1016/j.mee.2009.03.003
id 160959244
journal Microelectronic Engineering
other_type Other
publisher [empty string]
title Band offsets at interfaces of (100)InxGa1-xAs (0 <= x <= 0.53) with Al2O3 and HfO2
type More Publications
year 2009
98
struct
authors Miranda, E. , O'connor, E. , Hughes, G. , Casey, P. , Cherkaoui, K. , Monaghan, S. , Long, R. , O'Connell, D. , Hurley, P.K.
doi 10.1109/IPFA.2009.5232695
id 165701921
journal [empty string]
other_type [empty string]
publisher [empty string]
title Proceedings of the International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) 2009, art. no. 5232695
type Conference Publication
year 2009
99
struct
authors Miranda, E. , O'Connor, E. , Hughes, G. , Casey, P. , Cherkaoui, K. , Monaghan, S. , Long, R. , O'Connell, D. , Hurley, P.K.
doi 10.1109/IRPS.2009.5173330
id 165701923
journal [empty string]
other_type [empty string]
publisher [empty string]
title IEEE International Reliability Physics Symposium Proceedings 2009, art. no. 5173330
type Conference Publication
year 2009
100
struct
authors Miranda, E., O'Connor, E., Hughes, G., Casey, P., Cherkaoui, K., Monaghan, S., Long, R.D., O'Connell, D., Hurley, P.K.
doi 10.1149/1.3206608
id 165702001
journal Electrochemical Society Transactions
other_type [empty string]
publisher [empty string]
title Effects of the semiconductor substrate material on the post-breakdown current of MgO dielectric layers
type Peer Reviewed Journal
year 2009
101
struct
authors Miranda, E. and O'Connor, E. and Hughes, G. and Casey, P. and Cherkaoui, K. and Monaghan, S. and Long, R. and O'Connell, D. and Hurley, P.K.
doi [empty string]
id 198534105
journal Microelectronic Engineering
other_type [empty string]
publisher [empty string]
title Degradation dynamics and breakdown of MgO gate oxides
type Peer Reviewed Journal
year 2009
102
struct
authors Lu, Y. and Hall, S. and Tan, L.Z. and Mitrovic, I.Z. and Davey, W.M. and Raeissi, B. and Engström, O. and Cherkaoui, K. and Monaghan, S. and Hurley, P.K. and Gottlob, H.D.B. and Lemme, M.C.
doi [empty string]
id 198534111
journal Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
other_type [empty string]
publisher [empty string]
title Leakage current effects on C-V plots of high- k metal-oxide-semiconductor capacitors
type Peer Reviewed Journal
year 2009
103
struct
authors Monaghan, S. and Cherkaoui, K. and O'Connor, É. and Djara, V. and Hurley, P.K. and Oberbeck, L. and Tois, E. and Wilde, L. and Teichert, S.
doi [empty string]
id 198534113
journal IEEE Electron Device Letters
other_type [empty string]
publisher [empty string]
title TiN/ZrO2/Ti/Al metal-insulator-metal capacitors with subnanometer CET using ALD-deposited ZrO2 for DRAM applications
type Peer Reviewed Journal
year 2009
104
struct
authors Afanas'ev, V. V.,Stesmans, A.,Brammertz, G.,Delabie, A.,Sionke, S.,O'Mahony, A.,Povey, I. M.,Pemble, M. E.,O'Connor, E.,Hurley, P. K.,Newcomb, S. B.
doi [empty string]
id 198662514
journal Microelectronic Engineering
other_type [empty string]
publisher [empty string]
title Band offsets at interfaces of (100)InxGa1-xAs (0 <= x <= 0.53) with Al2O3 and HfO2
type Peer Reviewed Journal
year 2009
105
struct
authors Afanas'ev, V. V.,Stesmans, A.,Brammertz, G.,Delabie, A.,Sionke, S.,O'Mahony, A.,Povey, I. M.,Pemble, M. E.,O'Connor, E.,Hurley, P. K.,Newcomb, S. B.
doi [empty string]
id 198662516
journal Applied Physics Letters
other_type [empty string]
publisher [empty string]
title Energy barriers at interfaces between (100) InxGa1-xAs (0 <= x <= 0.53) and atomic-layer deposited Al2O3 and HfO2
type Peer Reviewed Journal
year 2009
106
struct
authors Monaghan, S,Hurley, PK,Cherkaoui, K,Negara, MA,Schenk, A
doi 10.1016/j.sse.2008.09.018
id 243940103
journal Solid-State Electronics
other_type [empty string]
publisher [empty string]
title Determination of electron effective mass and electron affinity in HfO2 using MOS and MOSFET structures
type Peer Reviewed Journal
year 2009
107
struct
authors Afanas’ev, VV and Stesmans, Andre and Brammertz, G and Delabie, Annelies and Sionke, S and O’Mahony, A and Povey, IM and Pemble, ME and O’Connor, E and Hurley, PK and others
doi [empty string]
id 252761576
journal Applied Physics Letters
other_type [empty string]
publisher [empty string]
title Energy barriers at interfaces between (100) InxGa1- xAs (0= x= 0.53) and atomic-layer deposited Al2O3 and HfO2
type Peer Reviewed Journal
year 2009
108
struct
authors Casey, P, O'Connor, E, Long, R, Brennan, B, Krasnikov, SA, O'Connell, D, Hurley, PK, Hughes, G;
doi DOI 10.1016/j.mee.2009.03.046
id 720596
journal Microelectronic Engineering
other_type Other
publisher [empty string]
title Growth, Ambient Stability and Electrical Characterisation of Mgo Thin Films On Silicon Surfaces
type More Publications
year 2009
109
struct
authors Farrell, RA, Petkov, N, Cherkaoui, K, Amenitsch, H, Holmes, JD, Hurley, PK, Morris, MA;
doi DOI 10.1002/cphc.200800158
id 723383
journal Chemphyschem
other_type [empty string]
publisher [empty string]
title Facile and Controlled Synthesis of Ultra-Thin Low Dielectric Constant Meso/Microporous Silica Films
type Peer Reviewed Journal
year 2008
110
struct
authors Afanasev, VV and Badylevich, Mikhail and Stesmans, Andre and Brammertz, Guy and Delabie, Annelies and Sionke, S and OMahony, A and Povey, IM and Pemble, ME and OConnor, E and others
doi [empty string]
id 252761554
journal Applied Physics Letters
other_type [empty string]
publisher [empty string]
title Energy barriers at interfaces of (100) GaAs with atomic layer deposited Al 2 O 3 and HfO 2
type Peer Reviewed Journal
year 2008
111
struct
authors Farrell RA, Petkov, N; Cherkaoui K, Hurley P, Amenitsch H, Holmes JD and Morris MA;
doi [empty string]
id 17503780
journal Journal of Material Chemistry
other_type [empty string]
publisher [empty string]
title Thin and continuous films with controlled bi- and tri-modal porosities by embedment of zeolite nanoparticles in a mesoporous matrix
type Peer Reviewed Journal
year 2008
112
struct
authors Farrell RA, Petkov, N; Cherkaoui K, Hurley P, Amenitsch H, Holmes JD and Morris MA;
doi [empty string]
id 17504108
journal Chem. Phys. Chem
other_type [empty string]
publisher [empty string]
title Facile and controlled synthesis of ultra-thin low dielectric constant meso/microporous silica films
type Peer Reviewed Journal
year 2008
113
struct
authors Farrell RA, Petkov N, Cherkaoui K, Amenitsch H, Holmes JD, Hurley PK, Morris MA;
doi 10.1002/cphc.200800158
id 26233792
journal Chemphyschem
other_type [empty string]
publisher [empty string]
title Facile and controlled synthesis of ultra-thin low dielectric constant meso/microporous silica films.
type Peer Reviewed Journal
year 2008
114
struct
authors Farrell, RA,Petkov, N,Cherkaoui, K,Amenitsch, H,Holmes, JD,Hurley, PK,Morris, MA;
doi DOI 10.1002/cphc.200800158
id 43335353
journal Chemphyschem
other_type [empty string]
publisher [empty string]
title Facile and controlled synthesis of ultra-thin low dielectric constant meso/microporous silica films
type Peer Reviewed Journal
year 2008
115
struct
authors O'Connor, E.,Long, R. D.,Cherkaoui, K.,Thomas, K. K.,Chalvet, F.,Povey, I. M.,Pemble, M. E.,Hurley, P. K.,Brennan, B.,Hughes, G.,Newcomb, S. B.
doi [empty string]
id 198662536
journal Applied Physics Letters
other_type [empty string]
publisher [empty string]
title In situ H(2)S passivation of In(0.53)Ga(0.47)As/InP metal-oxide-semiconductor capacitors with atomic-layer deposited HfO(2) gate dielectric
type Peer Reviewed Journal
year 2008
116
struct
authors Afanas'ev, VV, Badylevich, M, Stesmans, A, Brammertz, G, Delabie, A, Sionke, S, O'Mahony, A, Povey, IM, Pemble, ME, O'Connor, E, Hurley, PK, Newcomb, SB;
doi DOI 10.1063/1.3021374
id 722052
journal Applied Physics Letters
other_type [empty string]
publisher [empty string]
title Energy Barriers At Interfaces of (100)Gaas With Atomic Layer Deposited Al2o3 and Hfo2
type Peer Reviewed Journal
year 2008
117
struct
authors Raeissi, B, Piscator, J, Engstrom, O, Hall, S, Buiu, O, Lemme, MC, Gottlob, HDB, Hurley, PK, Cherkaoui, K, Osten, HJ;
doi DOI 10.1016/j.sse.2008.04.005
id 722507
journal Solid-State Electronics
other_type [empty string]
publisher [empty string]
title High-K-Oxide/Silicon Interfaces Characterized By Capacitance Frequency Spectroscopy
type Peer Reviewed Journal
year 2008
118
struct
authors Gottlob, HDB, Lemme, MC, Schmidt, M, Echtermeyer, TJ, Mollenhauer, T, Kurz, H, Cherkaoui, K, Hurley, PK, Newcomb, SB;
doi DOI 10.1016/j.mee.2008.03.016
id 722571
journal Microelectronic Engineering
other_type Other
publisher [empty string]
title Gentle Fusi Nisi Metal Gate Process For High-K Dielectric Screening
type More Publications
year 2008
119
struct
authors Cherkaoui, K, Monaghan, S, Negara, MA, Modreanu, M, Hurley, PK, O'Connell, D, McDonnell, S, Hughes, G, Wright, S, Barklie, RC, Bailey, P, Noakes, TCQ;
doi DOI 10.1063/1.2978209
id 722656
journal Journal of Applied Physics
other_type [empty string]
publisher [empty string]
title Electrical, Structural, and Chemical Properties of Hfo2 Films Formed By Electron Beam Evaporation
type Peer Reviewed Journal
year 2008
120
struct
authors Dobaczewski, L, Bernardini, S, Kruszewski, P, Hurley, PK, Markevich, VP, Hawkins, ID, Peaker, AR;
doi DOI 10.1063/1.2939001
id 723553
journal Applied Physics Letters
other_type [empty string]
publisher [empty string]
title Energy State Distributions of The P-B Centers At The (100), (110), and (111) Si/Sio2 Interfaces Investigated By Laplace Deep Level Transient Spectroscopy
type Peer Reviewed Journal
year 2008
121
struct
authors O'Connor, E, Long, RD, Cherkaoui, K, Thomas, KK, Chalvet, F, Povey, IM, Pemble, ME, Hurley, PK, Brennan, B, Hughes, G, Newcomb, SB;
doi DOI 10.1063/1.2829586
id 724975
journal Applied Physics Letters
other_type [empty string]
publisher [empty string]
title In Situ H2s Passivation of In0.53ga0.47as/Inp Metal-Oxide-Semiconductor Capacitors With Atomic-Layer Deposited Hfo2 Gate Dielectric
type Peer Reviewed Journal
year 2008
122
struct
authors Hurley, PK, Cherkaoui, K, O'Connor, E, Lemme, MC, Gottlob, HDB, Schmidt, M, Hall, S, Lu, Y, Buiu, O, Raeissi, B, Piscator, J, Engstrom, O, Newcomb, SB;
doi DOI 10.1149/1.2806172
id 725080
journal Journal of the Electrochemical Society
other_type [empty string]
publisher [empty string]
title Interface Defects In Hfo2, Lasiox, and Gd2o3 High-K/Metal-Gate Structures On Silicon
type Peer Reviewed Journal
year 2008
123
struct
authors Afanas'ev, VV,Badylevich, M,Stesmans, A,Brammertz, G,Delabie, A,Sionke, S,O'Mahony, A,Povey, IM,Pemble, ME,O'Connor, E,Hurley, PK,Newcomb, SB;
doi ARTN 212104
id 43334895
journal Applied Physics Letters
other_type [empty string]
publisher [empty string]
title Energy barriers at interfaces of (100)GaAs with atomic layer deposited Al2O3 and HfO2
type Peer Reviewed Journal
year 2008
124
struct
authors Cherkaoui, K,Monaghan, S,Negara, MA,Modreanu, M,Hurley, PK,O'Connell, D,McDonnell, S,Hughes, G,Wright, S,Barklie, RC,Bailey, P,Noakes, TCQ;
doi 10.1063/1.2978209
id 43334921
journal Journal of Applied Physics
other_type [empty string]
publisher [empty string]
title Electrical, structural, and chemical properties of HfO2 films formed by electron beam evaporation
type Peer Reviewed Journal
year 2008
125
struct
authors Dobaczewski, L,Bernardini, S,Kruszewski, P,Hurley, PK,Markevich, VP,Hawkins, ID,Peaker, AR;
doi ARTN 242104
id 43335405
journal Applied Physics Letters
other_type [empty string]
publisher [empty string]
title Energy state distributions of the P-b centers at the (100), (110), and (111) Si/SiO2 interfaces investigated by Laplace deep level transient spectroscopy
type Peer Reviewed Journal
year 2008
126
struct
authors Hurley, PK,Cherkaoui, K,O'Connor, E,Lemme, MC,Gottlob, HDB,Schmidt, M,Hall, S,Lu, Y,Buiu, O,Raeissi, B,Piscator, J,Engstrom, O,Newcomb, SB;
doi DOI 10.1149/1.2806172
id 43335692
journal Journal of the Electrochemical Society
other_type [empty string]
publisher [empty string]
title Interface defects in HfO2, LaSiOx, and Gd2O3 high-k/metal-gate structures on silicon
type Peer Reviewed Journal
year 2008
127
struct
authors O'Connor, E,Long, RD,Cherkaoui, K,Thomas, KK,Chalvet, F,Povey, IM,Pemble, ME,Hurley, PK,Brennan, B,Hughes, G,Newcomb, SB;
doi ARTN 022902
id 43335805
journal Applied Physics Letters
other_type [empty string]
publisher [empty string]
title In situ H2S passivation of In0.53Ga0.47As/InP metal-oxide-semiconductor capacitors with atomic-layer deposited HfO2 gate dielectric
type Peer Reviewed Journal
year 2008
128
struct
authors Gottlob, HDB,Lemme, MC,Schmidt, M,Echtermeyer, TJ,Mollenhauer, T,Kurz, H,Cherkaoui, K,Hurley, PK,Newcomb, SB
doi DOI 10.1016/j.mee.2008.03.016
id 160959313
journal Microelectronic Engineering
other_type Other
publisher [empty string]
title Gentle FUSI NiSi metal gate process for high-k dielectric screening
type More Publications
year 2008
129
struct
authors Monaghan, S. , Hurley, P.K. , Cherkaoui, K. , Negara, M.A. , Schenk, A.
doi 10.1109/ULIS.2008.4527151
id 165701941
journal [empty string]
other_type [empty string]
publisher [empty string]
title 9th International Conference on ULtimate Integration of Silicon (ULIS) 2008, art. no. 4527151
type Conference Publication
year 2008
130
struct
authors Afanas'ev, V. V.,Badylevich, M.,Stesmans, A.,Brammertz, G.,Delabie, A.,Sionke, S.,O'Mahony, A.,Povey, I. M.,Pemble, M. E.,O'Connor, E.,Hurley, P. K.,Newcomb, S. B.
doi [empty string]
id 198662526
journal Applied Physics Letters
other_type [empty string]
publisher [empty string]
title Energy barriers at interfaces of (100)GaAs with atomic layer deposited Al(2)O(3) and HfO(2)
type Peer Reviewed Journal
year 2008
131
struct
authors Cherkaoui, K.,Monaghan, S.,Negara, M. A.,Modreanu, M.,Hurley, P. K.,O'Connell, D.,McDonnell, S.,Hughes, G.,Wright, S.,Barklie, R. C.,Bailey, P.,Noakes, T. C. Q.
doi [empty string]
id 276587000
journal Journal Of Applied Physicsjournal Of Applied Physics
other_type [empty string]
publisher [empty string]
title Electrical, structural, and chemical properties of HfO(2) films formed by electron beam evaporation
type Peer Reviewed Journal
year 2008
132
struct
authors OConnor, E and Long, RD and Cherkaoui, K and Thomas, KK and Chalvet, F and Povey, IM and Pemble, ME and Hurley, PK and Brennan, B and Hughes, G and others
doi [empty string]
id 252761538
journal Applied Physics Letters
other_type [empty string]
publisher [empty string]
title In situ H 2 S passivation of In 0.53 Ga 0.47 As/InP metal-oxide-semiconductor capacitors with atomic-layer deposited HfO 2 gate dielectric
type Peer Reviewed Journal
year 2008
133
struct
authors Farrell, R. A.,Petkov, N.,Cherkaoui, K.,Amenitsch, H.,Holmes, J. D.,Hurley, P. K.,Morris, M. A.;
doi [empty string]
id 16860696
journal Chemphyschem
other_type [empty string]
publisher [empty string]
title Facile and controlled synthesis of ultra-thin low dielectric constant meso/microporous silica films
type Peer Reviewed Journal
year 2008
134
struct
authors Farrell, R. A.,Cherkaoui, K.,Petkov, N.,Amenitsch, H.,Holmes, J. D.,Hurley, P. K.,Morris, M. A.;
doi [empty string]
id 16860749
journal Microelectronics Reliability
other_type [empty string]
publisher [empty string]
title Physical and electrical properties of low dielectric constant self-assembled mesoporous silica thin films
type Peer Reviewed Journal
year 2007
135
struct
authors Buiu, O, Hall, S, Engstrom, O, Raeissi, B, Lemme, M, Hurley, PK, Cherkaoui, K;
doi DOI 10.1016/j.microrel.2007.01.006
id 726052
journal Microelectronics Reliability
other_type Other
publisher [empty string]
title Extracting The Relative Dielectric Constant For "High-K Layers" From Cv Measurements - Errors and Error Propagation
type More Publications
year 2007
136
struct
authors Farrell, RA, Cherkaoui, K, Petkov, N, Amenitsch, H, Holmes, JD, Hurley, PK, Morris, MA;
doi DOI 10.1016/j.microrel.2007.01.020
id 726054
journal Microelectronics Reliability
other_type Other
publisher [empty string]
title Physical and Electrical Properties of Low Dielectric Constant Self-Assembled Mesoporous Silica Thin Films
type More Publications
year 2007
137
struct
authors Hurley, PK, Cherkaoui, K, McDonnell, S, Hughes, G, Groenland, AW;
doi DOI 10.1016/j.microrel.2006..09.030
id 726321
journal Microelectronics Reliability
other_type [empty string]
publisher [empty string]
title Characterisation and Passivation of Interface Defects In (100)-Si/Sio2/Hfo2/Tin Gate Stacks
type Peer Reviewed Journal
year 2007
138
struct
authors Engstr"om, Olof and Raeissi, Bahman and Hall, Steve and Buiu, Octavian and Lemme, Max C and Gottlob, HDB and Hurley, PK and Cherkaoui, Karim
doi [empty string]
id 286421198
journal Solid-State Electronics
other_type [empty string]
publisher [empty string]
title Navigation aids in the search for future high-< i> k</i> dielectrics: Physical and electrical trends
type Other Journal
year 2007
139
struct
authors Volkos, SN, Bernardinia, S, Rigopoulos, N, Efthymiou, ES, Hawkins, ID, Hamilton, B, Dobaczewski, L, Hall, S, Hurley, PK, Delabie, A, Peaker, AR;
doi DOI 10.1016/j.mee.2007.04.047
id 726629
journal Microelectronic Engineering
other_type Other
publisher [empty string]
title Extrinsic Stacking Fault Generation Related to High-K Dielectric Growth On A Si Substrate
type More Publications
year 2007
140
struct
authors Engstrom, O, Raeissi, B, Hall, S, Buiu, O, Lemme, MC, Gottlob, HDB, Hurley, PK, Cherkaoui, K;
doi DOI 10.1016/j.sse.2007.02.021
id 726951
journal Solid-State Electronics
other_type Other
publisher [empty string]
title Navigation Aids In The Search For Future High-K Dielectrics: Physical and Electrical Trends
type More Publications
year 2007
141
struct
authors Volkos, SN,Bernardinia, S,Rigopoulos, N,Efthymiou, ES,Hawkins, ID,Hamilton, B,Dobaczewski, L,Hall, S,Hurley, PK,Delabie, A,Peaker, AR
doi DOI 10.1016/j.mee.2007.04.047
id 160959549
journal Microelectronic Engineering
other_type Other
publisher [empty string]
title Extrinsic stacking fault generation related to high-k dielectric growth on a Si substrate
type More Publications
year 2007
142
struct
authors Buiu, O,Hall, S,Engstrom, O,Raeissi, B,Lemme, M,Hurley, PK,Cherkaoui, K
doi DOI 10.1016/j.microrel.2007.01.006
id 160959571
journal Microelectronics Reliability
other_type Other
publisher [empty string]
title Extracting the relative dielectric constant for "high-k layers" from CV measurements - Errors and error propagation
type More Publications
year 2007
143
struct
authors Negara, AA, Cherkaoui, K, Majhi, P, Young, CD, Tsai, W, Bauza, D, Ghibaudo, G, Hurley, PK;
doi DOI 10.1016/j.mee.2007.04.108
id 726625
journal Microelectronic Engineering
other_type Other
publisher [empty string]
title The Influence of Hfo2 Film Thickness On The Interface State Density and Low Field Mobility of N Channel Hfo2/Tin Gate Mosfets
type More Publications
year 2007
144
struct
authors Dabrowski, J, Hurley, PK, Murota, J, Weber, ER;
doi DOI 10.1016/j.mssp.2006.10.002
id 727579
journal Materials Science In Semiconductor Processing
other_type Other
publisher [empty string]
title Special Issue - Proceedings of E-Mrs Spring Meeting Symposium L On Characterization of High-K Dielectric Materials, Nice, France, 29 May-2 June 2006 - Preface
type More Publications
year 2006
145
struct
authors Cherkaoui, K.,Negara, A.,McDonnell, S.,Hughes, G.,Modreanu, M.,Hurley, P. K.,Ieee,
doi [empty string]
id 276587002
journal [empty string]
other_type [empty string]
publisher [empty string]
title 25th International Conference on Microelectronics
type Conference Publication
year 2006
146
struct
authors Cherkaoui, K, Negara, A, McDonnell, S, Hughes, G, Modreanu, M, Hurley, PK;
doi [empty string]
id 728476
journal 2006 25th International Conference On Microelectronics, Vols 1 and 2
other_type Other
publisher [empty string]
title Electrical Properties of Hfo2 Films Formed By Ion Assisted Deposition
type More Publications
year 2006
147
struct
authors Hurley, PK, Cherkaoui, K;
doi [empty string]
id 728410
journal 2006 25th International Conference On Microelectronics, Vols 1 and 2
other_type Other
publisher [empty string]
title Electrically Active Defects At The Interface Between (100)Si and Hafnium Dioxide Thin Films
type More Publications
year 2006
148
struct
authors Hurley, PK,O'Sullivan, BJ,Afanas'ev, VV,Stesmans, A;
doi DOI 10.1149/1.1846716
id 43337392
journal Electrochemical and Solid State Letters
other_type [empty string]
publisher [empty string]
title Interface states and Pb defects at the Si(100)/HfO2 interface
type Peer Reviewed Journal
year 2005
149
struct
authors Schmidt, M,Lemme, MC,Kurz, H,Witters, T,Schram, T,Cherkaoui, K,Negara, A,Hurley, PK
doi DOI 10.1016/j.mee.2005.04.023
id 160959961
journal Microelectronic Engineering
other_type Other
publisher [empty string]
title Impact of H-2/N-2 annealing on interface defect densities in Si(100)/SiO2/HfO2/TiN gate stacks
type More Publications
year 2005
150
struct
authors Decams, JM,Guillon, H,Jimenez, C,Audier, M,Senateur, JP,Dubourdieu, C,Cadix, O,O'Sullivan, BJ,Modreanu, M,Hurley, PK,Rusworth, S,Leedham, TJ,Davies, H,Fang, Q,Boyd, I
doi DOI 10.1016/j.microrel.2004.11.023
id 160960081
journal Microelectronics Reliability
other_type Other
publisher [empty string]
title Electrical characterization of HfO2 films obtained by UV assisted injection MOCVD
type More Publications
year 2005
151
struct
authors Fang, Q,Liaw, I,Modreanu, M,Hurley, PK,Boyd, IW
doi DOI 10.1016/j.microrel.2004.11.017
id 160960083
journal Microelectronics Reliability
other_type Other
publisher [empty string]
title Post deposition UV-induced O-2 annealing of HfO2 thin films
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year 2005
152
struct
authors Lu, Y,Buiu, O,Hall, S,Hurley, PK
doi DOI 10.1016/j.microrel.2004.11.015
id 160960085
journal Microelectronics Reliability
other_type Other
publisher [empty string]
title Optical and electrical characterization of hafnium oxide deposited by MOCVD
type More Publications
year 2005
153
struct
authors Fang, Q.,Liaw, I.,Modreanu, M.,Hurley, P. K.,Boyd, I. W.
doi [empty string]
id 276587044
journal Microelectronics Reliabilitymicroelectronics Reliability
other_type [empty string]
publisher [empty string]
title Post deposition UV-induced O(2) annealing of HfO(2) thin films
type Peer Reviewed Journal
year 2005
154
struct
authors Dubourdieu, C,Roussel, H,Jimenez, C,Audier, M,Senateur, JP,Lhostis, S,Auvray, L,Ducroquet, F,O'Sullivan, BJ,Hurley, PK,Rushworth, S,Hubert-Pfalzgraf, L
doi 10.1016/j.mseb.2004.12.019
id 243943614
journal Materials Science and Engineering B-Solid State Materials For Advanced Technology
other_type [empty string]
publisher [empty string]
title Pulsed liquid-injection MOCVD of high-K oxides for advanced semiconductor technologies
type Peer Reviewed Journal
year 2005
155
struct
authors Decams, J.M. and Guillon, H. and Jiménez, C. and Audier, M. and Sénateur, J.P. and Dubourdieu, C. and Cadix, O. and O'Sullivan, B.J. and Modreanu, M. and Hurley, P.K. and Rusworth, S. and Leedham, T.J. and Davies, H. and Fang, Q. and Boyd, I.
doi [empty string]
id 276586844
journal Microelectronics Reliability
other_type [empty string]
publisher [empty string]
title Electrical characterization of HfO2 films obtained by UV assisted injection MOCVD
type Other Journal
year 2005
156
struct
authors Fang, Q. and Liaw, I. and Modreanu, M. and Hurley, P.K. and Boyd, I.W.
doi [empty string]
id 276586846
journal Microelectronics Reliability
other_type [empty string]
publisher [empty string]
title Post deposition UV-induced O2 annealing of HfO2 thin films
type Other Journal
year 2005
157
struct
authors Decams, J. M.,Guillon, H.,Jimenez, C.,Audier, M.,Senateur, J. P.,Dubourdieu, C.,Cadix, O.,O'Sullivan, B. J.,Modreanu, M.,Hurley, P. K.,Rusworth, S.,Leedham, T. J.,Davies, H.,Fang, Q.,Boyd, I.
doi [empty string]
id 276587026
journal Microelectronics Reliabilitymicroelectronics Reliability
other_type [empty string]
publisher [empty string]
title Electrical characterization of HfO2 films obtained by UV assisted injection MOCVD
type Peer Reviewed Journal
year 2005
158
struct
authors Dubourdieu, C and Roussel, H and Jimenez, C and Audier, M and S'enateur, JP and Lhostis, S and Auvray, L and Ducroquet, F and O'sullivan, BJ and Hurley, PK and others
doi [empty string]
id 286421215
journal Materials Science and Engineering: B
other_type [empty string]
publisher [empty string]
title Pulsed liquid-injection MOCVD of high-K oxides for advanced semiconductor technologies
type Other Journal
year 2005
159
struct
authors O'Sullivan, BJ,Hurley, PK,O'Connor, E,Modreanu, M,Roussel, H,Jimenez, C,Dubourdieu, C,Audier, M,Senateur, JP
doi 10.1149/1.1765678
id 243938960
journal Journal of the Electrochemical Society
other_type [empty string]
publisher [empty string]
title Electrical evaluation of defects at the Si(100)/HfO2 interface
type Peer Reviewed Journal
year 2004
160
struct
authors Marshall, GF,Jackson, JC,Denton, J,Hurley, PK,Braddell, O,Mathewson, A
doi 10.1109/TED.2003.823051
id 243941332
journal IEEE Transactions On Electron Devices
other_type [empty string]
publisher [empty string]
title Avalanche photodiode-based active pixel imager
type Peer Reviewed Journal
year 2004
161
struct
authors Fang, Q,Zhang, JY,Wang, Z,Modreanu, M,O'Sullivan, BJ,Hurley, PK,Leedham, TL,Hywel, D,Audier, MA,Jimenez, C,Senateur, JP,Boyd, IW
doi 10.1016/j.tsf.2003.11.186
id 243942938
journal Thin Solid Films
other_type [empty string]
publisher [empty string]
title Interface of ultrathin HfO2 films deposited by UV-photo-CVD
type Peer Reviewed Journal
year 2004
162
struct
authors Fang, Q and Zhang, J-Y and Wang, Z and Modreanu, M and O'Sullivan, BJ and Hurley, PK and Leedham, TL and Hywel, D and Audier, MA and Jimenez, C and others
doi [empty string]
id 286421207
journal Thin Solid Films
other_type [empty string]
publisher [empty string]
title Interface of ultrathin HfO< sub> 2</sub> films deposited by UV-photo-CVD
type Other Journal
year 2004
163
struct
authors Fang, Q.,Zhang, J. Y.,Wang, Z.,Modreanu, M.,O'Sullivan, B. J.,Hurley, P. K.,Leedham, T. L.,Hywel, D.,Audier, M. A.,Jimenez, C.,Senateur, J. P.,Boyd, I. W.
doi [empty string]
id 276587046
journal Thin Solid Filmsthin Solid Films
other_type [empty string]
publisher [empty string]
title Interface of ultrathin HfO2 films deposited by UV-photo-CVD
type Peer Reviewed Journal
year 2004
164
struct
authors O'Sullivan, B. J.,Hurley, P. K.,O'Connor, E.,Modreanu, M.,Roussel, H.,Jimenez, C.,Dubourdieu, C.,Audier, M.,Senateur, J. P.
doi [empty string]
id 276587182
journal Journal Of The Electrochemical Societyjournal Of The Electrochemical Society
other_type [empty string]
publisher [empty string]
title Electrical evaluation of defects at the Si(100)/HfO2 interface
type Peer Reviewed Journal
year 2004
165
struct
authors Marshall, GF and Jackson, JC and Denton, J and Hurley, PK and Braddell, O and Mathewson, A
doi [empty string]
id 276842079
journal Electron Devices, IEEE Transactions on
other_type [empty string]
publisher [empty string]
title Avalanche photodiode-based active pixel imager
type Other Journal
year 2004
166
struct
authors Fang, Q. and Zhang, J.-Y. and Wang, Z. and Modreanu, M. and O'Sullivan, B.J. and Hurley, P.K. and Leedham, T.L. and Hywel, D. and Audier, M.A. and Jimenez, C. and Senateur, J.-P. and Boyd, I.W.
doi [empty string]
id 276586853
journal Thin Solid Films
other_type [empty string]
publisher [empty string]
title Interface of ultrathin HfO2 films deposited by UV-photo-CVD
type Other Journal
year 2004
167
struct
authors MacSweeney,D.; McCarthy,K.G.; Floyd,L.; Duane,R.; Hurley, P.; Power, J.A.; Kelly, S.C.; Mathewson, A.;
doi [empty string]
id 343490
journal IEEE Transactions on Semiconductor Manufacturing
other_type [empty string]
publisher [empty string]
title Improving the Accuracy and Efficiency of Junction Capacitance Characterization: Strategies for Probing Configuration and Data Set Size
type Peer Reviewed Journal
year 2003
168
struct
authors Hurley, P. K.; Moran, S.; Wall, L.; Mathewson, A.; Mason, B.;
doi [empty string]
id 374433
journal [empty string]
other_type [empty string]
publisher [empty string]
title Proceedings of 24th European Solid State Research Conference (ESSDERC '94), Edinburgh (September)
type Conference Contribution
year 2003
169
struct
authors Hurley, P. K.; Kalnitsky, A.; Lepert, A.; Moran, S.; Mathewson, A.;
doi [empty string]
id 374475
journal [empty string]
other_type [empty string]
publisher [empty string]
title Proceedings Semiconductor Interface Specialists Conference. SISC, Charleston, SC, USA
type Conference Contribution
year 2003
170
struct
authors Sheehan, E.; Mathewson, A.; Kalnitsky, A.; Hurley, P. K.; Lepert, A.; Mallardeau, C.;
doi [empty string]
id 374478
journal [empty string]
other_type [empty string]
publisher [empty string]
title Proceeding. ESSDERC 95, The Hague
type Conference Contribution
year 2003
171
struct
authors Hurley, P. K.; Wall, L.; Mathewson, A.;
doi [empty string]
id 375095
journal [empty string]
other_type [empty string]
publisher [empty string]
title Proceedings of the European Solid State Device Research Conference (ESSDERC-93), Grenoble
type Conference Contribution
year 2003
172
struct
authors J. C. Jackson, G. Healy, A-M. Kelleher, J. Alderman, J. Donnelly, P. K. Hurley, A. P. Morrison, and A. Mathewson.;
doi [empty string]
id 376014
journal [empty string]
other_type [empty string]
publisher [empty string]
title International Reliability Physics Symposium (IRPS03)
type Conference Publication
year 2003
173
struct
authors Fang, Q,Zhang, JY,Wang, ZM,Wu, JX,O'Sullivan, BJ,Hurley, PK,Leedham, TL,Davies, H,Audier, MA,Jimenez, C,Senateur, JP,Boyd, IW
doi PII S0040-6090(02)01221-X
id 160960580
journal Thin Solid Films
other_type Other
publisher [empty string]
title Investigation of TiO2-doped HfO2 thin films deposited by photo-CVD
type More Publications
year 2003
174
struct
authors MacSweeney, D,McCarthy, KG,Floyd, L,Duane, R,Hurley, P,Power, JA,Kelly, SC,Mathewson, A
doi DOI 10.1109/TSM.2003.811577
id 160960595
journal IEEE Transactions on Semiconductor Manufacturing
other_type [empty string]
publisher [empty string]
title Improving the accuracy and efficiency of junction capacitance characterization: Strategies for probing configuration and data set size
type Peer Reviewed Journal
year 2003
175
struct
authors Fang, Q,Zhang, JY,Wang, ZM,Wu, JX,O'Sullivan, BJ,Hurley, PK,Leedham, TL,Davies, H,Audier, MA,Jimenez, C,Senateur, JP,Boyd, IW
doi [empty string]
id 243941161
journal Thin Solid Films
other_type [empty string]
publisher [empty string]
title Interface of tantalum oxide films on silicon by UV annealing at low temperature
type Peer Reviewed Journal
year 2003
176
struct
authors Hurley, PK,Stesmans, A,Afanas'ev, VV,O'Sullivan, BJ,O'Callaghan, E
doi 10.1063/1.1559428
id 243945288
journal Journal of Applied Physics
other_type [empty string]
publisher [empty string]
title Analysis of P-b centers at the Si(111)/SiO2 interface following rapid thermal annealing
type Peer Reviewed Journal
year 2003
177
struct
authors Modreanu, M. and Gartner, M. and Aperathitis, E. and Tomozeiu, N. and Androulidaki, M. and Cristea, D. and Hurley, P.
doi [empty string]
id 276586862
journal Physica E: Low-Dimensional Systems and Nanostructures
other_type [empty string]
publisher [empty string]
title Investigation on preparation and physical properties of nanocrystalline Si/SiO2 superlattices for Si-based light-emitting devices
type Other Journal
year 2003
178
struct
authors Modreanu, M.,Gartner, A.,Aperathitis, E.,Tomozeiu, N.,Androulidaki, M.,Cristea, D.,Hurley, P.
doi [empty string]
id 276587107
journal Physica E-Low-Dimensional Systems & Nanostructuresphysica E-Low-Dimensional Systems & Nanostructures
other_type [empty string]
publisher [empty string]
title Investigation on preparation and physical properties of nanocrystalline Si/SiO2 superlattices for Si-based light-emitting devices
type Peer Reviewed Journal
year 2003
179
struct
authors Modreanu, M.,Hurley, P. K.,O'Sullivan, B. J.,O'Looney, B.,Senateur, J. P.,Rousell, H.,Rousell, F.,Audier, M.,Dubourdieu, C.,Boyd, I. W.,Fang, Q.,Leedham, T. L.,Rushworth, S.,Jones, A. C.,Davies, H.,Jimenez, C.,Blau, W. J.,Donegan, J. F.,Duke, A. F.,MacCraith, J. A.,McMillan, N. D.,Oconnor, G. M.,Omongain, E.,Toal, V.,McLaughlin, J. A.
doi [empty string]
id 276587127
journal Opto-Ireland 2002: Optics and Photonics Technologies and Applications, Pts 1 and 2Opto-Ireland 2002: Optics and Photonics Technologies and Applications, Pts 1 and 2
other_type [empty string]
publisher [empty string]
title Optical characterization of high-k dielectrics HfO(2) thin films obtained by MOCVD. Opto-Ireland 2002: Optics and Photonics Technologies and Applications, Pts 1 and 2
type Book Chapter
year 2003
180
struct
authors Jackson, JC and Healy, G and Kelleher, AM and Alderman, J and Donnelly, J and Hurley, PK and Morrison, AP and Mathewson, A
doi [empty string]
id 276842264
journal [empty string]
other_type [empty string]
publisher [empty string]
title Reliability Physics Symposium Proceedings, 2003. 41st Annual. 2003 IEEE International
type Conference Publication
year 2003
181
struct
authors MacSweeney, D and McCarthy, KG and Floyd, L and Duane, R and Hurley, P and Power, JA and Kelly, SC and Mathewson, A
doi [empty string]
id 276842321
journal IEEE Transactions on Semiconductor Manufacturing
other_type [empty string]
publisher [empty string]
title SPECIAL SECTION ON THE INTERNATIONAL CONFERENCE ON MICROELECTRONICS TEST STRUCTURES-SPECIAL SECTION PAPERS-Improving the Accuracy and Efficiency of Junction Capacitance Characterization
type Peer Reviewed Journal
year 2003
182
struct
authors Fang, Q and Zhang, J-Y and Wang, ZM and Wu, JX and O'Sullivan, BJ and Hurley, PK and Leedham, TL and Davies, H and Audier, MA and Jimenez, C and others
doi [empty string]
id 286421205
journal Thin Solid Films
other_type [empty string]
publisher [empty string]
title Investigation of TiO< sub> 2</sub>-doped HfO< sub> 2</sub> thin films deposited by photo-CVD
type Other Journal
year 2003
183
struct
authors Fang, Q and Zhang, J-Y and Wang, ZM and Wu, JX and O'Sullivan, BJ and Hurley, PK and Leedham, TL and Davies, H and Audier, MA and Jimenez, C and others
doi [empty string]
id 286421209
journal Thin Solid Films
other_type [empty string]
publisher [empty string]
title Characterisation of HfO< sub> 2</sub> deposited by photo-induced chemical vapour deposition
type Other Journal
year 2003
184
struct
authors Modreanu, M and Gartner, M and Aperathitis, E and Tomozeiu, N and Androulidaki, M and Cristea, D and Hurley, Paul
doi [empty string]
id 286421211
journal Physica E: Low-dimensional Systems and Nanostructures
other_type [empty string]
publisher [empty string]
title Investigation on preparation and physical properties of nanocrystalline Si/SiO< sub> 2</sub> superlattices for Si-based light-emitting devices
type Other Journal
year 2003
185
struct
authors MacSweeney,D.; McCarthy,K.G.; Floyd,L.; Mathewson,A.; Hurley,P.; Power,S.; Kelly,S.;
doi [empty string]
id 375988
journal [empty string]
other_type [empty string]
publisher [empty string]
title International Conference on Microelectronic Test Structures (ICMTS 2002)
type Conference Publication
year 2002
186
struct
authors Zhang, JY,Boyd, IW,O'Sullivan, BJ,Hurley, PK,Kelly, PV,Senateur, JP
doi PII S0022-3093(02)00973-0
id 160960720
journal Journal of Non-Crystalline Solids
other_type Other
publisher [empty string]
title Nanocrystalline TiO2 films studied by optical, XRD and FTIR spectroscopy
type More Publications
year 2002
187
struct
authors Zhang, Jun-Ying and Boyd, Ian W and O'Sullivan, BJ and Hurley, PK and Kelly, PV and Senateur, J-P
doi [empty string]
id 286421197
journal Journal of non-crystalline solids
other_type [empty string]
publisher [empty string]
title Nanocrystalline TiO< sub> 2</sub> films studied by optical, XRD and FTIR spectroscopy
type Other Journal
year 2002
188
struct
authors J. C. Jackson, P. K. Hurley, A. P. Morrison, B. Lane, and A. Mathewson.;
doi [empty string]
id 340553
journal Applied Physics Letters
other_type [empty string]
publisher [empty string]
title Comparing leakage currents and dark count rates in Geiger-Mode avalanche photodiodes
type Peer Reviewed Journal
year 2002
189
struct
authors Jackson, JC,Hurley, PK,Lane, B,Mathewson, A,Morrison, AP;
doi DOI 10.1063/1.1483119
id 43338268
journal Applied Physics Letters
other_type [empty string]
publisher [empty string]
title Comparing leakage currents and dark count rates in Geiger-mode avalanche photodiodes
type Peer Reviewed Journal
year 2002
190
struct
authors Hurley, PK,O'Sullivan, BJ,Cubaynes, FN,Stolk, PA,Widdershoven, FP,Das, JH;
doi DOI 10.1149/1.1447946
id 43338302
journal Journal of the Electrochemical Society
other_type [empty string]
publisher [empty string]
title Examination of the Si(111)-SiO2, Si(110)-SiO2, and Si(100)-SiO2 interfacial properties following rapid thermal annealing
type Peer Reviewed Journal
year 2002
191
struct
authors MacSweeney, D and McCarthy, KG and Floyd, L and Mathewson, A and Hurley, P and Power, JA and Kelly, SC
doi [empty string]
id 276842197
journal [empty string]
other_type [empty string]
publisher [empty string]
title Microelectronic Test Structures, 2002. ICMTS 2002. Proceedings of the 2002 International Conference on
type Conference Publication
year 2002
192
struct
authors Jackson, JC and Hurley, PK and Lane, B and Mathewson, A and Morrison, AP
doi [empty string]
id 276842035
journal Applied physics letters
other_type [empty string]
publisher [empty string]
title Comparing leakage currents and dark count rates in Geiger-mode avalanche photodiodes
type Other Journal
year 2002
193
struct
authors O'Sullivan, BJ,Hurley, PK,Leveugle, C,Das, JH
doi [empty string]
id 243940786
journal Journal of Applied Physics
other_type [empty string]
publisher [empty string]
title Si(100)-SiO2 interface properties following rapid thermal processing
type Peer Reviewed Journal
year 2001
194
struct
authors OSullivan, BJ and Hurley, PK and Leveugle, C and Das, JH
doi [empty string]
id 286421201
journal Journal of Applied Physics
other_type [empty string]
publisher [empty string]
title Si (100)--SiO 2 interface properties following rapid thermal processing
type Other Journal
year 2001
195
struct
authors Zhang, JY,Fang, Q,Wu, JX,Xu, CY,O'Sullivan, BJ,Hurley, PK,Leedham, TL,Audier, MA,Senateur, JP,Boyd, IW
doi [empty string]
id 243943017
journal Journal De Physique Iv
other_type [empty string]
publisher [empty string]
title Photo-CVD deposited TiO(2) films studied by Raman and XPS spectroscopy
type Peer Reviewed Journal
year 2001
196
struct
authors O'Sullivan, BJ,O'Connor, E,Howley, R,Hurley, PK,Zhang, JY,Kaliwoh, N,Fang, Q,Boyd, IW,Dubourdieu, C,Audier, MA,Senateur, JP,Davies, HO,Leedham, TJ,Jones, AC,Semmache, B
doi [empty string]
id 243943392
journal Journal De Physique Iv
other_type [empty string]
publisher [empty string]
title Effects of active surface nitridation on the properties of high permittivity films deposited by UV-assisted CVD
type Peer Reviewed Journal
year 2001
197
struct
authors Jackson, JC and Morrison, AP and Hurley, P and Harrell, WR and Damjanovic, D and Lane, B and Mathewson, A
doi [empty string]
id 276842059
journal [empty string]
other_type [empty string]
publisher [empty string]
title Microelectronic Test Structures, 2001. ICMTS 2001. Proceedings of the 2001 International Conference on
type Conference Publication
year 2001
198
struct
authors O’Sullivan, BJ and Hurley, PK and Mathewson, A and Das, JH and Daniel, AD
doi [empty string]
id 276842074
journal Microelectronics Reliability
other_type [empty string]
publisher [empty string]
title Interface properties of the Si (100)--SiO< sub> 2</sub> system formed by rapid thermal oxidation
type Other Journal
year 2000
199
struct
authors Mooney, MB,Hurley, PK,O'Sullivan, BJ,Beechinor, JT,Zhang, JY,Boyd, IW,Kelly, PV,Senateur, JP,Crean, GM,Jimenez, C,Paillous, M
doi [empty string]
id 243941633
journal Microelectronic Engineering
other_type [empty string]
publisher [empty string]
title Characteristics of tantalum pentoxide dielectric films deposited on silicon by excimer-lamp assisted photo-induced CVD using an injection liquid source.
type Peer Reviewed Journal
year 1999
200
struct
authors OSullivan, BJ and Hurley, PK and Mathewson, A and Beanland, R and Rodrigues, R and Kay, P
doi [empty string]
id 276842364
journal [empty string]
other_type [empty string]
publisher [empty string]
title Solid-State Device Research Conference, 1999. Proceeding of the 29th European
type Conference Publication
year 1999
201
struct
authors Hurley, PK and Rodrigues, R and Kay, P and Thakur, RPS and Clarke, D and Sheehan, E and Mathewson, A
doi [empty string]
id 276842171
journal [empty string]
other_type [empty string]
publisher [empty string]
title Plasma Process-Induced Damage, 1999 4th International Symposium on
type Conference Publication
year 1999
202
struct
authors Leveugle, C,Hurley, PK,Mathewson, A,Moran, S,Sheehan, E,Kalnitsky, A
doi [empty string]
id 160958201
journal Microelectronics Reliability
other_type Other
publisher [empty string]
title Observation of high interface state densities at the silicon/oxide interface for low doped polysilicon/oxide/silicon capacitor structures
type More Publications
year 1998
203
struct
authors Leveugle, C and Hurley, PK and Mathewson, A and Moran, S and Sheehan, E and Kalnitsky, A
doi [empty string]
id 276842101
journal Microelectronics Reliability
other_type [empty string]
publisher [empty string]
title Observation of high interface state densities at the silicon/oxide interface for low doped polysilicon/oxide/silicon capacitor structures
type Other Journal
year 1998
204
struct
authors Conneely, C,O'Connell, B,Hurley, P,Lane, W,Adams, L
doi [empty string]
id 160958115
journal IEEE Transactions On Nuclear Science
other_type Other
publisher [empty string]
title Strategies for MilliRad sensitivity in PMOS dosimeters
type More Publications
year 1998
205
struct
authors Sheehan, E and Hurley, PK and Mathewson, A
doi [empty string]
id 276842182
journal Microelectronics Reliability
other_type [empty string]
publisher [empty string]
title Hot carrier degradation mechanisms in sub-micron< i> p</i> channel MOSFETs: Impact on low frequency (1/f) noise behaviour
type Other Journal
year 1998
206
struct
authors Hurley, PK and Leveugle, C and Mathewson, A and Doyle, D and Whiston, S and Prendergast, J and Lundgren, P
doi [empty string]
id 276842382
journal MRS Proceedings
other_type [empty string]
publisher [empty string]
title The Impact of Rapid Thermal Annealing on the Properties of the Si (100)-SiO2 Interface
type Other Journal
year 1998
207
struct
authors Leveugle, C and Hurley, PK and Mathewson, A and Moran, S and Sheehan, E and Kalnitsky, A and Lepert, A and Beinglass, I and Venkatesan, M
doi [empty string]
id 276842071
journal Microelectronic engineering
other_type [empty string]
publisher [empty string]
title Impact of the polysilicon doping level on the properties of the< i> silicon/oxide</i> interface in polysilicon/oxide/silicon capacitor structures
type Other Journal
year 1997
208
struct
authors Kalnitsky, A,Hurley, PK,Lepert, A;
doi [empty string]
id 43339824
journal Journal of the Electrochemical Society
other_type [empty string]
publisher [empty string]
title Dopants (P, As, and B) in the polycrystalline silicon/titanium silicide system: Redistribution and activation
type Peer Reviewed Journal
year 1997
209
struct
authors Hurley, PK,Sheehan, E,Moran, S,Mathewson, A
doi [empty string]
id 160958819
journal Microelectronics and Reliability
other_type Other
publisher [empty string]
title The impact of oxide degradation on the low frequency (1/F) noise behaviour of P channel MOSFETs
type More Publications
year 1996
210
struct
authors Hurley, P. K.; Sheehan, E.; Moran, S.; Mathewson, A.;
doi [empty string]
id 348384
journal Microelectronics and Reliability
other_type [empty string]
publisher [empty string]
title Impact of Oxide Degradation on the Low Frequency (1/f) Noise Behaviour of p Channel MO'SFETs [B2671]
type Peer Reviewed Journal
year 1996
211
struct
authors Duane, R and Martin, A and O'Donovan, P and Hurley, P and O'Sullivan, P and Mathewson, A
doi [empty string]
id 276842125
journal Microelectronics Reliability
other_type [empty string]
publisher [empty string]
title Investigation of trapped charge in oxides under Fowler-Nordheim stress using low bias conditions
type Other Journal
year 1996
212
struct
authors Moran, S and Hurley, PK and Mathewson, A
doi [empty string]
id 276842141
journal [empty string]
other_type [empty string]
publisher [empty string]
title Microelectronic Test Structures, 1996. ICMTS 1996. Proceedings. 1996 IEEE International Conference on
type Conference Publication
year 1996
213
struct
authors Yuan, XJ,Kivi, M,Taylor, S,Hurley, P;
doi [empty string]
id 43340146
journal IEEE Electron Device Letters
other_type [empty string]
publisher [empty string]
title Effects of Fowler-Nordheim stress on interface trap density and emission cross sections in n-MOSFET's studied by three-level charge pumping
type Peer Reviewed Journal
year 1996
214
struct
authors MEEHAN, A,OSULLIVAN, P,HURLEY, P,MATHEWSON, A
doi [empty string]
id 243945199
journal Quality and Reliability Engineering International
other_type [empty string]
publisher [empty string]
title HOT-CARRIER RELIABILITY LIFETIMES AS PREDICTED BY BERKELEYS MODEL
type Peer Reviewed Journal
year 1995
215
struct
authors Kalnitsky, Alex and Hurley, P and Lepert, Arnaud and Mallardeau, C and Sheehan, Eoin and Mathewson, A
doi [empty string]
id 276842278
journal [empty string]
other_type [empty string]
publisher [empty string]
title Solid State Device Research Conference, 1995. ESSDERC'95. Proceedings of the 25th European
type Conference Publication
year 1995
216
struct
authors Hurley, P. K.; Wall, L.; Moran, S.; Mathewson, A.;
doi [empty string]
id 348383
journal Semiconductor Science and Technology
other_type [empty string]
publisher [empty string]
title Capacitance-Voltage Characteristics of Heavily Doped Silicon-Insulator-Silicon Capacitors [B2669]
type Peer Reviewed Journal
year 1995
217
struct
authors MEEHAN, A,OSULLIVAN, P,HURLEY, P,MATHEWSON, A;
doi [empty string]
id 43340063
journal Microelectronics Journal
other_type [empty string]
publisher [empty string]
title EVALUATION OF HOT-CARRIER DEGRADATION OF N-CHANNEL MOSFETS AT LOW GATE BIAS
type Peer Reviewed Journal
year 1994
218
struct
authors Hurley, PK and Moran, S and Wall, L and Mathewson, A and Mason, B
doi [empty string]
id 276842183
journal [empty string]
other_type [empty string]
publisher [empty string]
title Solid State Device Research Conference, 1994. ESSDERC'94. 24th European
type Conference Publication
year 1994
219
struct
authors Hurley, PK and Wall, L and Mathewson, A
doi [empty string]
id 276842353
journal [empty string]
other_type [empty string]
publisher [empty string]
title Solid State Device Research Conference, 1993. ESSDERC'93. 23rd European
type Conference Publication
year 1993
research-collaborators
array
1
struct
company Stanford University
country U.S.A.
description US Ireland Collaboration
name Prof Paul C McIntyre
role US Ireland Collaboration
theme Energy: water spliting anodes
type E
2
struct
company University of Texas at Dallas
country U.S.A.
description 2D Semiconductors for future energy efficient integrated circuits US Ireland Collaboration
name Prof Robert Wallace
role US Ireland Collaboration and host for visiting reserch profesor position at UT Dallas in 2009
theme Energy efficient integrated circuits
type E
3
struct
company INTEL Corporation
country U.S.A.
description Investigating new materials for next generation integrated circuits
name Dr Kelin Kuhn Intel Fellow
role Head of Group
theme Energy Efficient Transistors
type E
4
struct
company IBM Yorktown
country U.S.A.
description IBM summer PhD fellowship
name Dr. Richard Haight
role photoemision studies of semiconductors
theme New materials for future integrated circuits
type E
5
struct
company Glasgow University
country SCOTLAND
description EU Project Collaboration
name Prof Iain Thayne
role EU project partner
theme high performace III-V logic devices
type E
6
struct
company IBM Zurich
country SWITZERLAND
description 3D integration of III-V MOSFETs
name Dr Jean Fompeyrine
role EU Project Coordinator
theme 3D Integration
type E
7
struct
company Universitat Autonoma de Barcelona
country SPAIN
description Dielectrics in Nano-electronics
name Prof Enrique Miranda
role Electrical Characteristaion and host Professor for reseach visit in 2010
theme Dieletrics in Nano-electronics
type E
8
struct
company University of Siegen
country GERMANY
description high-k oxides for MOSFETs
name Prof Max Lemme
role high-k materials and 2D semiconductors
theme New materials for future logic devices
type E
9
struct
company Liverpool Univeristy
country UNITED KINGDOM
description EU project collaborations
name Prof Steve Hall
role high-k oxides for electronics
theme Nanoelectronics
type E
10
struct
company Trinity College Dublin
country IRELAND
description 2D semiconductors for future logic devices
name Prof Georg Duesberg
role Provision of 2D semiconductors
theme Nanoelectronics
type E
11
struct
company Trinity College Dublin
country IRELAND
description Electrical characterisation of nanowires and nanowire networks
name Prof John Boland
role Fabrication and contacting of nanowire networks
theme Nanoelectronics and Memory Devices
type E
12
struct
company IMEP Grenoble
country FRANCE
description Hall Measurements and Analysis on III-V MOSFETs
name Prof Gerard Ghibaudo
role Hall Measurements and Analysis
theme Nanoelectronics
type E
13
struct
company Catholic University of Leuven
country BELGIUM
description Internal Photoemission analysis of oxides on compound semiconductors
name Prof Valery Afanasev
role Internal Photoemission
theme Nanoelectronics
type E
14
struct
company Tyndall
country IRELAND
description ALD of dielectrics
name Prof Martyn Pemble
role ALD of dielectrics
theme Nanoelectronics
type I
15
struct
company Tyndall
country IRELAND
description ALD oxides on Si, III-V and 2D semiconductors
name Dr Ian Povey
role ALD oxides
theme Nanoelectronics and Energy
type I
16
struct
company Tyndall
country IRELAND
description modelling oxides on III-V semiconductor and semimetals
name Prof Jim Greer
role III-V oxide interface and semimetals
theme Nanoelectronics
type I
17
struct
company Dublin City University
country IRELAND
description XPS studies f oxides on semiconductors
name Prog Greg Hughes
role XPS studies
theme Nanoelectronics
type E
18
struct
company Queens University Belfast
country UNITED KINGDOM
description Formation of Ge and 2D devices
name Dr David McNeill
role Ge devices and 2D semiconductors
theme Nanoelectronics
type E
19
struct
company Trinity College Dublin
country IRELAND
description Electron Spin Resonance of oxides on Si and III-V semiconductors
name Dr Robert Barklie
role Electron Spin Resonance
theme Nanoelectronics
type E
20
struct
company University of Texas at Dallas
country U.S.A.
description Modelling of III-V MOS systems
name Prof Masimmo Fischetti
role Modelling of III-V MOS systems
theme Nanoelectronics
type E
21
struct
company Chalmers University
country SWEDEN
description EU collaborations on new materials for nanoelectronics
name Prof Olof Engstrom
role high dielectric constant oxides on semiconductors
theme Nanoelectronics
type E
research-interests <p><span>Paul leads a research team of ten PhD students, post-doctoral researchers, visiting students and Tyndall Research staff who perform basic research on high dielectric constant (high-<i>k</i>) thin films for applications in nanoelectronics. The current research work covers use of high-<i>k</i> oxides in conjunction with III-V and 2D semiconductor materials for future energy efficient logic devices and the use of high-<i>k</i> films in integrated capacitors. The groups are also exploring the use of MOS systems in energy applications as well as investigating the electrical properties of emerging phase change materials. Paul received an Intel Outstanding Researcher award for his work in high-<i>k</i>/III-V interface defect studies in 2012. </span>Paul is a member of the Technical Committee of the Insulating Films on Semiconductors (INFOS) conference and the International Workshop on Dielectrics in Microelectronics (WoDiM). In addition to research activities, he is a part time lecturer in the Department of Electrical Engineering at University College Cork. <span>He has published over one hundred papers in the field of micro and nanoelectronics, and has given over 25 invited presentations and seminars in the high-<i>k</i> area from 2006 to 2014.</span></p>
research-projects
array
1
struct
award 5795
description UC
end_date 28-AUG-07
funder Science Foundation of Ireland
project_id R12174
role Principal Investigator
start_date 05-JUN-07
title SFI-Summer Student David Kohen
2
struct
award 5794
description UC
end_date 28-AUG-06
funder Science Foundation of Ireland
project_id R11740
role Principal Investigator
start_date 05-JUN-06
title Summer Student - David Hondagneu
3
struct
award 3800
description UC
end_date 31-OCT-08
funder Science Foundation of Ireland
project_id R12619
role Principal Investigator
start_date 01-MAY-08
title SFI"Future Oxides & Channel Materials for Ultimate Scaling" FOCUS
4
struct
award 128925
description UC
end_date 31-DEC-15
funder European Union
project_id R12496
role Principal Investigator
start_date 01-JAN-08
title EU 'Silicon-based Nanostructures & Nanodevices for Long Term Nanoelectronics Applications'
5
struct
award 6655
description UC
end_date 31-DEC-12
funder Science Foundation of Ireland
project_id R14398
role Principal Investigator
start_date 01-JAN-12
title Fabrication and characterisation of Schottky contacts and capacitor structures on Chalcogenide passivated germanium.
6
struct
award 286538
description UC
end_date 31-DEC-15
funder Science Foundation of Ireland
project_id R13353
role Principal Investigator
start_date 01-OCT-09
title Future Oxides and Channel Materials for Ultimate Scaling (FOCUS)
7
struct
award 123650
description UC
end_date 01-FEB-14
funder Science Foundation of Ireland
project_id R14399
role Principal Investigator
start_date 01-JAN-12
title The junctionless InGaAs MOSFET - The platform and the process.
8
struct
award 729850
description UC
end_date 30-JUN-12
funder Science Foundation of Ireland
project_id R11444
role Principal Investigator
start_date 01-AUG-05
title SFI "High Dielectric Constant Materials for Future ICT"
9
struct
award 48006
description UC
end_date 28-FEB-10
funder Irish Research Council for Science, Engineering & Technology (IRCSET)
project_id R11844
role Principal Investigator
start_date 01-OCT-06
title IRCSET Scholarship - Rathnait Long
10
struct
award 129204
description UC
end_date 30-MAY-08
funder Science Foundation of Ireland
project_id R12447
role Principal Investigator
start_date 01-DEC-07
title Total External Reflection X-ray Fluorescence Spectrometer for Compositional Analysis of Thin Films
11
struct
award 228948
description UC
end_date 30-SEP-12
funder Irish Research Council for Science, Engineering & Technology (IRCSET)
project_id R13282
role Principal Investigator
start_date 01-OCT-09
title IRCSET-Marie Curie International Mobility Fellowships in Science Engineering and Technology
12
struct
award 370587
description UC
end_date 30-NOV-15
funder European Union
project_id R14880
role Principal Investigator
start_date 01-DEC-12
title SYnthesis and functionality of chalcogenide NAnostructure for PhasSE change memories.
13
struct
award 51150
description UC
end_date 31-DEC-21
funder Industry
project_id R15382
role Principal Investigator
start_date 01-DEC-13
title Hopkins Communicaqtions WoDIM Conference 2014
14
struct
award 482628
description UC
end_date 30-APR-17
funder European Union
project_id R15462
role Principal Investigator
start_date 01-NOV-13
title Compound Semiconductors for 3D integration.
15
struct
award 320451
description UC
end_date 31-JUL-18
funder Science Foundation of Ireland
project_id R15923
role Principal Investigator
start_date 01-DEC-14
title Understanding the nature of Interfaces in two dimensional Electronic Devices.
16
struct
award 262243
description UC
end_date 31-MAY-18
funder Science Foundation of Ireland
project_id R15949
role Principal Investigator
start_date 01-SEP-14
title Copper diffusion barrier layers for advanced interconnect integration.
17
struct
award 851853
description SFI Principal Investigator Award
end_date 31-AUG-15
funder Science Foundation Ireland
project_id 09/IN.1/I2633
role [empty string]
start_date 01-APR-10
title "Investigating Emerging Non-Silicon Transistors (INVENT)"
18
struct
award 618512
description SFI Strategic Research Cluster
end_date 31-MAY-13
funder Science Foundation Ireland
project_id 5532Y4
role [empty string]
start_date 01-DEC-07
title FORME
19
struct
award 15000
description Fieldeffect controllable antifuse structures based on dielectric breakdown
end_date 31-JUL-12
funder Other: Not Listed
project_id Q0818002H
role [empty string]
start_date 01-AUG-10
title Fieldeffect controllable antifuse structures based on dielectric breakdown
20
struct
award 40000
description Examination of interface effects in III-V related device structures - including tunnel FETs
end_date 29-MAR-13
funder Intel Corporation
project_id Research Plan No 1
role [empty string]
start_date 02-APR-12
title Dit extractions and interpretation on III-V device related structures
21
struct
award 110000
description Development of measurement capability for high-k/InGaAs systems and CV and GV analysis of samples from INTEL CR
end_date 30-MAR-12
funder Intel Corporation
project_id Research Plan 1
role [empty string]
start_date 01-APR-11
title Development of measurement capability for high-k/InGaAs systems and CV and GV analysis of samples from INTEL CR
22
struct
award 302000
description “Research into Emerging Nano-structured Electrodes for the splitting of Water (RENEW)
end_date 30-NOV-16
funder Science Foundation Ireland
project_id 13/US/I2543
role [empty string]
start_date 01-DEC-13
title “Research into Emerging Nano-structured Electrodes for the splitting of Water (RENEW)
23
struct
award 100000
description Characteristaion of 2 dimesional semiconductor Materials
end_date 28-FEB-15
funder Intel Corporation
project_id Research Plan 1
role [empty string]
start_date 01-MAR-14
title Characteristaion of 2D Materials
24
struct
award 40000
description Investigating the capacitance and conductance of narrow band gap MOS systems and its possible application to Cox extraction
end_date 28-MAR-14
funder Intel Corporation
project_id Research Plan No 1
role [empty string]
start_date 01-APR-13
title Investigating the capacitance and conductance of narrow band gap MOS systems and its possible application to Cox extraction
25
struct
award 140000
description Pulling the Limits of NanoCMOS electronics (PULLNANO) EU Integrated Project
end_date 30-SEP-09
funder European Commission
project_id 026828
role [empty string]
start_date 01-JUN-06
title Pulling the Limits of NanoCMOS electronics (PULLNANO) EU Integrated Project
26
struct
award 130000
description Silicon-based nanostructures and nanodevices for nanoelectronics (NANOSIL) EU Network of Excellence
end_date 30-DEC-10
funder European Commission
project_id 216171
role [empty string]
start_date 01-JAN-08
title Silicon-based nanostructures and nanodevices for nanoelectronics (NANOSIL) EU Network of Excellence
27
struct
award 372000
description Epitaxial Nanostructured GaAs on silicon for next generation Electronics (ENGAGE)
end_date 31-AUG-12
funder Enterprise Ireland
project_id IR/2008/0006
role [empty string]
start_date 03-FEB-09
title Epitaxial Nanostructured GaAs on silicon for next generation Electronics (ENGAGE)
28
struct
award 255000
description An investigation of carrier transport in compound semiconductor MOSFETs
end_date 28-SEP-12
funder Irish Research Council
project_id 6080-Y4
role [empty string]
start_date 01-OCT-09
title An investigation of carrier transport in compound semiconductor MOSFETs
29
struct
award 285000
description Ferroelectrics for Europe (FLEUR)
end_date 25-AUG-04
funder European Commission
project_id IST-2000-30153
role [empty string]
start_date 03-SEP-01
title Ferroelectrics for Europe (FLEUR)
30
struct
award 80000
description ‘Deposition of High-k Dielectrics on III-V Substrates’
end_date 25-SEP-09
funder Irish Research Council
project_id 4930
role [empty string]
start_date 02-OCT-06
title ‘Deposition of High-k Dielectrics on III-V Substrates’
31
struct
award 345000
description Tantalum pentoxide photodeposition on silicon (TOPS)
end_date 30-JUN-03
funder European Commission
project_id TOPS 01
role [empty string]
start_date 01-JUN-00
title Tantalum pentoxide photodeposition on silicon (TOPS)
surname HURLEY
teaching-external-students
array
1
struct
degree PHD
graduation_year 2009
institution UCC
student_name Adi Negara
thesis A STUDY OF ELECTRON MOBILITY IN HFO2/TIN GATE MOSFETS
2
struct
degree PHD
graduation_year 2010
institution UCC
student_name Rathnait Long
thesis A Study of the Electronic and Structural Properties of the High-&#954;/In0.53Ga0.47As System
3
struct
degree PHD
graduation_year 2013
institution UCC
student_name Vladimir Djara
thesis Development of Inversion-Mode and Junctiolness InGaAs MOSFETs
4
struct
degree PHD
graduation_year 2014
institution UCC
student_name Eamon O'Connor
thesis Investigation of electrically active defects at the interface of high-k dielectrics and compound semiconductors
teaching-highlights [empty string]
teaching-interests <p>Semiconductor materials and devices for information and communication technologies</p><p>Specialist guest lectures covering recent technology challenges and developments for state of the art transistors</p>
teaching-modules
array [empty]
teaching-students
array [empty]
title Prof.